KR960024542A - Substrate Cleaning Method - Google Patents
Substrate Cleaning Method Download PDFInfo
- Publication number
- KR960024542A KR960024542A KR1019940040524A KR19940040524A KR960024542A KR 960024542 A KR960024542 A KR 960024542A KR 1019940040524 A KR1019940040524 A KR 1019940040524A KR 19940040524 A KR19940040524 A KR 19940040524A KR 960024542 A KR960024542 A KR 960024542A
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning method
- substrate cleaning
- liquid crystal
- crystal substrate
- vibrator
- Prior art date
Links
Landscapes
- Liquid Crystal (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
본 발명은 액정 기판 제조의 맨 처음 과정인 기판 세척에 관한 것으로 다양한 주파수를 발생시키는 진동자를 이용하여 기판을 세척함으로써, 먼지 및 오염물을 제거하고 생산성(yield)를 향상시킬 수 있는 기판 세척 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to substrate cleaning, which is the first step in the manufacture of liquid crystal substrates. will be.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2는 본 발명의 실시예에 따른 기판 세척 방법을 설명하기 위한 개략도 및 진동의 파형을 도시한 파형도.2 is a waveform diagram showing a schematic diagram and a waveform of vibration for explaining a substrate cleaning method according to an embodiment of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940040524A KR960024542A (en) | 1994-12-31 | 1994-12-31 | Substrate Cleaning Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940040524A KR960024542A (en) | 1994-12-31 | 1994-12-31 | Substrate Cleaning Method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960024542A true KR960024542A (en) | 1996-07-20 |
Family
ID=66648091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940040524A KR960024542A (en) | 1994-12-31 | 1994-12-31 | Substrate Cleaning Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960024542A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100670571B1 (en) * | 2000-05-10 | 2007-01-17 | 엘지.필립스 엘시디 주식회사 | Cleaning apparatus for array substrate for LCD |
-
1994
- 1994-12-31 KR KR1019940040524A patent/KR960024542A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100670571B1 (en) * | 2000-05-10 | 2007-01-17 | 엘지.필립스 엘시디 주식회사 | Cleaning apparatus for array substrate for LCD |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |