KR970046636U - 스퍼터링시스템의 기능제어장치 - Google Patents

스퍼터링시스템의 기능제어장치

Info

Publication number
KR970046636U
KR970046636U KR2019950048843U KR19950048843U KR970046636U KR 970046636 U KR970046636 U KR 970046636U KR 2019950048843 U KR2019950048843 U KR 2019950048843U KR 19950048843 U KR19950048843 U KR 19950048843U KR 970046636 U KR970046636 U KR 970046636U
Authority
KR
South Korea
Prior art keywords
control device
function control
sputtering system
sputtering
function
Prior art date
Application number
KR2019950048843U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950048843U priority Critical patent/KR970046636U/ko
Publication of KR970046636U publication Critical patent/KR970046636U/ko

Links

KR2019950048843U 1995-12-27 1995-12-27 스퍼터링시스템의 기능제어장치 KR970046636U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950048843U KR970046636U (ko) 1995-12-27 1995-12-27 스퍼터링시스템의 기능제어장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950048843U KR970046636U (ko) 1995-12-27 1995-12-27 스퍼터링시스템의 기능제어장치

Publications (1)

Publication Number Publication Date
KR970046636U true KR970046636U (ko) 1997-07-31

Family

ID=60874695

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950048843U KR970046636U (ko) 1995-12-27 1995-12-27 스퍼터링시스템의 기능제어장치

Country Status (1)

Country Link
KR (1) KR970046636U (ko)

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