KR970023607A - Scrubber system with clogging prevention function - Google Patents

Scrubber system with clogging prevention function Download PDF

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Publication number
KR970023607A
KR970023607A KR1019950034128A KR19950034128A KR970023607A KR 970023607 A KR970023607 A KR 970023607A KR 1019950034128 A KR1019950034128 A KR 1019950034128A KR 19950034128 A KR19950034128 A KR 19950034128A KR 970023607 A KR970023607 A KR 970023607A
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KR
South Korea
Prior art keywords
gas
scrubber system
prevention function
clogging prevention
pipe
Prior art date
Application number
KR1019950034128A
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Korean (ko)
Other versions
KR0182057B1 (en
Inventor
윤희범
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950034128A priority Critical patent/KR0182057B1/en
Publication of KR970023607A publication Critical patent/KR970023607A/en
Application granted granted Critical
Publication of KR0182057B1 publication Critical patent/KR0182057B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Treating Waste Gases (AREA)

Abstract

입력포트(31)를 통해서 입력되는 개스를 세정한 뒤에 배기구(32)를 통해서 배기시키는 본체와, 상기한 입력포트(31)와 펌핑 시스템(20)의 출력포트(21)를 연결시키기 위한 연결관(34)과 상기한 연결관(34)으로 개스가 유입되도록 함으로써 에칭뒤에 발생하게 되는 부산물의 화합물이 상기한 개스의 분출력에 의해 응고되지 못하도록 하기 위한 개스관(35)을 포함하는 구성으로 이루어지며, 에칭뒤에 발생하게 되는 부산물의 화합물에 의해서 스크러버 시스템의 입력포트가 막히게 되는 것을 방지함으로써 설비의 고장원인을 제거하여 수명을 연장시키고, 또한 제품의 수율도 높일 수 있는 효과를 가진 막힘 방지기능을 갖는 스크러버 시스템을 제공한다.The main body which cleans the gas input through the input port 31, and exhausts it through the exhaust port 32, and the connection pipe for connecting the said input port 31 and the output port 21 of the pumping system 20. And a gas pipe 35 for preventing the compound of the by-products generated after etching from being solidified by the partial output of the gas by allowing the gas to flow into the connection pipe 34 and the above-described pipe. It prevents the input port of the scrubber system from clogging by the by-product compound that occurs after etching, thereby eliminating the cause of failure of the equipment and extending the service life, and also improving the yield of the product. It provides a scrubber system having.

Description

막힘 방지기능을 갖는 스크러버 시스템Scrubber system with clogging prevention function

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제4도는 이 발명의 실시예에 따른 막힘 방지기능을 갖는 스크러버 시스템의 구조도이고,4 is a structural diagram of a scrubber system having a clogging prevention function according to an embodiment of the present invention,

제5도는 제4도의 연결관의 구조도이다.5 is a structural diagram of the connector of FIG.

Claims (4)

입력포트를 통해서 입력되는 개스를 세정한 뒤에 배기구를 통해서 배기시키는 본체와, 상기한 입력포트와 펌핑 시스템의 출력포트를 연결시키기 위한 연결관과, 상기한 연결관으로 개스가 유입되도록 함으로써 에칭뒤에 발생하게 되는 부산물의 화합물이 상기한 개스의 분출력에 의해 응고되지 못하도록 하기 위한 개스관을 포함하여 이루어지는 것을 특징으로 하는 막힘 방지기능을 갖는 스크러버 시스템.The gas generated through the input port is cleaned and exhausted through the exhaust port, the connecting pipe for connecting the input port and the output port of the pumping system, and the gas is introduced after the etching by introducing the gas into the connecting pipe. Scrubber system having a clogging prevention function comprising a gas pipe for preventing the by-product compound to be solidified by the above-described power output of the gas. 제1항에 있어서, 상기한 개스관을 통해서 입력되는 개스에 의해 진동함으로써 에칭뒤에 발생하게 되는 부산물의 혼합물이 응고되어 상기한 입력포트를 막아버리게 되는 것을 방지하기 위한 웨이브 라인을 더 포함하여 이루어지는 것을 특징으로 하는 막힘 방지기능을 갖는 스크러버 시스템.The method of claim 1, further comprising a wave line for preventing a mixture of by-products generated after etching by vibrating by the gas input through the gas pipe to solidify and block the input port. Scrubber system with a clogging prevention function. 제1항 또는 제2항에 있어서, 상기한 개스관으로 유입되는 개스는 질소 개스(N2)로 이루어지는 것을 특징으로 하는 막힘 방지기능을 갖는 스크러버 시스템.The scrubber system having a clogging prevention function according to claim 1 or 2, wherein the gas introduced into the gas pipe is made of nitrogen gas (N2). 제2항에 있어서, 상기한 웨이브 라인의 끝에는 응고물을 효과적으로 분쇄하기 위한 진동추를 더 포함하여 이루어지는 것을 특징으로 하는 막힘 방지기능을 갖는 스크러버 시스템.The scrubber system having a clogging prevention function according to claim 2, wherein the end of the wave line further comprises an oscillating weight for effectively pulverizing the solidified material. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950034128A 1995-10-05 1995-10-05 Scrubber system with function for preventing obstruction in a line KR0182057B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950034128A KR0182057B1 (en) 1995-10-05 1995-10-05 Scrubber system with function for preventing obstruction in a line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950034128A KR0182057B1 (en) 1995-10-05 1995-10-05 Scrubber system with function for preventing obstruction in a line

Publications (2)

Publication Number Publication Date
KR970023607A true KR970023607A (en) 1997-05-30
KR0182057B1 KR0182057B1 (en) 1999-04-15

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ID=19429337

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950034128A KR0182057B1 (en) 1995-10-05 1995-10-05 Scrubber system with function for preventing obstruction in a line

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KR (1) KR0182057B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030053283A (en) * 2001-12-22 2003-06-28 동부전자 주식회사 Deposition system of oxidation layer of a semiconductor device
KR100424870B1 (en) * 2001-04-13 2004-03-27 엠에이티 주식회사 Gas scrubber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100424870B1 (en) * 2001-04-13 2004-03-27 엠에이티 주식회사 Gas scrubber
KR20030053283A (en) * 2001-12-22 2003-06-28 동부전자 주식회사 Deposition system of oxidation layer of a semiconductor device

Also Published As

Publication number Publication date
KR0182057B1 (en) 1999-04-15

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