KR970024425U - 자동개방밸브 - Google Patents

자동개방밸브

Info

Publication number
KR970024425U
KR970024425U KR2019950033270U KR19950033270U KR970024425U KR 970024425 U KR970024425 U KR 970024425U KR 2019950033270 U KR2019950033270 U KR 2019950033270U KR 19950033270 U KR19950033270 U KR 19950033270U KR 970024425 U KR970024425 U KR 970024425U
Authority
KR
South Korea
Prior art keywords
release valve
automatic release
automatic
valve
release
Prior art date
Application number
KR2019950033270U
Other languages
English (en)
Inventor
성락중
Original Assignee
성락중
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 성락중 filed Critical 성락중
Priority to KR2019950033270U priority Critical patent/KR970024425U/ko
Publication of KR970024425U publication Critical patent/KR970024425U/ko

Links

KR2019950033270U 1995-11-13 1995-11-13 자동개방밸브 KR970024425U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950033270U KR970024425U (ko) 1995-11-13 1995-11-13 자동개방밸브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950033270U KR970024425U (ko) 1995-11-13 1995-11-13 자동개방밸브

Publications (1)

Publication Number Publication Date
KR970024425U true KR970024425U (ko) 1997-06-20

Family

ID=60906276

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950033270U KR970024425U (ko) 1995-11-13 1995-11-13 자동개방밸브

Country Status (1)

Country Link
KR (1) KR970024425U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100947482B1 (ko) * 2007-10-12 2010-03-17 세메스 주식회사 처리액 감지기를 갖는 밸브, 이를 이용한 기판 처리 장치및 기판 처리 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100947482B1 (ko) * 2007-10-12 2010-03-17 세메스 주식회사 처리액 감지기를 갖는 밸브, 이를 이용한 기판 처리 장치및 기판 처리 방법

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
NORF Unpaid initial registration fee