KR970028703A - Color filter of liquid crystal display device and manufacturing method thereof - Google Patents

Color filter of liquid crystal display device and manufacturing method thereof Download PDF

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Publication number
KR970028703A
KR970028703A KR1019950041648A KR19950041648A KR970028703A KR 970028703 A KR970028703 A KR 970028703A KR 1019950041648 A KR1019950041648 A KR 1019950041648A KR 19950041648 A KR19950041648 A KR 19950041648A KR 970028703 A KR970028703 A KR 970028703A
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South Korea
Prior art keywords
pattern
color
black matrix
color filter
rgb
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KR1019950041648A
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Korean (ko)
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KR0161453B1 (en
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노수귀
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김광호
삼성전자 주식회사
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Priority to KR1019950041648A priority Critical patent/KR0161453B1/en
Publication of KR970028703A publication Critical patent/KR970028703A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices

Abstract

본 발명은 유기 블랙 매트릭스를 사용하여 액정표시장치의 칼라필터 패널의 칼라 패턴을 형성하는 방법에 관한 것으로, 칼라필터 상에 형성되는 유기 블랙 매트릭스의 구조와 RGB패턴을 기존의 스트립구조에서 돗트형 패턴으로 형성시켜 중첩부위를 최소로 줄여 칼라필터 상의 유기 블랙 매트릭스 패턴이 RGB 픽셀패턴에 미스-얼라인되는 것을 방지하고, 칼라필터 상에 유기 블랙 매트릭스 패턴을 형성시킴으로서 종래의 방법에 비해 RGB 포토레지스트의 소모량을 크게 줄일 수 있으며, RGB 픽셀과 유기 블랙 매트릭스 패턴 간의 단차가 미소하여 평탄화 및 보호막 효과를 얻기 위해 사용하는 오버코팅막의 제조공정을 스킵하는 것이 가능하고, RGB 패턴 위에 바로 ITO막의 증착이 가능하므로 ITO막에 핀홀이 발생하지 않는 특징이 있다.The present invention relates to a method for forming a color pattern of a color filter panel of a liquid crystal display using an organic black matrix. The dot pattern of an organic black matrix formed on a color filter and an RGB pattern in a conventional strip structure By forming the organic photoresist matrix on the color filter, the organic black matrix pattern on the color filter is prevented from being misaligned to the RGB pixel pattern, and the organic black matrix pattern is formed on the color filter. Consumption can be greatly reduced, and the step between the RGB pixel and the organic black matrix pattern is minute, so that it is possible to skip the manufacturing process of the overcoating film used to obtain the flattening and protective film effect, and the ITO film can be deposited directly on the RGB pattern. It is characterized in that no pinholes occur in the ITO film.

Description

액정표시장치의 칼라필터 및 그 제조방법Color filter of liquid crystal display device and manufacturing method thereof

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제4a도 내지 제4d도는 RGB 단일마스크를 이용한 칼라 필터 패턴의 형성과정을 얼라인-키 패턴을 이용하여 설명하는 도면이다.4A to 4D illustrate a process of forming a color filter pattern using an RGB single mask using an align-key pattern.

Claims (8)

기판과, 레드 칼라 패턴, 그린 칼라 패턴, 블루 칼라 패턴, 유기 블랙매트릭스 패턴 및 ITO막을 구비하여 이루어진 액정표시패널의 칼라필터에 있어서, 상기 칼라필터 상에 형성되는 유기 블랙 매트릭스 패턴의 구조와 RGB 패턴이 픽셀형상의 돗트구조인 것을 특징으로 하는 액정표시장치의 칼라필터.A color filter of a liquid crystal display panel comprising a substrate, a red color pattern, a green color pattern, a blue color pattern, an organic black matrix pattern, and an ITO film, the structure of an organic black matrix pattern and an RGB pattern formed on the color filter The color filter of the liquid crystal display device which has this pixel-like dot structure. 제1항에 있어서, 상기 유기 블랙 매트릭스와 RGB패턴이 중첩되지 않는 것을 특징으로 하는 액정표시장치의 칼라필터.The color filter of claim 1, wherein the organic black matrix and the RGB pattern do not overlap each other. 더미 글라스에 레드 칼라 레지스트를 코팅하는 단계, 레드 칼라 코팅된 더미 글라스에 RGB 마스크를 이용한 포토리소그래피 기술을 통해 레드 칼라 패턴을 형성하는 단계, 상기 레드 칼라 패턴이 형성된 더미 그라스 상에 그린 칼라 레지스트를 코팅하고 RGB 마스크를 이용한 포토리소그래피 기술을 통해 그린 칼라 패턴을 형성하는 단계, 상기 그린 칼라 패턴이 형성된 더미 그라스 상에 블루 칼라 레지스트를 코팅하고 RGB 마스크를 이용한 포토리소그래피 기술을 통해 블루 칼라 패턴을 형성하는 단계, 상기 RGB 패턴 상에 유기 포토레지스트를 코팅하는 단계, 상기 RGB 패턴 형성시 형성된 유기 블랙 매트릭스 키를 이용하여 포토리소그래피 기술을 통해 유기 블랙매트릭스 패턴을 형성하는 단계, 상기 유기 블랙 매트릭스 상부 전면에 ITO막을 증착하는 단계를 구비하여 이루어진 것을 특징으로 하는 액정표시장치의 칼라필터 제조방법.Coating a red color resist on the dummy glass, forming a red color pattern through a photolithography technique using an RGB mask on the red color coated dummy glass, and coating the green color resist on the dummy glass on which the red color pattern is formed. And forming a green color pattern through a photolithography technique using an RGB mask, coating a blue color resist on the dummy glass on which the green color pattern is formed, and forming a blue color pattern through a photolithography technique using an RGB mask. Coating an organic photoresist on the RGB pattern, forming an organic black matrix pattern through photolithography using an organic black matrix key formed when the RGB pattern is formed, and forming an ITO film on the entire upper surface of the organic black matrix. Deposition Color filter manufacturing method of the liquid crystal display device characterized in that it comprises a. 제3항에 있어서, 상기 RGB패턴의 형상은 픽셀모양의 돗트형 패턴으로 형성시켜 중첩부위를 최소로 하는 것을 특징으로 하는 액정표시장치의 칼라필터 제조방법.4. The color filter manufacturing method of claim 3, wherein the RGB pattern is formed in a dot pattern having a pixel shape to minimize overlapping portions. 제3항에 있어서, 상기 RGB 패턴과 유기 블랙 매트릭스 패턴 간의 평탄화 보호막의 제조공정을 생략할 수 있는 것을 특징으로 하는 액정표시장치의 칼라필터 제조방법.The method of manufacturing a color filter of a liquid crystal display device according to claim 3, wherein the manufacturing process of the planarization protective film between the RGB pattern and the organic black matrix pattern can be omitted. 제3항에 있어서, 상기 레드 칼라 레지스트로 이루어진 얼라인-키와 포토리소그래피 기술을 이용하여 그린 칼라 패턴이 형성될 때, 블루 칼라 얼라인-키위치에 그린 칼라 레지스트로 이루어진 얼라인-키가 동시에 형성되는 것을 특징으로 하는 액정표시장치의 칼라필터 제조방법.4. The alignment key according to claim 3, wherein when the green color pattern is formed using the alignment-key made of the red color resist and the photolithography technique, the alignment-key made of the green color resist is placed at the blue color alignment-key position at the same time. The color filter manufacturing method of the liquid crystal display device characterized in that it is formed. 제3항에 있어서, 상기 그린 칼라 레지스트로 이루어진 얼라인 -키와 포토리소그래피 기술을 이용화여 블루 칼라 패턴이 형성될 때, 유기 블랙 매트릭스 패턴 얼라인-키 위치에 블루 칼라 레지스트로 이루어진 얼라인-키가 동시에 형성되는 것을 특징으로 하는 액정표시장치의 칼라필터 제조방법.4. The align-key according to claim 3, wherein when the blue-color pattern is formed by using the align-key made of the green color resist and the photolithography technique, the align-key made of the blue color resist at the organic black matrix pattern align-key position. The color filter manufacturing method of the liquid crystal display device characterized in that formed at the same time. 제3항에 있어서, 상기 유기 블랙 매트릭스 패턴은 안료와 카본을 혼합한 물질로 형성되는 것을 특징으로 하는 액정표시장치의 칼라필터 제조방법.The method of claim 3, wherein the organic black matrix pattern is formed of a material in which a pigment and carbon are mixed. ※참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is to be disclosed based on the initial application.
KR1019950041648A 1995-11-16 1995-11-16 Color filter and its manufacturing method of liquid crystal display device KR0161453B1 (en)

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KR0161453B1 KR0161453B1 (en) 1999-01-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100817125B1 (en) * 2001-10-19 2008-03-27 엘지.필립스 엘시디 주식회사 A color filter substrate of a liquid crystal display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100817125B1 (en) * 2001-10-19 2008-03-27 엘지.필립스 엘시디 주식회사 A color filter substrate of a liquid crystal display device

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