KR970023974A - 기판반송장치 - Google Patents

기판반송장치 Download PDF

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Publication number
KR970023974A
KR970023974A KR1019960049970A KR19960049970A KR970023974A KR 970023974 A KR970023974 A KR 970023974A KR 1019960049970 A KR1019960049970 A KR 1019960049970A KR 19960049970 A KR19960049970 A KR 19960049970A KR 970023974 A KR970023974 A KR 970023974A
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KR
South Korea
Prior art keywords
substrate
board
width
conveying
rollers
Prior art date
Application number
KR1019960049970A
Other languages
English (en)
Other versions
KR100225771B1 (ko
Inventor
켄지 후지이
카츠미 시마지
미츠오 오가사와라
요시히코 마츠시타
Original Assignee
이시다 아키라
다이니폰 스크린세이조우 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 이시다 아키라, 다이니폰 스크린세이조우 가부시키가이샤 filed Critical 이시다 아키라
Publication of KR970023974A publication Critical patent/KR970023974A/ko
Application granted granted Critical
Publication of KR100225771B1 publication Critical patent/KR100225771B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

본 발명은 기판반송장치에 있어서의 반송롤러부의 구조를 간소화하고, 파티클의 발생을 억제하여 기판표면의 오염을 방지하는 것을 목적으로 하는 것으로서, 반송방향으로 병렬배설된 복수의 롤러(12 내지 21)를 가지는 반송롤러부(2)와, 반송롤러부(2)에 대해서 움직이고 롤러(12 내지 21) 사이에서 기판(B)의 수수를 행하는 기판수수부(3)로 구성되어 있다. 기판수수부(3)는 아암(41)의 선단측에 적어도 재치하는 기판(B)의 폭이하의 폭크기와 소정의 두께를 가지는 평판형상의 기판재치대(41a)를 구비하고 있다. 반송롤러부(2)는 제1 반경크기를 가지는 회전축(6 내지 10)을 가지고 있고, 롤러(12 내지 21)는 회전축(6 내지 10)의 양측에 기판재치대(41a)의 폭크기만큼 사이를 두고 부착되어, 회전축의 반경크기에 비해서 기판재치대(41a)의 두께를 더한 반경크기를 가지고 있다.

Description

기판반송장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도2는 도1에 도시한 기판반송장치의 평면도이다.

Claims (2)

  1. 반송방향으로 병렬배설된 복수의 롤러를 가지는 반송롤러부와, 이 반송롤러부에 대해서 움직이고, 상기 롤러와의 사이에서 기판의 수수를 행하는 기판수수부를 가지는 기판반송장치에 있어서, 상기 기판수수부는 적어도 재치하는 기판의 폭 이하의 폭 크기와 소정의 두께를 가지는 평판형상의 기판재치대를 구비하고, 상기 반송롤러부는 제1반경크기를 가지는 회전축을 가지고, 또한 롤러는 상기 회전축의 양측에 적어도 상기 기판재치대의 폭크기만큼 사이를 두고 부착됨과 동시에, 상기 제1 반경크기에 비해서 적어도 상기 소정의 두께를 더한 제2 반경크기를 가지는 것을 특징으로 하는 기판반송장치.
  2. 제1항에 기재된 기판반송장치로서, 상기 기판수수부는 기판재치대에 재치된 기판을 진공흡착하는 흡착수단을 가지는 것을 특징으로 하는 기판반송장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960049970A 1995-10-31 1996-10-30 기판반송장치 KR100225771B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7282908A JPH09124147A (ja) 1995-10-31 1995-10-31 基板搬送装置
JP95-282908 1995-10-31

Publications (2)

Publication Number Publication Date
KR970023974A true KR970023974A (ko) 1997-05-30
KR100225771B1 KR100225771B1 (ko) 1999-10-15

Family

ID=17658675

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960049970A KR100225771B1 (ko) 1995-10-31 1996-10-30 기판반송장치

Country Status (2)

Country Link
JP (1) JPH09124147A (ko)
KR (1) KR100225771B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100493766B1 (ko) * 1998-04-30 2005-08-01 삼성전자주식회사 액정표시장치 제조용 식각설비의 기판 이송 툴 및 이의 기판이송방법
KR100822328B1 (ko) * 2000-12-08 2008-04-16 후지필름 가부시키가이샤 기판반송장치 및 방법

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100822280B1 (ko) * 2007-02-13 2008-04-16 주식회사 에스에프에이 기판 투입 시스템
JP2009001358A (ja) * 2007-06-20 2009-01-08 Shinko Electric Co Ltd 搬送システム
KR101553624B1 (ko) 2013-12-17 2015-09-16 주식회사 에스에프에이 이송장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100493766B1 (ko) * 1998-04-30 2005-08-01 삼성전자주식회사 액정표시장치 제조용 식각설비의 기판 이송 툴 및 이의 기판이송방법
KR100822328B1 (ko) * 2000-12-08 2008-04-16 후지필름 가부시키가이샤 기판반송장치 및 방법

Also Published As

Publication number Publication date
JPH09124147A (ja) 1997-05-13
KR100225771B1 (ko) 1999-10-15

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