KR970030219A - Gas supply device for semiconductor device manufacturing facilities - Google Patents
Gas supply device for semiconductor device manufacturing facilities Download PDFInfo
- Publication number
- KR970030219A KR970030219A KR1019950043771A KR19950043771A KR970030219A KR 970030219 A KR970030219 A KR 970030219A KR 1019950043771 A KR1019950043771 A KR 1019950043771A KR 19950043771 A KR19950043771 A KR 19950043771A KR 970030219 A KR970030219 A KR 970030219A
- Authority
- KR
- South Korea
- Prior art keywords
- gas supply
- semiconductor device
- supply line
- device manufacturing
- manufacturing facilities
- Prior art date
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- Pipeline Systems (AREA)
Abstract
본 발명은 공정에 필요한 적어도 두 가지의 가스를 공정 챔버로 공급하기 위한 적어도 두 개의 가스 공급라인을 구비하는 반도체 소자 제조설비의 가스 공급장치에 관한 것으로, 상기 하나의 가스 공급라인을 다른 하나의 가스 공급라인에 연결하여 구성된 것이다. 따라서 가스 공급라인으로 흐르는 N2의 공급량이 증가하여 흡착된 파우더를 완전 제거할 수 있는 것이고, 이로써 파티클이 공정 챔버내로 유입되는 것이 방지되며, 가스 공급라인이 하나로 감소되어 관리측면에서 유리한 효과가 있다.The present invention relates to a gas supply apparatus of a semiconductor device manufacturing apparatus having at least two gas supply lines for supplying at least two gases required for a process to a process chamber. It is configured by connecting to a supply line. Therefore, the amount of N2 flowing into the gas supply line is increased to completely remove the adsorbed powder, thereby preventing particles from entering the process chamber and reducing the gas supply line to one, which is advantageous in terms of management.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 따른 가스 공급장치를 개략적으로 나타낸 구조도이다.2 is a structural diagram schematically showing a gas supply device according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950043771A KR970030219A (en) | 1995-11-25 | 1995-11-25 | Gas supply device for semiconductor device manufacturing facilities |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950043771A KR970030219A (en) | 1995-11-25 | 1995-11-25 | Gas supply device for semiconductor device manufacturing facilities |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970030219A true KR970030219A (en) | 1997-06-26 |
Family
ID=66588207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950043771A KR970030219A (en) | 1995-11-25 | 1995-11-25 | Gas supply device for semiconductor device manufacturing facilities |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970030219A (en) |
-
1995
- 1995-11-25 KR KR1019950043771A patent/KR970030219A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |