KR970046622U - 에이치 엠 디 에스 도포기의 액체공급방지장치 - Google Patents
에이치 엠 디 에스 도포기의 액체공급방지장치Info
- Publication number
- KR970046622U KR970046622U KR2019950040265U KR19950040265U KR970046622U KR 970046622 U KR970046622 U KR 970046622U KR 2019950040265 U KR2019950040265 U KR 2019950040265U KR 19950040265 U KR19950040265 U KR 19950040265U KR 970046622 U KR970046622 U KR 970046622U
- Authority
- KR
- South Korea
- Prior art keywords
- applicator
- liquid supply
- prevention device
- supply prevention
- liquid
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title 1
- 230000002265 prevention Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950040265U KR200148619Y1 (ko) | 1995-12-12 | 1995-12-12 | 에이치 엠 디 에스 도포기의 액체공급방지장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950040265U KR200148619Y1 (ko) | 1995-12-12 | 1995-12-12 | 에이치 엠 디 에스 도포기의 액체공급방지장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046622U true KR970046622U (ko) | 1997-07-31 |
KR200148619Y1 KR200148619Y1 (ko) | 1999-06-15 |
Family
ID=19433381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950040265U KR200148619Y1 (ko) | 1995-12-12 | 1995-12-12 | 에이치 엠 디 에스 도포기의 액체공급방지장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200148619Y1 (ko) |
-
1995
- 1995-12-12 KR KR2019950040265U patent/KR200148619Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200148619Y1 (ko) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20090223 Year of fee payment: 11 |
|
LAPS | Lapse due to unpaid annual fee |