KR970030219A - Gas supply device for semiconductor device manufacturing facilities - Google Patents

Gas supply device for semiconductor device manufacturing facilities Download PDF

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Publication number
KR970030219A
KR970030219A KR1019950043771A KR19950043771A KR970030219A KR 970030219 A KR970030219 A KR 970030219A KR 1019950043771 A KR1019950043771 A KR 1019950043771A KR 19950043771 A KR19950043771 A KR 19950043771A KR 970030219 A KR970030219 A KR 970030219A
Authority
KR
South Korea
Prior art keywords
gas supply
semiconductor device
supply line
device manufacturing
manufacturing facilities
Prior art date
Application number
KR1019950043771A
Other languages
Korean (ko)
Inventor
박창순
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950043771A priority Critical patent/KR970030219A/en
Publication of KR970030219A publication Critical patent/KR970030219A/en

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Abstract

본 발명은 공정에 필요한 적어도 두 가지의 가스를 공정 챔버로 공급하기 위한 적어도 두 개의 가스 공급라인을 구비하는 반도체 소자 제조설비의 가스 공급장치에 관한 것으로, 상기 하나의 가스 공급라인을 다른 하나의 가스 공급라인에 연결하여 구성된 것이다. 따라서 가스 공급라인으로 흐르는 N2의 공급량이 증가하여 흡착된 파우더를 완전 제거할 수 있는 것이고, 이로써 파티클이 공정 챔버내로 유입되는 것이 방지되며, 가스 공급라인이 하나로 감소되어 관리측면에서 유리한 효과가 있다.The present invention relates to a gas supply apparatus of a semiconductor device manufacturing apparatus having at least two gas supply lines for supplying at least two gases required for a process to a process chamber. It is configured by connecting to a supply line. Therefore, the amount of N2 flowing into the gas supply line is increased to completely remove the adsorbed powder, thereby preventing particles from entering the process chamber and reducing the gas supply line to one, which is advantageous in terms of management.

Description

반도체 소자 제조설비의 가스 공급장치Gas supply device for semiconductor device manufacturing facilities

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 따른 가스 공급장치를 개략적으로 나타낸 구조도이다.2 is a structural diagram schematically showing a gas supply device according to the present invention.

Claims (2)

공정에 필요한 적어도 두 가지의 가스를 공정 챔버로 공급하기 위한 적어도 두 개의 가스 공급라인을 구비하는 반도체 소자 제조설비의 가스 공급장치에 있어서, 상기 하나의 가스 공급라인을 다른 하나의 가스 공급 라인에 연결하여 구성됨을 특징으로 하는 반도체 소자 제조설비의 가스 공급장치.A gas supply apparatus of a semiconductor device manufacturing apparatus having at least two gas supply lines for supplying at least two gases required for a process to a process chamber, wherein the one gas supply line is connected to the other gas supply line. Gas supply device for semiconductor device manufacturing equipment, characterized in that configured by. 제1항에 있어서, 상기 두 개의 가스 공급라인이 필터와 주름호스가 연결되어 이루어지고, 하나의 가스 공급라인의 필터가 다른 하나의 가스 공급라인의 필터와 주름호스 사이에 연결됨을 특징으로 하는 반도체 소자 제조설비의 가스 공급장치.The semiconductor of claim 1, wherein the two gas supply lines are formed by connecting a filter and a pleat hose, and the filter of one gas supply line is connected between the filter and the pleat hose of the other gas supply line. Gas supply of device manufacturing equipment.
KR1019950043771A 1995-11-25 1995-11-25 Gas supply device for semiconductor device manufacturing facilities KR970030219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950043771A KR970030219A (en) 1995-11-25 1995-11-25 Gas supply device for semiconductor device manufacturing facilities

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950043771A KR970030219A (en) 1995-11-25 1995-11-25 Gas supply device for semiconductor device manufacturing facilities

Publications (1)

Publication Number Publication Date
KR970030219A true KR970030219A (en) 1997-06-26

Family

ID=66588207

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950043771A KR970030219A (en) 1995-11-25 1995-11-25 Gas supply device for semiconductor device manufacturing facilities

Country Status (1)

Country Link
KR (1) KR970030219A (en)

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