KR970005885B1 - Microwave dielectric ceramics - Google Patents
Microwave dielectric ceramics Download PDFInfo
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- KR970005885B1 KR970005885B1 KR1019940023883A KR19940023883A KR970005885B1 KR 970005885 B1 KR970005885 B1 KR 970005885B1 KR 1019940023883 A KR1019940023883 A KR 1019940023883A KR 19940023883 A KR19940023883 A KR 19940023883A KR 970005885 B1 KR970005885 B1 KR 970005885B1
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Abstract
Description
[발명의 명칭][Name of invention]
마이크로웨이브용 유전체 세라믹 조성물Dielectric Ceramic Composition for Microwave
[발생의 상세한 설명][Detailed Description of Occurrence]
(발명의 분야)(Field of invention)
본 발명은 민생용 및 산업용 전자기기에 사용되는 마이크로 웨이브 대역 부품용 소재 및 적층 세라믹 커패시터와 전자파 장애(Electro - Magnetic Interference : EMI) 필터의 온도보상을 소재로서 유용한 세라믹 조상물에 관한 것으로서, 특히 유전율이 높고 공진주파수의 온도계수가 낮으며, 품질계수(Quality factor : Q)가 양호한 세라믹(Ceramic) 유전체 조성물에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to ceramic ancestors useful as temperature compensation materials for microwave band components and multilayer ceramic capacitors and electromagnetic interference (EMI) filters used in consumer and industrial electronic devices. The present invention relates to a ceramic dielectric composition having a high temperature coefficient, a low resonant frequency, and a good quality factor (Q).
(종래의 기술)(Conventional technology)
최근 자동차 전화, 휴대 전화, 코드리스 전화, 위성방송 수신기 등의 통신수단이 범용화됨에 따라 마이크로웨이브용 회로, 집적회로의 발전 등으로 마이크로웨이브 대역용 필터, 기판 전압조절 진동자(Voltage Controlled Oscillator : VCO)용 유전체 세라믹이 널리 이용되고 있다. 이러한 마이크로웨이브 유전체 세라믹은 주로 공진기(Resonator)로 이용되고 있는데, 여기에 사용되는 세라믹 조성물로는 BaO - Nd2O3- TiO2, BaO - Sm2O3- TiO2, PbO - ZrO2- CaO등 다양한 유전체가 이용되고 있다. 이중 BaO - Nd2O3- TiO2와 BaO- Sm2O3- TiO2세라믹은 유전율이 60 - 80정도이고 품질계수가 1㎓에서 5000정도이며, 공진주파수의 온도계수(Tf)의 변화가 매우 커서 실용상 큰 문제가 있다. 그리고 일본에서 제안된 PbO - ZrO2- CaO계는 유전율이 90이상으로 높은 반면 고주파에서 품질계수가 1000에서 3500정도로 낮고 3㎓이상의 고주파에서는 손실이 높아서 대역통과필터(Band Pass Filter : BPF) 및 전압조절 진동자 등의 부품손실을 높이는 단점이 있다. 이러한 부품에 적용되기 위한 요구특성으로서는 품질계수가 높아아 하며(예를들어, 1㎓에서 5000이상),공진주파수의 온도안정성이 작아야 한다. 품질계수가 개선된 세라믹 조성물로서, 일본에서 PbO의 첨가로 인한 유전율의 향상을 보고한 BaO - Nd2O3- TiO2조성물이 제안된바 있다. 이 계의 유전율은 88, 품질계수는 4000 ∼ 5500정도로 보고되어 있다. 그러나, 이 계는 PbO가 첨가됨으로써 유전율은 증가되나, 조성비가0.5BaO - 0.5PbO -1, ONd2O3- 5TiO2로 산화납의 조성비가 높으며, 또한 제조공정상 산화납 및 산화비스무스를 과량으로 첨가하게 되는데, 이들 첨가원소 휘발로 인하여 균일한 조성제어가 어려우며, 이들 첨가제는 제조공정상 인체에 매우 유해한 원소로 알려져 있고, 값비싼 산화니오디움이 필수적으로 사용되는 유전체이다. 마이크로웨이브용 부품에 사용되기 위해서 요구되는 조건은, 고주파에서 유전체의 유전율이 커야하고 품질 계수도 5000이상 되어야 하며, 공진파수의 온도계수가 ±5ppm/℃로 낮아야 한다. 이들 유전특성을 만족하는 것외에 제조공정에서 요구되는 조건은 성분원소의 휘발로 조성의 제어가 어려운 단점을 방지함으로써 품질저하를 방지하고, 제조공정상 인체에 유해한 원소인 납성분 및 비스무스 성분원소들의 양을 줄임으로써 제조 조성성분을 안정적으로 제어하는데 있다.Recently, as communication means such as automobile telephone, cellular phone, cordless telephone and satellite broadcasting receiver have been widely used, microwave band filter, substrate voltage controlled oscillator (VCO) has been developed due to the development of microwave circuit and integrated circuit. Dielectric ceramics are widely used. Such microwave dielectric ceramics are mainly used as resonators, and the ceramic compositions used herein include BaO-Nd 2 O 3 -TiO 2 , BaO-Sm 2 O 3 -TiO 2 , PbO-ZrO 2 -CaO Various dielectrics are used. Among BaO-Nd 2 O 3 -TiO 2 and BaO- Sm 2 O 3 -TiO 2 ceramics, the dielectric constant is about 60-80, the quality factor is about 1㎓ to 5000, and the change of temperature coefficient (T f ) of resonance frequency It is very large and has a big practical problem. In addition, the PbO-ZrO 2 -CaO system proposed in Japan has a high dielectric constant of more than 90, while the quality factor is low from 1000 to 3500 at high frequencies, and the loss is high at high frequencies of 3 kHz or higher, so the band pass filter (BPF) and voltage There is a disadvantage in that the parts loss such as the adjustable oscillator is increased. The required characteristics to be applied to these parts should be high quality factors (e.g. more than 5000 at 1 kHz) and low temperature stability of the resonance frequency. As a ceramic composition having an improved quality factor, a BaO-Nd 2 O 3 -TiO 2 composition has been proposed in Japan, which reports an improvement in permittivity due to the addition of PbO. The dielectric constant of this system is 88, and the quality factor is reported as 4000-5500. However, PbO is added to increase the dielectric constant, but the composition ratio is 0.5BaO-0.5PbO -1, ONd 2 O 3-5 TiO 2 , which has a high composition ratio of lead oxide, and an excessive amount of lead oxide and bismuth oxide in the manufacturing process. Due to the volatilization of these additive elements, uniform composition control is difficult, and these additives are known as very harmful elements to the human body in the manufacturing process, and expensive dielectric oxide is essential dielectric. The conditions required for use in microwave components are that the dielectric constant of the dielectric should be high at high frequencies, the quality factor should be more than 5000, and the temperature coefficient of the resonance wave should be as low as ± 5 ppm / ° C. In addition to satisfying these dielectric properties, the conditions required in the manufacturing process are to prevent quality deterioration by preventing the control of composition by volatilization of the component elements, and the amount of lead and bismuth component elements that are harmful to the human body in the manufacturing process. It is to stably control the manufacturing composition components by reducing the.
(발명의 목적)(Purpose of invention)
본 발명은 상술한 조건들을 감안하여 안출된 것으로서, 종래 유전체에 비해 휘발성이 적고 인체에 무해한 소결조제를 이용하여 제조원소의 조성비가 안정화되고 낮은 제조원가로 제조가능하며, 고주파에서 유전율이 크고 품질계수가 높은 마이크로웨이브 유전체 세라믹 조성물을 제공하는데 그 목적이 있다.The present invention has been made in view of the above-described conditions, using a sintering aid that is less volatile and harmless to a human body than a conventional dielectric, the composition ratio of the manufacturing element is stabilized and can be manufactured at low manufacturing cost, and the dielectric constant is large and the quality factor is high at high frequency. The purpose is to provide a high microwave dielectric ceramic composition.
(발명의 구성)Composition of the Invention
본 발명은 산화바륨, 산화납, 산화사마륨 및 이산화티탄을 주성분으로 하는 유전체 세라믹 조성물로서 여러차례 실험을 통해서 마이크로웨이브에 유용한 세라믹 유전체 조성물을 얻을 수 있었다. 예를들어, 본 발명은 제1성분으로 60.0 ∼ 75.0㏖%의 TiO2, 제2성분으로 6 ∼ 20㏖%의 Sm2O3, 제3성분으로 6 ∼ 20㏖%의 BaO1-aPbOa로 구성된다. 본 발명은 산화니오디움보다 가격이 저렴한 산화사마륨을 사용하여 유전율은 같고 품질계수가 증가한 조성을 얻을 수 있다. 이외에 3몰%내외의 산화납을 사용함으로써 납성분의 휘발로 인한 품질계수의 저하를 방지할 수 있고 조성의 조절이 용이하다.According to the present invention, a ceramic dielectric composition useful for microwaves has been obtained through experiments as a dielectric ceramic composition composed mainly of barium oxide, lead oxide, samarium oxide, and titanium dioxide. For example, the present invention provides 60.0-75.0 mol% TiO 2 as the first component, 6-20 mol% Sm 2 O 3 as the second component, and 6-20 mol% BaO 1-a PbOa as the third component. It consists of. The present invention uses samarium oxide, which is cheaper than niobium oxide, to obtain a composition having the same dielectric constant and increased quality factor. In addition, by using the lead oxide of about 3 mol% can prevent the degradation of the quality factor due to the volatilization of the lead component and easy to control the composition.
상기 조성물을 1225℃ ∼ 1450℃범위의 소결온도에서 소결하여 제조된 본 발명의 유전체 세라믹은 85이상의 유전율과, ±5ppm/℃이내의 공진주파수 온도계수를 얻을 수 있고, 1GHz 공진주파수에서 6000이상의 품질 계수를 갖는다.The dielectric ceramic of the present invention prepared by sintering the composition at a sintering temperature in the range of 1225 ° C. to 1450 ° C. has a dielectric constant of 85 or more and a resonant frequency temperature coefficient within ± 5 ppm / ° C., and a quality of 6000 or more at 1 GHz resonant frequency. Has a coefficient.
실시예Example
이하 본 발명을 실시한 예를 설명한다.Hereinafter, an example of implementing the present invention will be described.
산화바륨, 산화납, 산화사마륨 및 이산화티탄을 주성분으로 하는x(BaO1-aPbOa) - ySm2O3-zTiO2조성 물을 표 1에 도시한 조성과 같이 평량하여 탈이온수와 함께 혼합한다. 이때, 상기 산화바륨 대신에 탄산바륨(BaCO3)을, 산화납(PbO)대신에 삼산화납(Pb3O4)를 이용할 수도 있다. 혼합물은 볼밀링 방법을 이용하며, 지르코니아볼과 플라스틱 단지를 이용한다. 건조된 파우더를 1000℃이상에서 2시간 동안 하소를 수행하고, 폴리비닐알콜을 적정량 첨가하여 지르코니아유발에서 혼합한다.X (BaO 1-a PbO a ) -ySm 2 O 3 -zTiO 2 composition containing barium oxide, lead oxide, samarium oxide, and titanium dioxide as a main component, are weighed as shown in Table 1, and mixed with deionized water. do. In this case, instead of the barium oxide, barium carbonate (BaCO 3 ) may be used, and lead trioxide (Pb 3 O 4 ) may be used instead of lead oxide (PbO). The mixture uses a ball milling method, using zirconia balls and plastic jars. The dried powder is calcined at 1000 ° C. or higher for 2 hours, and an appropriate amount of polyvinyl alcohol is added and mixed in zirconia induction.
혼합된 재료는 금형과 유압프레스를 사용하여 직경 10㎜이상, 높이 5㎜이상의 원통형 시편으로 성형한다.성형시의 압력은 1.0ton/㎠이상이다. 성형시의 시편을 지르코니아 셋터(Setter) 위에 높고 공기분위기에서 1200℃이상의 고온으로 즉, 표 1에 도시한 소결조건으로 전기로를 이용하여 소결한다. 소결을 행한 시편은 하키 - 콜만(Hakki - Coleman)법으로 약 3㎓에서 유전율을 측정하였고, 개방형 공진기법으로 유전체의 무부하 Q를 측정하였다. 또 공진주파수의 온도계수는 아래 (1)식에 의해 25℃에서 125℃의 온도범위에 대하여 구하였다.The mixed material is molded into a cylindrical specimen of diameter 10 mm or more and height 5 mm or more using a mold and a hydraulic press. The pressure during molding is 1.0 ton / cm 2 or more. Specimens during molding are sintered using an electric furnace on a zirconia setter at a high temperature above 1200 ° C. in the air atmosphere, that is, the sintering conditions shown in Table 1. The sintered specimens were measured for dielectric constant at about 3 으로 by the Hockey-Colman method, and the no-load Q of the dielectric material was measured by the open resonant method. The temperature coefficient of the resonance frequency was obtained for the temperature range of 25 ° C to 125 ° C by the following equation (1).
·f(152)= 15℃에서의 공진주파수F (152) = resonance frequency at 15 ℃
·f(25)= 25℃에서의 공진주파수F (25) = resonant frequency at 25 ° C
·△T = 측정온도차이, 이 경우 125 - (25) = 100ΔT = measured temperature difference, in this case 125-(25) = 100
이상의 방법으로 제작된 각 세라믹 유전체의 유전특성을 측정한 결과, 조성중 이산화티탄(TiO2)의 첨가량(z)이 증가함에 따라 최적소결 온도는 감소하고, 품질계수가 증가하는 효과를 얻을 수 있다. 그러나, 이산화티탄이 75몰%이상일때는 공진주 파수의온도계수는 양(Positive)으로 이동되어 실용상 어려운 단점이 있다. 또한 60몰%이하이면 화학조성비가 적합하지 않아 유전체가 형성되지 않는다. 따라서, 본 발명의 실시예에서 바람직한 TiO2의 첨가량(z)은 약 60∼75몰%임을 알 수 있다. 조성중 산화사마륨의 양이 증가함에 따라 품질계수가 증가하는 효과를 얻을 수 있으나, 적정소결 온도가 1400℃이상으로 높아지며, 18몰%이상일 때 공진주파수의 온도계수가 양으로 이동되는 단점도 있다. 첨가량 5몰%이하이면 상대적으로 이산화티탄 첨가량의 증가로 인하여 공진주파수 온도계수가 양으로 이동된다. 따라서, 산화사마륨 성분의 바람직한 조성비는 약 6 ∼ 20㏖%이다. 조성중 산화납의 증가함에 따라 적정소결 온도가 낮아지고 유전율이 증가하는 효과가 있으나, 15몰%이상 첨가하면, 산화납의 휘발로 인하여 조성조절에 어려움이 있고 품질계수가 저하되는 단점이 있다. 또한, 조성중 산화바륨의 양을 증가시키면 품질계수는 낮아지나, 공진수파수의 온도 안전성을 얻을 수 있다. 또, 상기 조성에서 산화바륨(BaO) 대신에 탄산바륨(BaCO3)을 이용하여도 유전특성에는 큰 변화가 없으며, 산화납(PbO) 대신에 삼산화납(Pb3O4)을 이용하면 균일한 혼합이 이루어지며, 유전 특성에는 큰 영향을 미치지 않는다.As a result of measuring the dielectric properties of each ceramic dielectric fabricated by the above method, the optimum sintering temperature is decreased and the quality factor is increased as the amount z of titanium dioxide (TiO 2 ) is increased in the composition. However, when the titanium dioxide is more than 75 mol%, the temperature coefficient of the resonant frequency is shifted positively, which is difficult in practical use. In addition, if it is 60 mol% or less, a chemical composition ratio is not suitable and a dielectric will not be formed. Therefore, it can be seen that the preferred amount of addition (z) of TiO 2 in the embodiment of the present invention is about 60 to 75 mol%. As the amount of samarium oxide in the composition is increased, the quality factor can be increased, but the optimum sintering temperature is increased to 1400 ° C. or higher, and the temperature coefficient of the resonance frequency is shifted to a positive amount at 18 mol% or more. If the amount is less than 5 mol%, the resonance frequency temperature coefficient is shifted to the positive amount due to the increase in the amount of titanium dioxide added. Therefore, the preferable composition ratio of the samarium oxide component is about 6-20 mol%. As the lead oxide is increased during the composition, the proper sintering temperature is lowered and the dielectric constant is increased. However, when 15 mol% or more is added, it is difficult to control the composition due to volatilization of the lead oxide and the quality factor is lowered. In addition, if the amount of barium oxide in the composition is increased, the quality factor is lowered, but the temperature stability of the resonance frequency can be obtained. In addition, even when barium carbonate (BaCO 3 ) is used instead of barium oxide (BaO) in the composition, there is no significant change in dielectric properties, and when lead trioxide (Pb 3 O 4 ) is used instead of lead oxide (PbO), it is uniform. Mixing occurs and does not significantly affect the dielectric properties.
동일한 조성에서 소결온도가 높아지면 유전율과 품질계수가 약간 높아지고, 소결시간이 길어지면 유전율은 거의 변화가 없으나 품질계수가 약간 높아짐을 알 수 있다. 서로 다른 조성비와 소결조건에서 제조된 각 시료의 유전특성결과를 표 1에 요약하였다.In the same composition, when the sintering temperature is increased, the dielectric constant and quality coefficient are slightly higher, and when the sintering time is longer, the dielectric constant is almost unchanged, but the quality coefficient is slightly higher. Table 1 summarizes the dielectric properties of each sample prepared under different composition ratios and sintering conditions.
(x+y+z=100)(x + y + z = 100)
(발명의 효과)(Effects of the Invention)
이상 설명한 바와 같이 본 발명에 의하면, 낮은 제조원가를 가지며, 휘발성이 적고, 인체에 유해한 성분의 조성비를 줄여 안정화된 소결조제를 이용하여 상온에서 85이상의 유전율과 공진주파수 온도계수가 평탄하며 6000이상의 품질계수를 갖는 세라믹 유전체를 얻을 수 있다. 이들 유전체는 유전율 및 품질계수가 우수하기 때문에 마이크로웨이브 유전체에 응용가능하며, 공진주파수 온도계수 ±5ppm/℃이내를 갖는 유전체는 EMI필터용 유전체 및 온도보상용 캐패시터로도 널리 이용할 수 있다. 또한, 값비싼 산화니오디움(NdO) 대신에 이보다 훨씬 값이 싼 산화사마륨(SmO)을 첨가함으로써 원소재 자체가 차지하는 가격비중을 낮춤으로써 제조원가를 절감할 수 있다. 또한 산화납 및 산화비스무스의 휘발에 대한 문제점을 줄일 수 있어서 제조공정을 사용할 수 있으며, 인체에 유해한 원소의 줄일 수 있는 효과를 발휘한다.As described above, according to the present invention, the dielectric constant of 85 or higher and the resonant frequency temperature coefficient are flat and the quality coefficient of 6000 or higher at room temperature using a sintering aid stabilized by low production cost, low volatility, and reduced composition ratio of harmful components to human body. A ceramic dielectric having can be obtained. These dielectrics can be applied to microwave dielectrics because of their excellent dielectric constant and quality factor, and dielectrics having a resonance frequency of less than ± 5 ppm / ° C can also be widely used as EMI filter dielectrics and temperature compensation capacitors. In addition, by adding much cheaper samarium oxide (SmO) instead of expensive NdO, it is possible to reduce the manufacturing cost by lowering the weight ratio of the raw material itself. In addition, it is possible to reduce the problems with the volatilization of lead oxide and bismuth oxide can be used in the manufacturing process, it has an effect that can reduce the harmful elements to the human body.
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