KR970030577A - Self normal operation sensor - Google Patents
Self normal operation sensor Download PDFInfo
- Publication number
- KR970030577A KR970030577A KR1019950043660A KR19950043660A KR970030577A KR 970030577 A KR970030577 A KR 970030577A KR 1019950043660 A KR1019950043660 A KR 1019950043660A KR 19950043660 A KR19950043660 A KR 19950043660A KR 970030577 A KR970030577 A KR 970030577A
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- South Korea
- Prior art keywords
- sensor
- unit
- sensing
- light
- self
- Prior art date
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- Testing Electric Properties And Detecting Electric Faults (AREA)
Abstract
본 발명은 전원의 인가가 정상적으로 수행되는가 또는 센싱동작이 정확히 수행되는가를 시각적으로 확인할 수 있는 자체 동작 정상여부 감지 센서에 관한 것이다. 본 발명에 따른 자체 동작 정상여부 감지 센서는, 반도체장치 제조 설비에 설치되어서 발광부와 수광부로 구성된 센서에서, 상기 발광부에 병렬 연결되어서 동작전압이 정상적으로 인가되면 발광하는 제1센싱부; 상기 수광부에 직렬 연결되어서 정상적인 센싱신호 출력에 따라 발광하는 제2센싱부를 포함하여 구성됨을 특징으로 한다. 본 발명에 의하면, 센서의 고장 유무가 빨리 파악될 수 있으며, 센서의 고장으로 인하여 설비가 동작중지되는 시간을 극소화시킬 수 있으므로, 가동시간을 늘일 수 있고, 그에 따라서 생산성이 향상될 수 있는 효과가 있다.The present invention relates to a self-operating normal detection sensor capable of visually confirming whether the power is normally applied or whether the sensing operation is performed correctly. Self-operation normal detection sensor according to the present invention, the sensor is provided in the semiconductor device manufacturing facility consisting of a light emitting unit and a light receiving unit, the first sensing unit which is connected in parallel to the light emitting unit and emits light when the operating voltage is normally applied; And a second sensing unit which is connected in series with the light receiving unit and emits light according to a normal sensing signal output. According to the present invention, the presence or absence of a failure of the sensor can be quickly identified, and the time required to stop the operation due to the failure of the sensor can be minimized, so that the uptime can be increased, and thus the productivity can be improved. have.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 따른 자체 정상 동작여부 감지 센서의 실시예를 나타내는 외형도이다.2 is an external view showing an embodiment of a sensor for detecting its normal operation according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950043660A KR970030577A (en) | 1995-11-24 | 1995-11-24 | Self normal operation sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950043660A KR970030577A (en) | 1995-11-24 | 1995-11-24 | Self normal operation sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970030577A true KR970030577A (en) | 1997-06-26 |
Family
ID=66588822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950043660A KR970030577A (en) | 1995-11-24 | 1995-11-24 | Self normal operation sensor |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970030577A (en) |
-
1995
- 1995-11-24 KR KR1019950043660A patent/KR970030577A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |