KR960024381U - Wafer exposure apparatus with light transmittance measuring means - Google Patents

Wafer exposure apparatus with light transmittance measuring means

Info

Publication number
KR960024381U
KR960024381U KR2019940037366U KR19940037366U KR960024381U KR 960024381 U KR960024381 U KR 960024381U KR 2019940037366 U KR2019940037366 U KR 2019940037366U KR 19940037366 U KR19940037366 U KR 19940037366U KR 960024381 U KR960024381 U KR 960024381U
Authority
KR
South Korea
Prior art keywords
light transmittance
exposure apparatus
measuring means
wafer exposure
transmittance measuring
Prior art date
Application number
KR2019940037366U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940037366U priority Critical patent/KR960024381U/en
Publication of KR960024381U publication Critical patent/KR960024381U/en

Links

KR2019940037366U 1994-12-29 1994-12-29 Wafer exposure apparatus with light transmittance measuring means KR960024381U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940037366U KR960024381U (en) 1994-12-29 1994-12-29 Wafer exposure apparatus with light transmittance measuring means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940037366U KR960024381U (en) 1994-12-29 1994-12-29 Wafer exposure apparatus with light transmittance measuring means

Publications (1)

Publication Number Publication Date
KR960024381U true KR960024381U (en) 1996-07-22

Family

ID=60850204

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940037366U KR960024381U (en) 1994-12-29 1994-12-29 Wafer exposure apparatus with light transmittance measuring means

Country Status (1)

Country Link
KR (1) KR960024381U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980051522A (en) * 1996-12-23 1998-09-15 김영환 Transmittance Measurement Method of Halftone Phase Inversion Mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980051522A (en) * 1996-12-23 1998-09-15 김영환 Transmittance Measurement Method of Halftone Phase Inversion Mask

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination