KR970004189A - Photodetector integrated surface emitting semiconductor laser diode and manufacturing method thereof - Google Patents

Photodetector integrated surface emitting semiconductor laser diode and manufacturing method thereof Download PDF

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Publication number
KR970004189A
KR970004189A KR1019950018104A KR19950018104A KR970004189A KR 970004189 A KR970004189 A KR 970004189A KR 1019950018104 A KR1019950018104 A KR 1019950018104A KR 19950018104 A KR19950018104 A KR 19950018104A KR 970004189 A KR970004189 A KR 970004189A
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KR
South Korea
Prior art keywords
manufacturing
semiconductor laser
laser diode
surface emitting
emitting semiconductor
Prior art date
Application number
KR1019950018104A
Other languages
Korean (ko)
Other versions
KR100363243B1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1019950018104A priority Critical patent/KR100363243B1/en
Publication of KR970004189A publication Critical patent/KR970004189A/en
Application granted granted Critical
Publication of KR100363243B1 publication Critical patent/KR100363243B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18394—Apertures, e.g. defined by the shape of the upper electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
KR1019950018104A 1995-06-29 1995-06-29 Surface emitting semiconductor laser diode integrated with photo detector and its manufacturing method KR100363243B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950018104A KR100363243B1 (en) 1995-06-29 1995-06-29 Surface emitting semiconductor laser diode integrated with photo detector and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950018104A KR100363243B1 (en) 1995-06-29 1995-06-29 Surface emitting semiconductor laser diode integrated with photo detector and its manufacturing method

Publications (2)

Publication Number Publication Date
KR970004189A true KR970004189A (en) 1997-01-29
KR100363243B1 KR100363243B1 (en) 2003-02-05

Family

ID=37490802

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950018104A KR100363243B1 (en) 1995-06-29 1995-06-29 Surface emitting semiconductor laser diode integrated with photo detector and its manufacturing method

Country Status (1)

Country Link
KR (1) KR100363243B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102523975B1 (en) 2017-10-11 2023-04-20 삼성전자주식회사 Light source integrated light sensing system and electronic apparatus including the same

Also Published As

Publication number Publication date
KR100363243B1 (en) 2003-02-05

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