KR970048980A - Phase reversal mask to remove virtual image - Google Patents
Phase reversal mask to remove virtual image Download PDFInfo
- Publication number
- KR970048980A KR970048980A KR1019950050930A KR19950050930A KR970048980A KR 970048980 A KR970048980 A KR 970048980A KR 1019950050930 A KR1019950050930 A KR 1019950050930A KR 19950050930 A KR19950050930 A KR 19950050930A KR 970048980 A KR970048980 A KR 970048980A
- Authority
- KR
- South Korea
- Prior art keywords
- phase reversal
- virtual image
- pattern
- phase
- reversal mask
- Prior art date
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
본 발명은 위상 반전 물질과 크롬 흡수패턴을 사용하여 허상을 완전히 제거하여 고집적 소자의 미세패턴을 형성할 수 있는 위상 반전 마스크를 제공하는 것으로 투명기판과; 상기 투명기판 상에 형성되는 위상 반전 물질 패턴과; 및 상기 위상 반전 물질 패턴 상에 형성되되 상기 위상 반전 물질의 가장자리에는 위치하지 않는 크롬패턴을 포함하여 이루어지는 것을 특징으로하는 위상 반전 마스크에 관한 것이다.The present invention provides a phase inversion mask that can form a fine pattern of a highly integrated device by completely removing a virtual image using a phase inversion material and a chromium absorption pattern; A phase reversal material pattern formed on the transparent substrate; And a chromium pattern formed on the phase reversal material pattern but not positioned at an edge of the phase reversal material.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제3도는 본 발명에 따른 미세패턴을 형성하기 위한 마스크 단면도 및 웨이퍼 상의 광 세기 분포도.3 is a cross-sectional view of a mask and a light intensity distribution on a wafer for forming a fine pattern according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950050930A KR970048980A (en) | 1995-12-16 | 1995-12-16 | Phase reversal mask to remove virtual image |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950050930A KR970048980A (en) | 1995-12-16 | 1995-12-16 | Phase reversal mask to remove virtual image |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970048980A true KR970048980A (en) | 1997-07-29 |
Family
ID=66595126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950050930A KR970048980A (en) | 1995-12-16 | 1995-12-16 | Phase reversal mask to remove virtual image |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970048980A (en) |
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1995
- 1995-12-16 KR KR1019950050930A patent/KR970048980A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |