KR970030262A - Process tube fixing device of semiconductor device manufacturing facility - Google Patents

Process tube fixing device of semiconductor device manufacturing facility Download PDF

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Publication number
KR970030262A
KR970030262A KR1019950043772A KR19950043772A KR970030262A KR 970030262 A KR970030262 A KR 970030262A KR 1019950043772 A KR1019950043772 A KR 1019950043772A KR 19950043772 A KR19950043772 A KR 19950043772A KR 970030262 A KR970030262 A KR 970030262A
Authority
KR
South Korea
Prior art keywords
nut
fixing
process tube
fixing plate
tube
Prior art date
Application number
KR1019950043772A
Other languages
Korean (ko)
Inventor
조규철
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950043772A priority Critical patent/KR970030262A/en
Publication of KR970030262A publication Critical patent/KR970030262A/en

Links

Abstract

본 발명은 공정튜브에 삽입된 엘리펀트튜브를 감싸도록 된 고정밴드와, 상기 고정밴드의 일단에 설치되어 설비본체의 고정판에 관통되어지는 나사봉과, 상기 고정판에 관통되어진 나사봉에 체결되어 고정밴드를 조일수 있도록 된 너트로 이루어진 반도체 소자 제조설비의 공정튜브 고정장치에 관한 것으로, 상기 너트의 풀림이 방지되도록 설비본체의 고정판과 너트 사이에 스프링와셔가 개재된 구성이다. 따라서, 엘펀트튜브의 고정상태가 견고하게 유지되어 자동도어의 개폐시 뒤로 밀리는 일이 없으며, 이로써 자동도어와 엘리펌트튜브와의 기밀이 항상 유지되는 효과가 있다.The present invention is a fixed band to surround the elephant tube inserted into the process tube, a screw rod is installed on one end of the fixing band and penetrated to the fixing plate of the installation body, and the fixing band is fastened to the screw rod penetrated through the fixing plate It relates to a process tube fixing device of a semiconductor device manufacturing equipment consisting of a nut that can be tightened, it is a configuration in which a spring washer is interposed between the fixing plate and the nut of the equipment body to prevent loosening of the nut. Therefore, the fixed state of the elephant tube is firmly maintained so that the door is not pushed back when opening and closing the automatic door, thereby maintaining the airtightness between the automatic door and the element tube at all times.

Description

반도체 소자 제조설비의 공정튜브 고정장치Process tube fixing device of semiconductor device manufacturing facility

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명에 따른 공정튜브 고정장치를 나타낸 요부 정면도이다.Figure 3 is a front view of the main part showing a process tube fixing device according to the present invention.

Claims (1)

공정튜브에 삽입된 엘리펀트튜브를 감싸도록 된 고정밴드와, 상기 고정밴드의 일단에 설치되어 설비본체의 고정판에 관통되어지는 나사봉과, 상기 고정판에 관통되어진 나사봉에 체결되어 고정밴드를 조일수 있도록 된 너트로 이루어진 반도체 소자 제조설비의 공정튜브 고정장치에 있어서, 상기 너트의 풀림이 방지되도록 설비본체의 고정판과 너트 사이에 스프링와셔가 개재됨을 특징으로 하는 반도체 소자 제조설비의 공정튜브 고장 장치.The fixing band to surround the elephant tube inserted into the process tube, the screw rod is installed on one end of the fixing band and penetrates the fixing plate of the equipment main body, and is fastened to the screw rod penetrating the fixing plate to tighten the fixing band. A process tube fixing device for a semiconductor device manufacturing facility comprising a nut, wherein the spring washer is interposed between the fixing plate and the nut of the facility main body to prevent loosening of the nut.
KR1019950043772A 1995-11-25 1995-11-25 Process tube fixing device of semiconductor device manufacturing facility KR970030262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950043772A KR970030262A (en) 1995-11-25 1995-11-25 Process tube fixing device of semiconductor device manufacturing facility

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950043772A KR970030262A (en) 1995-11-25 1995-11-25 Process tube fixing device of semiconductor device manufacturing facility

Publications (1)

Publication Number Publication Date
KR970030262A true KR970030262A (en) 1997-06-26

Family

ID=66588831

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950043772A KR970030262A (en) 1995-11-25 1995-11-25 Process tube fixing device of semiconductor device manufacturing facility

Country Status (1)

Country Link
KR (1) KR970030262A (en)

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