KR960019955A - Position detector for linear stepping motor drive - Google Patents

Position detector for linear stepping motor drive Download PDF

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Publication number
KR960019955A
KR960019955A KR1019940031234A KR19940031234A KR960019955A KR 960019955 A KR960019955 A KR 960019955A KR 1019940031234 A KR1019940031234 A KR 1019940031234A KR 19940031234 A KR19940031234 A KR 19940031234A KR 960019955 A KR960019955 A KR 960019955A
Authority
KR
South Korea
Prior art keywords
light
stepping motor
linear stepping
position detector
glass
Prior art date
Application number
KR1019940031234A
Other languages
Korean (ko)
Other versions
KR0151009B1 (en
Inventor
남수근
Original Assignee
이대원
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이대원, 삼성항공산업 주식회사 filed Critical 이대원
Priority to KR1019940031234A priority Critical patent/KR0151009B1/en
Priority to US08/547,731 priority patent/US5653375A/en
Priority to JP30513995A priority patent/JP3672366B2/en
Priority to CN95118532A priority patent/CN1065788C/en
Publication of KR960019955A publication Critical patent/KR960019955A/en
Application granted granted Critical
Publication of KR0151009B1 publication Critical patent/KR0151009B1/en

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P21/00—Arrangements or methods for the control of electric machines by vector control, e.g. by control of field orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/788—Means for moving parts
    • H01L2224/78801—Lower part of the bonding apparatus, e.g. XY table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01039—Yttrium [Y]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19042—Component type being an inductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

선형스텝핑모터 구동용 위치검출기가 개시되어 있다.A position detector for driving a linear stepping motor is disclosed.

이 개시된 위치검출기는 광원과, 회전자에 설치된 엔코딩글래스와, 수광부로 이루어져 있다. 이 수광부는 엔코딩글래스에 의해 반사된 광을 수광하는 광검출수단과, 광원에서 출사되어 상기 엔코딩글래스로 향하는 광량을 제어하는 포토글래스로 이루어져 있다. 상기 포토글래스는 복수개의 분할판을 가지며, 각 분할판에는 복수개의 스트라이프형 미러가 배열되어 있다. 각 분할판에 형성된 이 스트라이프형 미러들은 일정 간격으로 이격 배치되어 있고, 일 피치(pitch)동안 각 분할판을 투과한 광량이 상기 엔코딩 글래스와의 위치관계에 따라 반사되어 수광될때 시간에 따라 정현파를 이루도록 되어 있다. 각 광검출수단에서 검출된 정현파로 변화하는 광량의 관계를 파악하여 인덕터의 위치를 마이크로미터 단위까지 파악할 수 있고, 이에 따라 스텝핑 모터를 구동할 수 있다.The disclosed position detector consists of a light source, an encoding glass installed in a rotor, and a light receiving unit. The light receiving unit includes photodetecting means for receiving light reflected by the encoding glass, and photoglass for controlling the amount of light emitted from the light source and directed to the encoding glass. The photoglass has a plurality of dividers, and a plurality of stripe mirrors are arranged in each divider. The stripe-shaped mirrors formed on each of the dividers are spaced at regular intervals, and the amount of light transmitted through each of the dividers during one pitch is reflected and received according to the positional relationship with the encoding glass. It is to be accomplished. The position of the inductor can be grasped to the micrometer unit by grasping the relationship of the amount of light that changes with the sine wave detected by each light detecting means, thereby driving the stepping motor.

Description

선형스텝핑모터 구동용 위치검출기Position detector for linear stepping motor drive

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 종래의 레이저 간섭계를 이용한 위치검출기의 구조를 나타낸 사시도,1 is a perspective view showing the structure of a position detector using a conventional laser interferometer,

제2도는 본 발명에 따른 선형 스텝핑모터 구동용 위치 검출기의 구성을 나타낸 사시도,2 is a perspective view showing the configuration of a position detector for driving a linear stepping motor according to the present invention;

제4도는 제2도의 포토 글래스(Photo glass)를 나타낸 확대 단면도.4 is an enlarged cross-sectional view showing the photo glass of FIG.

Claims (4)

균일 평면을 가지는 고정자와, 수평운동력을 제공하는 선형스텝핑모터와, 상기 고정자의 균일 평면 상에 위치되고 상기 선형스텝핑모터의 구동축에 일측이 결합된 인덕터와, 상기 인덕터의 위치를 검출하기 위한 위치 검출수단이 구비된 선형스텝핑모터 구동용 위치검출기에 있어서, 상기 위치검출수단으로 상기 고정자 상부에 위치된 광원과, 상기 인덕터의 일측에 마련되어 상기 광원으로부터 입사되는 광은 반사하는 복수개의 미러조합으로 이루어진 엔코딩(encoding)글래스와, 이 엔코딩글래스에서 반사된 광을 수광하는 수광부가 구비된 것을 특징으로 하는 선형스텝핑모터 구동용 위치검출기.A stator having a uniform plane, a linear stepping motor providing horizontal kinetic force, an inductor located on a uniform plane of the stator and coupled to a drive shaft of the linear stepping motor, and a position detection for detecting the position of the inductor A position detecting device for driving a linear stepping motor provided with means, comprising: a light source positioned above the stator by the position detecting means, and a plurality of mirror combinations provided on one side of the inductor to reflect light incident from the light source (encoding) A glass and a light detector for receiving the light reflected by the encoding glass is provided, the linear stepping motor drive position detector. 제1항에 있어서, 상기 수광부는 상기 엔코딩글래스에서 반사된 광을 일부 통과 일부 반사시키는 포토글래스와, 이 포토글래스를 통과한 광을 수광하는 광검출수단으로 이루어진 것을 특징으로 하는 선형스텝핑모터 구동용 위치검출기.The linear stepping motor driving apparatus according to claim 1, wherein the light receiving unit comprises a photo glass which partially reflects the light reflected by the encoding glass and a light detecting means which receives the light passing through the photo glass. Position detector. 제2항에 있어서, 상기 포토글래스는 복수개의 분할판으로 이루어지고, 이 복수개의 분할판 각각은 입사되는 광의 일부를 반사하도록 소정 간격을 가지고 나열된 복수개의 스트라이프형 미러를 포함하는 것을 특징으로 하는 선형스텝핑모터 구동용 위치검출기.3. The linear arrangement according to claim 2, wherein the photoglass comprises a plurality of dividers, each of which includes a plurality of stripe mirrors arranged at predetermined intervals to reflect a portion of incident light. Position detector for stepping motor drive. 제2항 또는 제3항에 있어서, 상기 포토글래스를 이루는 분할판이 4분할되고, 이 분할판 각각을 통과한 후 상기 광검출수단에 수광되는 광량의 시간에 따른 변화율이 각각 90도의 위상차를 보이는 것을 특징으로 하는 선형스텝핑모터 구동용 위치검출기.4. The method according to claim 2 or 3, wherein the partition plates forming the photoglass are divided into four, and the rate of change of the amount of light received by the light detecting means after passing through each of the partition plates shows a phase difference of 90 degrees. Position detector for driving a linear stepping motor. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940031234A 1994-10-29 1994-11-25 Position detection apparatus for x-y table KR0151009B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019940031234A KR0151009B1 (en) 1994-11-25 1994-11-25 Position detection apparatus for x-y table
US08/547,731 US5653375A (en) 1994-10-29 1995-10-26 Wire bonding apparatus
JP30513995A JP3672366B2 (en) 1994-10-29 1995-10-30 Wire bonding equipment
CN95118532A CN1065788C (en) 1994-10-29 1995-10-30 Wire bonding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940031234A KR0151009B1 (en) 1994-11-25 1994-11-25 Position detection apparatus for x-y table

Publications (2)

Publication Number Publication Date
KR960019955A true KR960019955A (en) 1996-06-17
KR0151009B1 KR0151009B1 (en) 1998-12-15

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ID=19399020

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940031234A KR0151009B1 (en) 1994-10-29 1994-11-25 Position detection apparatus for x-y table

Country Status (1)

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KR (1) KR0151009B1 (en)

Also Published As

Publication number Publication date
KR0151009B1 (en) 1998-12-15

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