KR960029715U - 아이 라인 스텝퍼 조명계 - Google Patents

아이 라인 스텝퍼 조명계

Info

Publication number
KR960029715U
KR960029715U KR2019950003310U KR19950003310U KR960029715U KR 960029715 U KR960029715 U KR 960029715U KR 2019950003310 U KR2019950003310 U KR 2019950003310U KR 19950003310 U KR19950003310 U KR 19950003310U KR 960029715 U KR960029715 U KR 960029715U
Authority
KR
South Korea
Prior art keywords
lighting system
line stepper
eye line
stepper lighting
eye
Prior art date
Application number
KR2019950003310U
Other languages
English (en)
Other versions
KR0132401Y1 (ko
Inventor
이승훈
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950003310U priority Critical patent/KR0132401Y1/ko
Publication of KR960029715U publication Critical patent/KR960029715U/ko
Application granted granted Critical
Publication of KR0132401Y1 publication Critical patent/KR0132401Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019950003310U 1995-02-27 1995-02-27 아이 라인 스텝퍼 조명계 KR0132401Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950003310U KR0132401Y1 (ko) 1995-02-27 1995-02-27 아이 라인 스텝퍼 조명계

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950003310U KR0132401Y1 (ko) 1995-02-27 1995-02-27 아이 라인 스텝퍼 조명계

Publications (2)

Publication Number Publication Date
KR960029715U true KR960029715U (ko) 1996-09-17
KR0132401Y1 KR0132401Y1 (ko) 1999-02-01

Family

ID=19408497

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950003310U KR0132401Y1 (ko) 1995-02-27 1995-02-27 아이 라인 스텝퍼 조명계

Country Status (1)

Country Link
KR (1) KR0132401Y1 (ko)

Also Published As

Publication number Publication date
KR0132401Y1 (ko) 1999-02-01

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Legal Events

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