KR970003567A - Manufacturing Method of Active Matrix Substrate - Google Patents

Manufacturing Method of Active Matrix Substrate Download PDF

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Publication number
KR970003567A
KR970003567A KR1019950014492A KR19950014492A KR970003567A KR 970003567 A KR970003567 A KR 970003567A KR 1019950014492 A KR1019950014492 A KR 1019950014492A KR 19950014492 A KR19950014492 A KR 19950014492A KR 970003567 A KR970003567 A KR 970003567A
Authority
KR
South Korea
Prior art keywords
manufacturing
active matrix
matrix substrate
substrate
active
Prior art date
Application number
KR1019950014492A
Other languages
Korean (ko)
Other versions
KR0161232B1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1019950014492A priority Critical patent/KR0161232B1/en
Publication of KR970003567A publication Critical patent/KR970003567A/en
Application granted granted Critical
Publication of KR0161232B1 publication Critical patent/KR0161232B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
KR1019950014492A 1995-06-01 1995-06-01 Fabricating method of active matrix substrate KR0161232B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950014492A KR0161232B1 (en) 1995-06-01 1995-06-01 Fabricating method of active matrix substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950014492A KR0161232B1 (en) 1995-06-01 1995-06-01 Fabricating method of active matrix substrate

Publications (2)

Publication Number Publication Date
KR970003567A true KR970003567A (en) 1997-01-28
KR0161232B1 KR0161232B1 (en) 1999-02-01

Family

ID=19416343

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950014492A KR0161232B1 (en) 1995-06-01 1995-06-01 Fabricating method of active matrix substrate

Country Status (1)

Country Link
KR (1) KR0161232B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020264205A1 (en) * 2019-06-26 2020-12-30 Milwaukee Electric Tool Corporation Vacuum tools

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020264205A1 (en) * 2019-06-26 2020-12-30 Milwaukee Electric Tool Corporation Vacuum tools

Also Published As

Publication number Publication date
KR0161232B1 (en) 1999-02-01

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