KR960025331U - 웨이퍼건조를 위한 에어조정장치 - Google Patents

웨이퍼건조를 위한 에어조정장치

Info

Publication number
KR960025331U
KR960025331U KR2019940035948U KR19940035948U KR960025331U KR 960025331 U KR960025331 U KR 960025331U KR 2019940035948 U KR2019940035948 U KR 2019940035948U KR 19940035948 U KR19940035948 U KR 19940035948U KR 960025331 U KR960025331 U KR 960025331U
Authority
KR
South Korea
Prior art keywords
air conditioner
wafer drying
wafer
drying
conditioner
Prior art date
Application number
KR2019940035948U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940035948U priority Critical patent/KR960025331U/ko
Publication of KR960025331U publication Critical patent/KR960025331U/ko

Links

KR2019940035948U 1994-12-26 1994-12-26 웨이퍼건조를 위한 에어조정장치 KR960025331U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035948U KR960025331U (ko) 1994-12-26 1994-12-26 웨이퍼건조를 위한 에어조정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035948U KR960025331U (ko) 1994-12-26 1994-12-26 웨이퍼건조를 위한 에어조정장치

Publications (1)

Publication Number Publication Date
KR960025331U true KR960025331U (ko) 1996-07-22

Family

ID=60851141

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035948U KR960025331U (ko) 1994-12-26 1994-12-26 웨이퍼건조를 위한 에어조정장치

Country Status (1)

Country Link
KR (1) KR960025331U (ko)

Similar Documents

Publication Publication Date Title
DE69529710D1 (de) Klimaanlage
DE69517457D1 (de) Klimaanlage
DE69726107D1 (de) Klimagerät
DE69519494D1 (de) Klimaanlage
DE69503822D1 (de) Klimaanlage
DE69515243D1 (de) Klimaanlage
KR960008212A (ko) 공기 조화기
KR970010517U (ko) 공기조화기용 팬
ID18599A (id) Pendingin udara
KR960025331U (ko) 웨이퍼건조를 위한 에어조정장치
KR970050015U (ko) 공기조화기
KR960011826U (ko) 공기조화기
KR960005747U (ko) 공기조화기
KR960023973U (ko) 공기조화기
KR960015158U (ko) 자동차 에어컨의 건조기
KR970014517U (ko) 공기조화기용 팬
KR970003199U (ko) 반도체 제조장비의 에어블로워
KR960005741U (ko) 공기조화기
KR960002393U (ko) 공기 조절 장치
KR960024020U (ko) 공기조화기
KR950033887U (ko) 공기조화기
KR960018273U (ko) 에어콘
KR960015133U (ko) 공기조화기
KR960015110U (ko) 공기조화기
KR960011833U (ko) 공기조화기

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination