KR970051694A - Indirect vacuum measuring device and measuring method for field emission display device - Google Patents

Indirect vacuum measuring device and measuring method for field emission display device Download PDF

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Publication number
KR970051694A
KR970051694A KR1019950047390A KR19950047390A KR970051694A KR 970051694 A KR970051694 A KR 970051694A KR 1019950047390 A KR1019950047390 A KR 1019950047390A KR 19950047390 A KR19950047390 A KR 19950047390A KR 970051694 A KR970051694 A KR 970051694A
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KR
South Korea
Prior art keywords
vacuum
display device
field emission
emission display
glass tube
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KR1019950047390A
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Korean (ko)
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KR100230066B1 (en
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오재열
문제도
조영래
정효수
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이우복
사단법인 고등기술연구원 연구조합
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Priority to KR1019950047390A priority Critical patent/KR100230066B1/en
Publication of KR970051694A publication Critical patent/KR970051694A/en
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Publication of KR100230066B1 publication Critical patent/KR100230066B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/42—Measurement or testing during manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

본 발명은 하부기판에 홀이 형성되어 있는 전계방출 표시소자를 설치할 수 있고 제2진공 게이지가 설치되어 있는 진공챔버와, 상기 진공챔버 내부의 표시소자의 하부기판에 형성되어 있는 홀에 유리관을 삽입하여 상기 유리관 끝에 설치되는 진공펌프와, 상기 유리관 중간에 설치되는 제1진공 게이지와, 상기 표시소자 하부기판의 표면에 설치되는 산소센서를 포함하는 전계방출 표시소자의 간접진공 측정장치를 이용하여 상기 진공챔버 내부와 패케이징 하려는 전계방출 표시소자 내부의 공기를 방출시키고, 상기 표시소자 내부의 예상 진공도가 진공챔버 내부의 압력과 같은 경우 산소센서를 작동시킨 다음, 상기 산소센서에서 측정되는 일정한 전류치를 측정하고, 상기 패케이징되는 전계방출 표시소자 내부의 진공도를 계산하여 전계방출 표시소자 내부의 진공도를 예측하는 전계방출 소자의 간접 진공 측정방법에 관한 것이다.The present invention provides a vacuum chamber in which a field emission display device having a hole is formed in a lower substrate, and a second vacuum gauge is installed, and a glass tube is inserted into a hole formed in the lower substrate of the display element inside the vacuum chamber. By using an indirect vacuum measuring device of the field emission display device including a vacuum pump installed at the end of the glass tube, a first vacuum gauge installed in the middle of the glass tube, and an oxygen sensor provided on the surface of the lower substrate of the display element; Emission of air inside the field emission display device to be packaged inside the vacuum chamber and the expected vacuum degree inside the display device is operated at the same time as the pressure inside the vacuum chamber. Field emission display device by calculating the degree of vacuum inside the packaged field emission display device An indirect vacuum measurement method of a field emission device for predicting the degree of vacuum inside.

Description

전계방출 표시소자의 간접진공 측정장치 및 측정방법Indirect vacuum measuring device and measuring method for field emission display device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 따른 진공챔버 내부에 설치되어 진공 패케이징되는 전계방출 표시소자의 진공도를 간접적으로 측정하기 위한 것을 나타낸 도면.1 is a view showing for indirectly measuring the degree of vacuum of the field emission display device which is vacuum-packaged and installed inside the vacuum chamber according to the present invention.

제2도는 본 발명에 따른 전계방출 표시소자와 진공펌프를 연결하는 유리관 내부의 압력분포를 나타낸 그래프.2 is a graph showing the pressure distribution inside the glass tube connecting the field emission display device and the vacuum pump according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 전계방출 표시소자 2 : 진공챔버1: field emission display device 2: vacuum chamber

3 : 제1진공 게이지 4 : 제2진공 게이지3: first vacuum gauge 4: second vacuum gauge

5 : 산소센서 6 : 진공펌프5: oxygen sensor 6: vacuum pump

7 : 공기배출용 유리관7: glass tube for air discharge

Claims (3)

하부기판에 홀이 형성되어 있는 전계방출 표시소자를 장착할 수 있고 제2진공 게이지가 설치되어 있는 진공챔버와, 상기 진공챔버 내부의 표시소자와 하부기판에 형성되어 있는 홀에 유리관을 삽입하여 상기 유리관 끝에 설치되는 진공펌프와, 상기 유리관 중간에 설치되는 제1진공 게이지와, 상기 표시소자 하부기판의 표면에 설치되는 산소센서를 포함하는 전계방출 표시소자의 간접진공 측정장치.The glass tube may be inserted into a vacuum chamber in which a field emission display device having a hole is formed in a lower substrate and a second vacuum gauge is installed, and a display element in the vacuum chamber and a hole formed in the lower substrate. And a vacuum pump installed at the end of the glass tube, a first vacuum gauge disposed at the middle of the glass tube, and an oxygen sensor mounted on a surface of the lower substrate of the display element. 진공 패케이징 하려는 부분에 진공 연결용 유리관을 연결시킨 후 진공챔버에 설치하는 단계와, 상기 진공챔버 내부와 패케이징 하려는 전계방출 표시소자 내부의 공기를 방출시키는 단계와, 상기 표시소자 내부의 예상 진공도가 진공챔버 내부의 압력과 같은 경우 산소센서를 작동시키는 단계와, 상기 산소센서에서 측정되는 일정한 전류치를 측정하는 단계와, 상기 패케이징되는 전계방출 표시소자 내부의 진공도를 계산하는 단계를 포함하는 전계방출 표시소자의 간접진공 측정방법.Connecting a glass tube for vacuum connection to a portion to be vacuum packaged and installing the glass tube in a vacuum chamber, and discharging air inside the vacuum chamber and the field emission display device to be packaged; Operating an oxygen sensor when the expected vacuum degree is the same as the pressure in the vacuum chamber, measuring a constant current value measured by the oxygen sensor, and calculating a vacuum degree in the packaged field emission display device. Indirect vacuum measurement method of a field emission display device comprising. 제2항에 있어서, 상기 진공챔버 내부의 진공도를 변화시켜 상기 진공도의 변화에 따른 상기 표시소자 내부의 압력변화를 측정하는 단계를 더 포함하는 것을 특징으로 하는 전계방출 표시소자의 간접진공 측정방법.3. The method of claim 2, further comprising measuring a change in pressure inside the display device according to a change in the degree of vacuum by changing a degree of vacuum inside the vacuum chamber. 4. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950047390A 1995-12-07 1995-12-07 Indirect vacuum measurement apparatus of field emission display device and measurement method thereof KR100230066B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950047390A KR100230066B1 (en) 1995-12-07 1995-12-07 Indirect vacuum measurement apparatus of field emission display device and measurement method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950047390A KR100230066B1 (en) 1995-12-07 1995-12-07 Indirect vacuum measurement apparatus of field emission display device and measurement method thereof

Publications (2)

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KR970051694A true KR970051694A (en) 1997-07-29
KR100230066B1 KR100230066B1 (en) 1999-11-15

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