KR970004397U - Coating fixture - Google Patents

Coating fixture

Info

Publication number
KR970004397U
KR970004397U KR2019950019728U KR19950019728U KR970004397U KR 970004397 U KR970004397 U KR 970004397U KR 2019950019728 U KR2019950019728 U KR 2019950019728U KR 19950019728 U KR19950019728 U KR 19950019728U KR 970004397 U KR970004397 U KR 970004397U
Authority
KR
South Korea
Prior art keywords
coating fixture
fixture
coating
Prior art date
Application number
KR2019950019728U
Other languages
Korean (ko)
Other versions
KR200195847Y1 (en
Inventor
김명진
윤대원
박태성
Original Assignee
전자부품연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 전자부품연구원 filed Critical 전자부품연구원
Priority to KR2019950019728U priority Critical patent/KR200195847Y1/en
Publication of KR970004397U publication Critical patent/KR970004397U/en
Application granted granted Critical
Publication of KR200195847Y1 publication Critical patent/KR200195847Y1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Optical Couplings Of Light Guides (AREA)
KR2019950019728U 1995-07-31 1995-07-31 Fixing device for coating apparatus KR200195847Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950019728U KR200195847Y1 (en) 1995-07-31 1995-07-31 Fixing device for coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950019728U KR200195847Y1 (en) 1995-07-31 1995-07-31 Fixing device for coating apparatus

Publications (2)

Publication Number Publication Date
KR970004397U true KR970004397U (en) 1997-02-19
KR200195847Y1 KR200195847Y1 (en) 2000-10-02

Family

ID=19419901

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950019728U KR200195847Y1 (en) 1995-07-31 1995-07-31 Fixing device for coating apparatus

Country Status (1)

Country Link
KR (1) KR200195847Y1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102340768B1 (en) * 2020-10-28 2021-12-16 노시성 A hera painting device and painting method using it
KR102340767B1 (en) * 2020-10-28 2021-12-16 노시성 A hera painting device and a method thereor

Also Published As

Publication number Publication date
KR200195847Y1 (en) 2000-10-02

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Legal Events

Date Code Title Description
A201 Request for examination
N231 Notification of change of applicant
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee