KR960024542A - Substrate Cleaning Method - Google Patents

Substrate Cleaning Method Download PDF

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Publication number
KR960024542A
KR960024542A KR1019940040524A KR19940040524A KR960024542A KR 960024542 A KR960024542 A KR 960024542A KR 1019940040524 A KR1019940040524 A KR 1019940040524A KR 19940040524 A KR19940040524 A KR 19940040524A KR 960024542 A KR960024542 A KR 960024542A
Authority
KR
South Korea
Prior art keywords
substrate cleaning
liquid crystal
crystal substrate
vibrator
cleaning
Prior art date
Application number
KR1019940040524A
Other languages
Korean (ko)
Inventor
이진영
Original Assignee
엄길용
오리온전기 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엄길용, 오리온전기 주식회사 filed Critical 엄길용
Priority to KR1019940040524A priority Critical patent/KR960024542A/en
Publication of KR960024542A publication Critical patent/KR960024542A/en

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Abstract

본 발명은 액정 기판 제조의 맨 처음 과정인 기판 세척에 관한 것으로 다양한 주파수를 발생시키는 진동자를 이용하여 기판을 세척함으로써, 먼지 및 오염물을 제거하고 생산성(yield)를 향상시킬 수 있는 기판 세척 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to substrate cleaning, which is the first step in the manufacture of liquid crystal substrates. will be.

Description

기판 세척 방법Substrate Cleaning Method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2는 본 발명의 실시예에 따른 기판 세척 방법을 설명하기 위한 개략도 및 진동의 파형을 도시한 파형도.2 is a waveform diagram showing a schematic diagram and a waveform of vibration for explaining a substrate cleaning method according to an embodiment of the present invention.

Claims (1)

세척액이 수용되어 있는 수조에 액정기판을 담구고 진동자를 사용하여 예정된 주파수의 진동을 가하여 오염물을 제거하는 액정기판세척방법에 있어서, 상기 진동자를 다향한 진동이 발생되는 가변복주파수 진동자를 사용하여 세척하는 것을 특징으로 하는 기판 세척 방법.A liquid crystal substrate cleaning method in which a liquid crystal substrate is immersed in a tank containing a washing liquid and a vibration is applied using a vibrator to remove contaminants. The liquid crystal substrate is cleaned using a variable double frequency vibrator for generating vibrations for various vibrators. Substrate cleaning method, characterized in that. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940040524A 1994-12-31 1994-12-31 Substrate Cleaning Method KR960024542A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940040524A KR960024542A (en) 1994-12-31 1994-12-31 Substrate Cleaning Method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940040524A KR960024542A (en) 1994-12-31 1994-12-31 Substrate Cleaning Method

Publications (1)

Publication Number Publication Date
KR960024542A true KR960024542A (en) 1996-07-20

Family

ID=66648091

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940040524A KR960024542A (en) 1994-12-31 1994-12-31 Substrate Cleaning Method

Country Status (1)

Country Link
KR (1) KR960024542A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100670571B1 (en) * 2000-05-10 2007-01-17 엘지.필립스 엘시디 주식회사 Cleaning apparatus for array substrate for LCD

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100670571B1 (en) * 2000-05-10 2007-01-17 엘지.필립스 엘시디 주식회사 Cleaning apparatus for array substrate for LCD

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