KR970003333A - Support Structure of Top Plate for Exposure Machine - Google Patents

Support Structure of Top Plate for Exposure Machine Download PDF

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Publication number
KR970003333A
KR970003333A KR1019950015666A KR19950015666A KR970003333A KR 970003333 A KR970003333 A KR 970003333A KR 1019950015666 A KR1019950015666 A KR 1019950015666A KR 19950015666 A KR19950015666 A KR 19950015666A KR 970003333 A KR970003333 A KR 970003333A
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KR
South Korea
Prior art keywords
position adjusting
adjusting portion
top plate
support
adjustment
Prior art date
Application number
KR1019950015666A
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Korean (ko)
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KR100202165B1 (en
Inventor
박수관
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박수관
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Publication date
Application filed by 박수관 filed Critical 박수관
Priority to KR1019950015666A priority Critical patent/KR100202165B1/en
Publication of KR970003333A publication Critical patent/KR970003333A/en
Application granted granted Critical
Publication of KR100202165B1 publication Critical patent/KR100202165B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/22—Applying luminescent coatings
    • H01J9/227—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
    • H01J9/2271—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines by photographic processes
    • H01J9/2272—Devices for carrying out the processes, e.g. light houses

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

본 발명은 노광기용 탑플레이트의 지지구조에 관한 것으로, 노광기(1)의 상부베이스(2a)에 구비된 제1위치 조절부(7)와 제2위치조절부(8)에 편심을 갖춘 수평조절부(7b,8b)가 구비됨과 더불어, 제3위치조절부(8´)에 "ㄱ"자 단면을 갖추고 이동시 간격을 조절하도록 홈을 갖춘 조절브라켓트(8´b)가 갖추어져 수평하게 4지점을 지지하는 한편, 상기 제1위치조절부(7)와 제3위치조절부(8´)에 편심을 갖춘 수직조절부(7d,8d´)가 구비되어 3지점을 지지하게 되어 탑플레이트를 지지하면서 수직과 수평으로 조절할 수 있도록 된 각 위치조절부들이 대략 3.5㎜에서 4.5㎜의 편차를 갖도록 구성되어져, 상기 편차량에 의해 미세한 수직 및 수평조절이 가능할 뿐 만 아니라 상기 위치조절부에 구비된 수평 및 수직조절부가 스패너와 같은 간단한 도구를 사용하여 조절되어지게 되어 작업시간이 절감되어지게 된다.The present invention relates to a support structure of a top plate for an exposure machine, wherein the first position adjusting portion (7) and the second position adjusting portion (8) provided in the upper base (2a) of the exposure machine (1) has a horizontal adjustment In addition to the portions 7b and 8b, the third position adjusting portion 8´ is provided with a "b" shaped cross section and is provided with an adjustment bracket 8'b provided with grooves to adjust the distance during movement. On the other hand, the first position adjusting portion 7 and the third position adjusting portion 8 'are provided with vertical adjustment portions 7d and 8d' having an eccentricity to support three points to support the top plate. Each of the position adjusting parts which can be adjusted vertically and horizontally is configured to have a deviation of approximately 3.5 mm to 4.5 mm, so that not only fine vertical and horizontal adjustments are possible by the amount of deviation, but also horizontal and The vertical controls can be adjusted using simple tools such as spanners. The work time is saved.

Description

노광기용 탑플레이트의 지지구조Support Structure of Top Plate for Exposure Machine

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도 (A)는 본 발명에 따른 탑플레이트가 지지되어진 노광기의 개략적인 평면도, (B)는 개략적인 단면도.FIG. 1A is a schematic plan view of an exposure machine on which a top plate according to the present invention is supported; FIG.

Claims (6)

플로위에 고정시키기 위한 하부베이스(2)와, 이 하부베이스(2)에 소정간격을 두고 중앙에 구비된 노광부(15)를 중심으로 렌즈부(10)와 에스캠작동부(16) 및 가이드부(14)의 한쪽에 설치된 렌즈이송부(9)로 구성되어진 상부베이스(2a) 및, 이 상부베이스(2a) 상부에 구비된 탑플레이트(3)가 사각형상을 이루도록 구비된 4개의 고정블락(2b) 결합된 위치조절부들에 의해 지지됨과 더불어 판넬고정부(4)와 제1,2위치고정부(5,6)로 구성되어진 노광기용 탑플레이트의 지지구조에 있어서, 상기 제1위치조절부(7)와 제2위치조절부(8)에 편심을 갖춘 수평조절부(7b,8b)가 구비됨과 더불어, 제3위치조절부(8´)에 "ㄱ"자 단면을 갖추고 이동시 간격을 조절하도록 홈을 갖춘 조절브라켓트(8´b)가 갖추어져 수평하게 4개의 지점을 지지하는 한편, 상기 제1위치조절부(7)와 제3위치조절부(8´)에 편심을 갖춘 수직조절부(7d,8d´)가 구비되어 수직하게 3개의 지점을 지지하도록 된 것을 특징으로 하는 노공기용 탑플레이트의 지지구조.The lens unit 10, the S-cam operation unit 16, and the guide, with a lower base 2 for fixing on the flow, and an exposure unit 15 provided at the center with a predetermined distance therebetween. Four fixed blocks provided such that the upper base 2a constituted by the lens transfer unit 9 provided on one side of the unit 14 and the top plate 3 provided on the upper base 2a form a quadrangular shape ( 2b) In the support structure of the top plate for the exposure machine, which is supported by the combined position adjusting parts and composed of the panel fixing part 4 and the first and second position fixing parts 5 and 6, the first position adjusting part. (7) and the second position adjusting section (8) is provided with horizontal adjustment section (7b, 8b) with an eccentricity, and the "a" shaped cross section on the third position adjusting section (8 ') to adjust the distance during movement An adjustment bracket 8´b is provided with a groove so as to support four points horizontally, while the first position adjustment part 7 and the third position adjustment are provided. Vertical adjustment unit supporting structure for the furnace atmosphere for the top plate, characterized in that the (7d, 8d') to support the three points is provided with a perpendicularly with the eccentric (8'). 제1항에 있어서, 상기 제1위치조절부(7)와 제2위치조절부(8)이 수평조절부(7b,8b)가 고정블럭(2a)에 고정된 지지블럭(7a,8a)에 결합된 편심축(7b3,8b3)에 편심되어 베어링(7b4,8b4)과 조절헤드(7b2,8b2)를 원형캠(7b1,8b1)으로 구성되어진 것을 특징으로 하는 노광기용 탑플레이트의 지지구조.2. The first position adjusting portion (7) and the second position adjusting portion (8) according to claim 1, wherein the horizontal adjusting portions (7b, 8b) are supported on the support blocks (7a, 8a) fixed to the fixed block (2a). is eccentric to the coupling eccentric shaft (7b 3, 8b 3) bearing (7b 4, 8b 4) and the control head (7b 2, 8b 2) the exposure machine, characterized in that been a circular cam (7b 1, 8b 1) Support structure of the top plate. 제1항에 있어서, 제1위치조절부(7)와 제3위치조절부(8´)이 수직조절부(7d,8´d)가 고정블럭(2a)에 고정된 지지블럭(7a,8´a)에 결합된 편심축(7d3,8´d3)에 편심되어 베어링(7d4,8´d4)과 조절헤드(7d2,8´d2)를 갖춘 원형캠(7d1,8d1)으로 구성되어진 것을 특징으로 하는 노공기용 탑플레이트의 지지구조.The support blocks (7a, 8) according to claim 1, wherein the first position adjusting portion (7) and the third position adjusting portion (8 ') are vertically fixed portions (7d, 8'd) fixed to the fixed block (2a). Circular cam (7d 1 , eccentric) with eccentric shaft (7d 3 , 8´d 3 ) coupled to ´a and bearing (7d 4 , 8´d 4 ) and adjusting head (7d 2 , 8´d 2 ) 8d 1 ), the support structure of the top plate for an air machine, characterized in that consisting of. 제1항에 있어서, 상기 제1위치조절부(7)와 제2위치조절부(8) 및 제3위치조절부(8´)에 구비된 수평조절부(7b,8b) 및 수직조절부(7d,8´d)가 고정스크류(7c,8c,9´e)에 의해 고정되도록 되어진 것을 특징으로 하는 노광기용 탑플레이트의 지지구조.According to claim 1, wherein the first position adjusting portion (7), the second position adjusting portion (8) and the third position adjusting portion (8b) and the horizontal adjusting portion (7b, 8b) 7d, 8'd) is fixed by fixing screws 7c, 8c, 9'e. 제2항 또는 제4항에 있어서, 상기 수평조절부(7b,8b)와 수직조절부(7d,8´d)의 편심량이 약 3.5㎜ 내지 4.5㎜인 것을 특징으로 하는 노광기용 탑플레이트의 지지구조.5. The support of the top plate for an exposure machine according to claim 2 or 4, wherein an eccentric amount of the horizontal adjustment parts 7b and 8b and the vertical adjustment parts 7d and 8'd is about 3.5 mm to 4.5 mm. rescue. 제1항에 있어서, 상기 제1위치조절부(7)가 탑플레이트(3)를 뒷쪽에서 일정간격으로 2개 구비됨과 더불어, 제2위치조절부(8)가 상기 제1위치조절부(7)와 90°직각을 이루는 측면의 중앙부위에 구비되는 한편, 제3위치조절부(8´)가 상기 제1위치조절부(7)의 대향부위 측면의 중앙부위에 구비되어진 것을 특징으로 하는 노광기용 탑플레이트의 지지구조.According to claim 1, wherein the first position adjusting portion 7 is provided with two top plates 3 at regular intervals from the rear, and the second position adjusting portion 8 is provided with the first position adjusting portion 7 And a third position adjusting portion 8 'is provided at the center portion of the side of the opposite portion of the first position adjusting portion 7 while being provided at the center portion of the side surface formed at a right angle of 90 degrees. Support structure of the top plate. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950015666A 1995-06-14 1995-06-14 Supporting structure of top plate for exposure KR100202165B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950015666A KR100202165B1 (en) 1995-06-14 1995-06-14 Supporting structure of top plate for exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950015666A KR100202165B1 (en) 1995-06-14 1995-06-14 Supporting structure of top plate for exposure

Publications (2)

Publication Number Publication Date
KR970003333A true KR970003333A (en) 1997-01-28
KR100202165B1 KR100202165B1 (en) 1999-06-15

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KR1019950015666A KR100202165B1 (en) 1995-06-14 1995-06-14 Supporting structure of top plate for exposure

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