KR960025331U - 웨이퍼건조를 위한 에어조정장치 - Google Patents
웨이퍼건조를 위한 에어조정장치Info
- Publication number
- KR960025331U KR960025331U KR2019940035948U KR19940035948U KR960025331U KR 960025331 U KR960025331 U KR 960025331U KR 2019940035948 U KR2019940035948 U KR 2019940035948U KR 19940035948 U KR19940035948 U KR 19940035948U KR 960025331 U KR960025331 U KR 960025331U
- Authority
- KR
- South Korea
- Prior art keywords
- air conditioner
- wafer drying
- wafer
- drying
- conditioner
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940035948U KR960025331U (ko) | 1994-12-26 | 1994-12-26 | 웨이퍼건조를 위한 에어조정장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940035948U KR960025331U (ko) | 1994-12-26 | 1994-12-26 | 웨이퍼건조를 위한 에어조정장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960025331U true KR960025331U (ko) | 1996-07-22 |
Family
ID=60851141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940035948U KR960025331U (ko) | 1994-12-26 | 1994-12-26 | 웨이퍼건조를 위한 에어조정장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960025331U (ko) |
-
1994
- 1994-12-26 KR KR2019940035948U patent/KR960025331U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |