KR970003159U - Spray nozzle for cleaning exposed parts for exposure machine - Google Patents

Spray nozzle for cleaning exposed parts for exposure machine

Info

Publication number
KR970003159U
KR970003159U KR2019940013366U KR19950013366U KR970003159U KR 970003159 U KR970003159 U KR 970003159U KR 2019940013366 U KR2019940013366 U KR 2019940013366U KR 19950013366 U KR19950013366 U KR 19950013366U KR 970003159 U KR970003159 U KR 970003159U
Authority
KR
South Korea
Prior art keywords
spray nozzle
exposure machine
exposed parts
cleaning exposed
cleaning
Prior art date
Application number
KR2019940013366U
Other languages
Korean (ko)
Other versions
KR200146396Y1 (en
Inventor
박수관
Original Assignee
박수관
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 박수관 filed Critical 박수관
Priority to KR2019940013366U priority Critical patent/KR200146396Y1/en
Publication of KR970003159U publication Critical patent/KR970003159U/en
Application granted granted Critical
Publication of KR200146396Y1 publication Critical patent/KR200146396Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
KR2019940013366U 1995-06-14 1995-06-14 A lighting projection device KR200146396Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013366U KR200146396Y1 (en) 1995-06-14 1995-06-14 A lighting projection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013366U KR200146396Y1 (en) 1995-06-14 1995-06-14 A lighting projection device

Publications (2)

Publication Number Publication Date
KR970003159U true KR970003159U (en) 1997-01-24
KR200146396Y1 KR200146396Y1 (en) 1999-06-15

Family

ID=19415503

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013366U KR200146396Y1 (en) 1995-06-14 1995-06-14 A lighting projection device

Country Status (1)

Country Link
KR (1) KR200146396Y1 (en)

Also Published As

Publication number Publication date
KR200146396Y1 (en) 1999-06-15

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Legal Events

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
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Payment date: 20030227

Year of fee payment: 5

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