KR960015607U - Vertical vacuum furnace - Google Patents

Vertical vacuum furnace

Info

Publication number
KR960015607U
KR960015607U KR2019940028305U KR19940028305U KR960015607U KR 960015607 U KR960015607 U KR 960015607U KR 2019940028305 U KR2019940028305 U KR 2019940028305U KR 19940028305 U KR19940028305 U KR 19940028305U KR 960015607 U KR960015607 U KR 960015607U
Authority
KR
South Korea
Prior art keywords
vacuum furnace
vertical vacuum
vertical
furnace
vacuum
Prior art date
Application number
KR2019940028305U
Other languages
Korean (ko)
Other versions
KR0117710Y1 (en
Inventor
김성철
최장섭
김명원
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940028305U priority Critical patent/KR0117710Y1/en
Publication of KR960015607U publication Critical patent/KR960015607U/en
Application granted granted Critical
Publication of KR0117710Y1 publication Critical patent/KR0117710Y1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019940028305U 1994-10-28 1994-10-28 Electric furnace of vertical type KR0117710Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940028305U KR0117710Y1 (en) 1994-10-28 1994-10-28 Electric furnace of vertical type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940028305U KR0117710Y1 (en) 1994-10-28 1994-10-28 Electric furnace of vertical type

Publications (2)

Publication Number Publication Date
KR960015607U true KR960015607U (en) 1996-05-17
KR0117710Y1 KR0117710Y1 (en) 1998-06-01

Family

ID=19396651

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940028305U KR0117710Y1 (en) 1994-10-28 1994-10-28 Electric furnace of vertical type

Country Status (1)

Country Link
KR (1) KR0117710Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100339846B1 (en) * 1999-05-13 2002-06-07 윤종용 The semiconductor element manufacture for process tube

Also Published As

Publication number Publication date
KR0117710Y1 (en) 1998-06-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
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Payment date: 20090121

Year of fee payment: 12

EXPY Expiration of term