KR960025423U - Wafer cassette support stage rocker device - Google Patents

Wafer cassette support stage rocker device

Info

Publication number
KR960025423U
KR960025423U KR2019940035952U KR19940035952U KR960025423U KR 960025423 U KR960025423 U KR 960025423U KR 2019940035952 U KR2019940035952 U KR 2019940035952U KR 19940035952 U KR19940035952 U KR 19940035952U KR 960025423 U KR960025423 U KR 960025423U
Authority
KR
South Korea
Prior art keywords
wafer cassette
support stage
cassette support
rocker device
stage rocker
Prior art date
Application number
KR2019940035952U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940035952U priority Critical patent/KR960025423U/en
Publication of KR960025423U publication Critical patent/KR960025423U/en

Links

KR2019940035952U 1994-12-26 1994-12-26 Wafer cassette support stage rocker device KR960025423U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035952U KR960025423U (en) 1994-12-26 1994-12-26 Wafer cassette support stage rocker device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035952U KR960025423U (en) 1994-12-26 1994-12-26 Wafer cassette support stage rocker device

Publications (1)

Publication Number Publication Date
KR960025423U true KR960025423U (en) 1996-07-22

Family

ID=60841081

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035952U KR960025423U (en) 1994-12-26 1994-12-26 Wafer cassette support stage rocker device

Country Status (1)

Country Link
KR (1) KR960025423U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination