KR970006689B1 - A manufacturing method of an optical path regulating apparatus - Google Patents

A manufacturing method of an optical path regulating apparatus Download PDF

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Publication number
KR970006689B1
KR970006689B1 KR93023728A KR930023728A KR970006689B1 KR 970006689 B1 KR970006689 B1 KR 970006689B1 KR 93023728 A KR93023728 A KR 93023728A KR 930023728 A KR930023728 A KR 930023728A KR 970006689 B1 KR970006689 B1 KR 970006689B1
Authority
KR
South Korea
Prior art keywords
layer
forming
ceramic
ceramic layer
predetermined portion
Prior art date
Application number
KR93023728A
Other languages
Korean (ko)
Other versions
KR950016299A (en
Inventor
Song Chae
Yong-Ki Min
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority to KR93023728A priority Critical patent/KR970006689B1/en
Publication of KR950016299A publication Critical patent/KR950016299A/en
Application granted granted Critical
Publication of KR970006689B1 publication Critical patent/KR970006689B1/en

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

A method of fabricating an optical path controller of a projection-type image display includes the steps of selectively forming a ceramic layer 21 on a driving substrate 20, forming a sacrificial oxide layer 22 on a predetermined portion of the driving substrate 20 other than the region of the ceramic layer 21, removing a predetermined portion of the ceramic layer 21 and forming a metal layer 23 on the portion where the ceramic layer 21 is removed, selectively forming a signal electrode 24 on a predetermined portion of the ceramic layer 21 and sacrificial oxide layer 22 including the metal layer 23, sequentially forming a ceramic layer 25 and bias electrode 26 on the overall surface of the substrate and removing a predetermined portion of the bias electrode 26, ceramic layer 25, sacrificial oxide layer 22 and ceramic layer 21, placed on a predetermined region between actuators, to expose the driving substrate, forming a photoresist layer 27 on the bias electrode 26, forming a metal layer 28 on the overall surface of the substrate, removing a predetermined portion of the ceramic layers 21 and 25, bias electrode 26, photoresist layer 27 and metal layer 28, placed on a region other than the actuator, to expose the surface of the driving substrate, and removing the photoresist layer 27 ad sacrificial oxide layer 22.
KR93023728A 1993-11-09 1993-11-09 A manufacturing method of an optical path regulating apparatus KR970006689B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93023728A KR970006689B1 (en) 1993-11-09 1993-11-09 A manufacturing method of an optical path regulating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93023728A KR970006689B1 (en) 1993-11-09 1993-11-09 A manufacturing method of an optical path regulating apparatus

Publications (2)

Publication Number Publication Date
KR950016299A KR950016299A (en) 1995-06-17
KR970006689B1 true KR970006689B1 (en) 1997-04-29

Family

ID=19367654

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93023728A KR970006689B1 (en) 1993-11-09 1993-11-09 A manufacturing method of an optical path regulating apparatus

Country Status (1)

Country Link
KR (1) KR970006689B1 (en)

Also Published As

Publication number Publication date
KR950016299A (en) 1995-06-17

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