KR970023947A - Chemical and Gas Leak Detectors in Semiconductor Manufacturing Systems - Google Patents
Chemical and Gas Leak Detectors in Semiconductor Manufacturing Systems Download PDFInfo
- Publication number
- KR970023947A KR970023947A KR1019950037816A KR19950037816A KR970023947A KR 970023947 A KR970023947 A KR 970023947A KR 1019950037816 A KR1019950037816 A KR 1019950037816A KR 19950037816 A KR19950037816 A KR 19950037816A KR 970023947 A KR970023947 A KR 970023947A
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- chemical
- gas
- leakage
- semiconductor manufacturing
- sensing means
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Abstract
케미칼 및 가스를 공급하는 배관의 분기되는 지점에 센서를 설치하여 케미칼 및 가스가 누설됨을 감지하여 경보를 발생시키는 반도체 제조 시스템의 케미칼 및 가스 누설 감지장치가 개시되어 있다.A chemical and gas leakage detecting apparatus of a semiconductor manufacturing system is disclosed, in which a sensor is installed at a branching point of a pipe supplying chemical and gas to detect leakage of chemical and gas to generate an alarm.
본 발명에 따른 감지장치는, 케미칼 및 가스가 공급원으로부터 공급배관을 통하여 다단분기되어 복수의 제조 설비로 공급토록 구성된 반도체 제조 장치에서 상기 공급라인의 다단 분기되는 각 위치에 설치되어 상기 케미칼 및 가스의 누설을 감지할 수 있는 센싱수단 및 상기 센싱수단과 전기적으로 접속되어 상기 센싱수단의 전기적 상태에 따라 누설 경보를 발생시키는 모니터링 수단을 포함하여 구성된다.The sensing device according to the present invention is provided in each position where the chemical and gas are multi-stage branched from the supply line in a semiconductor manufacturing apparatus configured to be multi-stage branched from a supply source through a supply pipe and supplied to a plurality of manufacturing facilities. Sensing means for detecting the leakage and the monitoring means electrically connected to the sensing means for generating a leakage alarm in accordance with the electrical state of the sensing means.
따라서, 케미칼 및 가스 공급라인에서 누설이 발생시 누설지점을 정확히 알고 대응함으로써 누설에의한 피해를 최소화 할 수 있다는 효과가 있다.Therefore, when leakage occurs in the chemical and gas supply lines, it is possible to minimize the damage caused by leakage by accurately knowing and responding to the leak point.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제 1 도는 본 발명의 일 실시예를 나타내는 개략적인 블럭도이다.1 is a schematic block diagram illustrating an embodiment of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950037816A KR970023947A (en) | 1995-10-28 | 1995-10-28 | Chemical and Gas Leak Detectors in Semiconductor Manufacturing Systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950037816A KR970023947A (en) | 1995-10-28 | 1995-10-28 | Chemical and Gas Leak Detectors in Semiconductor Manufacturing Systems |
Publications (1)
Publication Number | Publication Date |
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KR970023947A true KR970023947A (en) | 1997-05-30 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1019950037816A KR970023947A (en) | 1995-10-28 | 1995-10-28 | Chemical and Gas Leak Detectors in Semiconductor Manufacturing Systems |
Country Status (1)
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KR (1) | KR970023947A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100296453B1 (en) * | 1997-11-26 | 2001-10-25 | 윤종용 | Apparatus and method for detecting leakage of water in semiconductor fabricating equipment |
KR100349358B1 (en) * | 1999-12-11 | 2002-08-21 | 주식회사 하이닉스반도체 | A Gas Supplying apparatus |
-
1995
- 1995-10-28 KR KR1019950037816A patent/KR970023947A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100296453B1 (en) * | 1997-11-26 | 2001-10-25 | 윤종용 | Apparatus and method for detecting leakage of water in semiconductor fabricating equipment |
KR100349358B1 (en) * | 1999-12-11 | 2002-08-21 | 주식회사 하이닉스반도체 | A Gas Supplying apparatus |
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