KR970030262A - Process tube fixing device of semiconductor device manufacturing facility - Google Patents
Process tube fixing device of semiconductor device manufacturing facility Download PDFInfo
- Publication number
- KR970030262A KR970030262A KR1019950043772A KR19950043772A KR970030262A KR 970030262 A KR970030262 A KR 970030262A KR 1019950043772 A KR1019950043772 A KR 1019950043772A KR 19950043772 A KR19950043772 A KR 19950043772A KR 970030262 A KR970030262 A KR 970030262A
- Authority
- KR
- South Korea
- Prior art keywords
- nut
- fixing
- process tube
- fixing plate
- tube
- Prior art date
Links
Abstract
본 발명은 공정튜브에 삽입된 엘리펀트튜브를 감싸도록 된 고정밴드와, 상기 고정밴드의 일단에 설치되어 설비본체의 고정판에 관통되어지는 나사봉과, 상기 고정판에 관통되어진 나사봉에 체결되어 고정밴드를 조일수 있도록 된 너트로 이루어진 반도체 소자 제조설비의 공정튜브 고정장치에 관한 것으로, 상기 너트의 풀림이 방지되도록 설비본체의 고정판과 너트 사이에 스프링와셔가 개재된 구성이다. 따라서, 엘펀트튜브의 고정상태가 견고하게 유지되어 자동도어의 개폐시 뒤로 밀리는 일이 없으며, 이로써 자동도어와 엘리펌트튜브와의 기밀이 항상 유지되는 효과가 있다.The present invention is a fixed band to surround the elephant tube inserted into the process tube, a screw rod is installed on one end of the fixing band and penetrated to the fixing plate of the installation body, and the fixing band is fastened to the screw rod penetrated through the fixing plate It relates to a process tube fixing device of a semiconductor device manufacturing equipment consisting of a nut that can be tightened, it is a configuration in which a spring washer is interposed between the fixing plate and the nut of the equipment body to prevent loosening of the nut. Therefore, the fixed state of the elephant tube is firmly maintained so that the door is not pushed back when opening and closing the automatic door, thereby maintaining the airtightness between the automatic door and the element tube at all times.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3도는 본 발명에 따른 공정튜브 고정장치를 나타낸 요부 정면도이다.Figure 3 is a front view of the main part showing a process tube fixing device according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950043772A KR970030262A (en) | 1995-11-25 | 1995-11-25 | Process tube fixing device of semiconductor device manufacturing facility |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950043772A KR970030262A (en) | 1995-11-25 | 1995-11-25 | Process tube fixing device of semiconductor device manufacturing facility |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970030262A true KR970030262A (en) | 1997-06-26 |
Family
ID=66588831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950043772A KR970030262A (en) | 1995-11-25 | 1995-11-25 | Process tube fixing device of semiconductor device manufacturing facility |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970030262A (en) |
-
1995
- 1995-11-25 KR KR1019950043772A patent/KR970030262A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |