KR970046813U - 그린 쉬트의 픽업장치 - Google Patents

그린 쉬트의 픽업장치

Info

Publication number
KR970046813U
KR970046813U KR2019950055222U KR19950055222U KR970046813U KR 970046813 U KR970046813 U KR 970046813U KR 2019950055222 U KR2019950055222 U KR 2019950055222U KR 19950055222 U KR19950055222 U KR 19950055222U KR 970046813 U KR970046813 U KR 970046813U
Authority
KR
South Korea
Prior art keywords
pickup device
green sheet
sheet pickup
green
sheet
Prior art date
Application number
KR2019950055222U
Other languages
English (en)
Other versions
KR200149425Y1 (ko
Inventor
강남기
조형진
윤종광
구기덕
Original Assignee
전자부품연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 전자부품연구원 filed Critical 전자부품연구원
Priority to KR2019950055222U priority Critical patent/KR200149425Y1/ko
Publication of KR970046813U publication Critical patent/KR970046813U/ko
Application granted granted Critical
Publication of KR200149425Y1 publication Critical patent/KR200149425Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
KR2019950055222U 1995-12-30 1995-12-30 그린 쉬트의 픽업장치 KR200149425Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950055222U KR200149425Y1 (ko) 1995-12-30 1995-12-30 그린 쉬트의 픽업장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950055222U KR200149425Y1 (ko) 1995-12-30 1995-12-30 그린 쉬트의 픽업장치

Publications (2)

Publication Number Publication Date
KR970046813U true KR970046813U (ko) 1997-07-31
KR200149425Y1 KR200149425Y1 (ko) 1999-06-15

Family

ID=19443644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950055222U KR200149425Y1 (ko) 1995-12-30 1995-12-30 그린 쉬트의 픽업장치

Country Status (1)

Country Link
KR (1) KR200149425Y1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050041235A (ko) * 2003-10-30 2005-05-04 삼성전기주식회사 세라믹 그린시트 적층장치
KR100834837B1 (ko) * 2006-12-29 2008-06-03 삼성전자주식회사 반도체 다이 픽업 장치와 이를 이용한 반도체 다이 픽업방법
KR101868229B1 (ko) * 2016-11-23 2018-07-17 광주과학기술원 자기유도 기반의 마이크로 소자 이송 헤드

Also Published As

Publication number Publication date
KR200149425Y1 (ko) 1999-06-15

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
N231 Notification of change of applicant
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee