KR970051901A - Mask holder for large area hard mask - Google Patents

Mask holder for large area hard mask Download PDF

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Publication number
KR970051901A
KR970051901A KR1019950061812A KR19950061812A KR970051901A KR 970051901 A KR970051901 A KR 970051901A KR 1019950061812 A KR1019950061812 A KR 1019950061812A KR 19950061812 A KR19950061812 A KR 19950061812A KR 970051901 A KR970051901 A KR 970051901A
Authority
KR
South Korea
Prior art keywords
mask
substrate
hard mask
fixed vacuum
holder
Prior art date
Application number
KR1019950061812A
Other languages
Korean (ko)
Inventor
김한
최정옥
정효수
최영환
Original Assignee
이우복
사단법인 고등기술연구원 연구조합
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이우복, 사단법인 고등기술연구원 연구조합 filed Critical 이우복
Priority to KR1019950061812A priority Critical patent/KR970051901A/en
Publication of KR970051901A publication Critical patent/KR970051901A/en

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  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

본 발명은 기판에 박막을 증착 시키기 위해 사용하는 하드 마스크와 기판을 고정시킬 수 있는 마스크 홀더를 사용하여 하드 마스크와 기판을 접합 고정시킨 후 박막제조공정에 의해 박막을 형성함으로써, 두께와 선폭이 일정하고 적은 비용과 짧은 시간내에 박막을 제조할 수 있는 고정하기 위한 대면적 하드 마이크용 마스크 홀더를 제공한다.The present invention uses a hard mask used to deposit a thin film on a substrate and a mask holder capable of fixing the substrate to bond and fix the hard mask and the substrate to form a thin film by a thin film manufacturing process, whereby the thickness and line width are constant. The present invention provides a mask holder for a large-area hard microphone for fixing a thin film to be manufactured at a low cost and in a short time.

Description

대면적 하드 마스크용 마스크 홀더Mask holder for large area hard mask

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3A도는 본 발명에 따른 마스크 홀더를 나타낸 사시도, 제3B도는 제3A도의 평면도, 제3C도는 제3A도의 배면도, 제3D도는 제3C도의 A-A를 절단하여 나타낸 단면도.3A is a perspective view showing a mask holder according to the present invention, FIG. 3B is a plan view of FIG. 3A, FIG. 3C is a rear view of FIG. 3A, and FIG. 3D is a sectional view cut along A-A of FIG.

Claims (2)

하드 마스크와 기판을 장착하기 위한 프레임 지지대와, 상기 지지대의 한쪽 상부에 설치되어 있는 진공펌프의 연결되는 마스크 고정 진공밸브 및 기판 고정 진공밸브와, 상기 프레임 내부의 안쪽에 형성되어 있고 마스크 고정 진공밸브에 의해 공기가 유입되거나 배출되는 마스크 고정 진공통로와, 상기 프레임 내부의 바깥쪽에 형성되어 있고 기판 고정 진공밸브에 의해 공기가 유입되거나 배출되는 기판 고정 진공통로와, 상기 마스크 고정 진공통로 및 기판 고정 진공통로에 형성되어 있는 다수의 마스크 고정홀 및 기판 고정홀과, 상기 다수의 마스크 고정홀 및 기판 고정홀 마다 설치되어 있는 오링을 포함하는 대면적 하드 마스크용 마스크 홀더.A frame holding vacuum valve and a substrate holding vacuum valve connected to a frame support for mounting a hard mask and a substrate, and a vacuum pump installed on one side of the support, and a mask fixed vacuum valve formed inside the frame. A mask fixed vacuum passage through which air is introduced or discharged by the air, a substrate fixed vacuum passage formed outside the inside of the frame and introduced or discharged by a substrate fixed vacuum valve, and a mask fixed vacuum passage and a substrate fixed vacuum by A mask holder for a large-area hard mask comprising a plurality of mask fixing holes and a substrate fixing hole formed in the passage, and an O-ring provided for each of the mask fixing holes and the substrate fixing holes. 제1항에 있어서, 상기 오링은 고무인 것을 특징으로 하는 대면적 하드 마스크용 마스크 홀더The mask holder for a large area hard mask according to claim 1, wherein the O-ring is rubber. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950061812A 1995-12-28 1995-12-28 Mask holder for large area hard mask KR970051901A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950061812A KR970051901A (en) 1995-12-28 1995-12-28 Mask holder for large area hard mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950061812A KR970051901A (en) 1995-12-28 1995-12-28 Mask holder for large area hard mask

Publications (1)

Publication Number Publication Date
KR970051901A true KR970051901A (en) 1997-07-29

Family

ID=66621727

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950061812A KR970051901A (en) 1995-12-28 1995-12-28 Mask holder for large area hard mask

Country Status (1)

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KR (1) KR970051901A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003086A (en) * 2001-06-29 2003-01-09 산요 덴키 가부시키가이샤 Method of fabricating electro-luminescence display device
KR100463532B1 (en) * 2002-10-22 2004-12-29 엘지전자 주식회사 fabrication method for display panel using large scale full-color
KR100485300B1 (en) * 2001-06-29 2005-04-27 산요덴키가부시키가이샤 Method of fabricating electroluminescence display device
KR100578262B1 (en) * 2003-11-13 2006-05-11 주식회사 디엠에스 Apparatus for fixing mask by vacuum and exposure method of the same
KR100671658B1 (en) * 2005-01-05 2007-01-19 삼성에스디아이 주식회사 Mask frame and method for fixing a mask on the mask frame
KR100693161B1 (en) * 2005-05-02 2007-03-13 엘지전자 주식회사 Mask holding apparatus for exposure

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003086A (en) * 2001-06-29 2003-01-09 산요 덴키 가부시키가이샤 Method of fabricating electro-luminescence display device
KR100485300B1 (en) * 2001-06-29 2005-04-27 산요덴키가부시키가이샤 Method of fabricating electroluminescence display device
KR100463532B1 (en) * 2002-10-22 2004-12-29 엘지전자 주식회사 fabrication method for display panel using large scale full-color
KR100578262B1 (en) * 2003-11-13 2006-05-11 주식회사 디엠에스 Apparatus for fixing mask by vacuum and exposure method of the same
KR100671658B1 (en) * 2005-01-05 2007-01-19 삼성에스디아이 주식회사 Mask frame and method for fixing a mask on the mask frame
KR100693161B1 (en) * 2005-05-02 2007-03-13 엘지전자 주식회사 Mask holding apparatus for exposure

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