KR970018332A

KR970018332A - Wafer Carrier

Info

Publication number: KR970018332A
Application number: KR1019950031365A
Authority: KR
Inventors: 송주현; 이영식
Original assignee: 김광호; 삼성전자 주식회사
Priority date: 1995-09-22
Filing date: 1995-09-22
Publication date: 1997-04-30

Abstract

이 발명은 웨이퍼용 캐리어의 구조 개선에 관한 것으로서, 웨이퍼용 캐리어는 서로 대향하여 설치되는 측면부(100)와, 양 측면부(100)를 지지하기 위한 고정부(200)로 이루어진다. 그리고, 측면부(100)는 웨이퍼가 삽입될 수 있는 홈(70)들을 가지고 있고, 홈(70)들을 상부 지지대(20)와 중간 지지대(3) 그리고 하부 지지대(40)로 되는 돌출부(300)들에 의하여 형성된다. 한편, 돌출부(300)의 상부 지지대(20)와 중간 지지대(30)는 공간부(50)를 사이에 두고 형성되고, 중간 지지대(30)와 하부 지지대도 공간부(50)를 사이에 두고 형성되어 웨이퍼의 세정 공정이나 약품처리 공정에서 웨이퍼와 캐리어간의 접촉면적을 최소화 하므로써, 웨이퍼의 접촉 부위에 잔류하는 미세한 입자들을 줄일 수 있고, 세정 효과에 의한 웨이퍼의 열화를 개선하는 웨이퍼용 캐리어에 관한 것이다.The present invention relates to an improvement in the structure of a carrier for a wafer. The carrier for a wafer includes a side portion 100 which is installed to face each other, and a fixing portion 200 for supporting both side portions 100. In addition, the side portion 100 has grooves 70 into which the wafer can be inserted, and the protrusions 300 having the grooves 70 as the upper support 20, the intermediate support 3, and the lower support 40. Is formed. Meanwhile, the upper support 20 and the intermediate support 30 of the protrusion 300 are formed with the space 50 interposed therebetween, and the intermediate support 30 and the lower support are also formed with the space 50 interposed therebetween. The present invention relates to a carrier for wafers that minimizes the contact area between the wafer and the carrier in the wafer cleaning process or the chemical treatment process, thereby reducing the fine particles remaining at the wafer contact area and improving the deterioration of the wafer due to the cleaning effect. .

Description

Wafer Carrier

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 이 발명의 실시예에 따른 웨이퍼용 캐리어를 나타낸 도면이다.2 is a view showing a wafer carrier according to an embodiment of the present invention.

제3도는 이 발명의 실시예에 따른 웨이퍼용 캐리어를 나타낸 사시도이다.3 is a perspective view showing a wafer carrier according to an embodiment of the present invention.

Claims

In a carrier for a wafer comprising a side portion provided to face each other and a fixing portion for supporting both side portions, the side portion has grooves into which the wafer can be inserted, and the grooves are provided in the protrusions of the upper support, the intermediate support, and the lower support. And the upper support and the intermediate support of the protrusion are formed with the space interposed therebetween, and the intermediate support and the lower support are also formed with the space interposed therebetween.