KR970051901A - Mask holder for large area hard mask - Google Patents
Mask holder for large area hard mask Download PDFInfo
- Publication number
- KR970051901A KR970051901A KR1019950061812A KR19950061812A KR970051901A KR 970051901 A KR970051901 A KR 970051901A KR 1019950061812 A KR1019950061812 A KR 1019950061812A KR 19950061812 A KR19950061812 A KR 19950061812A KR 970051901 A KR970051901 A KR 970051901A
- Authority
- KR
- South Korea
- Prior art keywords
- mask
- substrate
- hard mask
- fixed vacuum
- holder
- Prior art date
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Physical Vapour Deposition (AREA)
Abstract
본 발명은 기판에 박막을 증착 시키기 위해 사용하는 하드 마스크와 기판을 고정시킬 수 있는 마스크 홀더를 사용하여 하드 마스크와 기판을 접합 고정시킨 후 박막제조공정에 의해 박막을 형성함으로써, 두께와 선폭이 일정하고 적은 비용과 짧은 시간내에 박막을 제조할 수 있는 고정하기 위한 대면적 하드 마이크용 마스크 홀더를 제공한다.The present invention uses a hard mask used to deposit a thin film on a substrate and a mask holder capable of fixing the substrate to bond and fix the hard mask and the substrate to form a thin film by a thin film manufacturing process, whereby the thickness and line width are constant. The present invention provides a mask holder for a large-area hard microphone for fixing a thin film to be manufactured at a low cost and in a short time.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3A도는 본 발명에 따른 마스크 홀더를 나타낸 사시도, 제3B도는 제3A도의 평면도, 제3C도는 제3A도의 배면도, 제3D도는 제3C도의 A-A를 절단하여 나타낸 단면도.3A is a perspective view showing a mask holder according to the present invention, FIG. 3B is a plan view of FIG. 3A, FIG. 3C is a rear view of FIG. 3A, and FIG. 3D is a sectional view cut along A-A of FIG.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950061812A KR970051901A (en) | 1995-12-28 | 1995-12-28 | Mask holder for large area hard mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950061812A KR970051901A (en) | 1995-12-28 | 1995-12-28 | Mask holder for large area hard mask |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970051901A true KR970051901A (en) | 1997-07-29 |
Family
ID=66621727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950061812A KR970051901A (en) | 1995-12-28 | 1995-12-28 | Mask holder for large area hard mask |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970051901A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030003086A (en) * | 2001-06-29 | 2003-01-09 | 산요 덴키 가부시키가이샤 | Method of fabricating electro-luminescence display device |
KR100463532B1 (en) * | 2002-10-22 | 2004-12-29 | 엘지전자 주식회사 | fabrication method for display panel using large scale full-color |
KR100485300B1 (en) * | 2001-06-29 | 2005-04-27 | 산요덴키가부시키가이샤 | Method of fabricating electroluminescence display device |
KR100578262B1 (en) * | 2003-11-13 | 2006-05-11 | 주식회사 디엠에스 | Apparatus for fixing mask by vacuum and exposure method of the same |
KR100671658B1 (en) * | 2005-01-05 | 2007-01-19 | 삼성에스디아이 주식회사 | Mask frame and method for fixing a mask on the mask frame |
KR100693161B1 (en) * | 2005-05-02 | 2007-03-13 | 엘지전자 주식회사 | Mask holding apparatus for exposure |
-
1995
- 1995-12-28 KR KR1019950061812A patent/KR970051901A/en active IP Right Grant
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030003086A (en) * | 2001-06-29 | 2003-01-09 | 산요 덴키 가부시키가이샤 | Method of fabricating electro-luminescence display device |
KR100485300B1 (en) * | 2001-06-29 | 2005-04-27 | 산요덴키가부시키가이샤 | Method of fabricating electroluminescence display device |
KR100463532B1 (en) * | 2002-10-22 | 2004-12-29 | 엘지전자 주식회사 | fabrication method for display panel using large scale full-color |
KR100578262B1 (en) * | 2003-11-13 | 2006-05-11 | 주식회사 디엠에스 | Apparatus for fixing mask by vacuum and exposure method of the same |
KR100671658B1 (en) * | 2005-01-05 | 2007-01-19 | 삼성에스디아이 주식회사 | Mask frame and method for fixing a mask on the mask frame |
KR100693161B1 (en) * | 2005-05-02 | 2007-03-13 | 엘지전자 주식회사 | Mask holding apparatus for exposure |
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A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
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