KR960015398A - Apparatus and coating method for coating diamond-like carbon on VTR head drums, and VTR head drums coated with diamond-like carbon - Google Patents

Apparatus and coating method for coating diamond-like carbon on VTR head drums, and VTR head drums coated with diamond-like carbon Download PDF

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KR960015398A
KR960015398A KR1019940025441A KR19940025441A KR960015398A KR 960015398 A KR960015398 A KR 960015398A KR 1019940025441 A KR1019940025441 A KR 1019940025441A KR 19940025441 A KR19940025441 A KR 19940025441A KR 960015398 A KR960015398 A KR 960015398A
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South Korea
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carbon
diamond
sio
coating
cathode
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KR1019940025441A
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Korean (ko)
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KR0139395B1 (en
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이태영
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민병성
삼신정밀 주식회사
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B15/00—Driving, starting or stopping record carriers of filamentary or web form; Driving both such record carriers and heads; Guiding such record carriers or containers therefor; Control thereof; Control of operating function
    • G11B15/60—Guiding record carrier
    • G11B15/61—Guiding record carrier on drum, e.g. drum containing rotating heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B15/00—Driving, starting or stopping record carriers of filamentary or web form; Driving both such record carriers and heads; Guiding such record carriers or containers therefor; Control thereof; Control of operating function
    • G11B15/60—Guiding record carrier
    • G11B15/66—Threading; Loading; Automatic self-loading
    • G11B15/665—Threading; Loading; Automatic self-loading by extracting loop of record carrier from container
    • G11B15/6653—Threading; Loading; Automatic self-loading by extracting loop of record carrier from container to pull the record carrier against drum
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/52—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with simultaneous movement of head and record carrier, e.g. rotation of head
    • G11B5/53—Disposition or mounting of heads on rotating support

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  • Physical Vapour Deposition (AREA)

Abstract

본 발명은 VTR헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치 및 코팅하는 방법 그리고 다이아몬드상이 코팅되어 있는 Al제 VTR 헤드드럼에 관한 것이다.The present invention relates to an apparatus for coating diamond-like carbon on a VTR head drum, a method for coating the same, and an Al-based VTR head drum coated with a diamond phase.

본 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치는 내부측면에 Ar, SiO, Ti, 카본 등을 증발시키기 위한 다수의 케소드가 형성되고 하부중앙에 축이 형성된 진공탱크와, 상기 진공탱크의 축에 장착되는 VTR 헤드드럼지지대로 구성된다.The apparatus for coating diamond-like carbon on the VTR head drum includes a vacuum tank having a plurality of cathodes formed thereon for evaporating Ar, SiO, Ti, carbon, etc. on the inner side thereof, and a shaft formed in the lower center thereof. It consists of a VTR head drum support mounted on the shaft.

Description

VTR헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치 및 코팅방법 그리고 다이아몬드상 카본이 코팅되어 있는 VTR 헤드드럼Apparatus and coating method for coating diamond-like carbon on VTR head drums, and VTR head drums coated with diamond-like carbon

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명장치의 사시도,1 is a perspective view of the apparatus of the present invention,

제2도는 본 발명의 평면도,2 is a plan view of the present invention,

제3도는 본 발명장치와 정단면도.3 is a cross-sectional view of the present invention and the device.

Claims (15)

내부측면에 Ar, SiO, Ti, 카본 등을 증발시키기 위한 다수의 캐소드가 형성되고 하부중앙에 축이 형성된 진공탱크와, 상기 진공탱크의 축에 장착되는 VTR 헤드드럼지지대료 구성되어 있는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치.A plurality of cathodes for evaporating Ar, SiO, Ti, carbon, etc. are formed on the inner side thereof, and a vacuum tank having a shaft formed in the lower center thereof, and a VTR head drum support material mounted on the shaft of the vacuum tank are characterized in that they are configured. Apparatus for coating diamond-like carbon on the VTR head drum. 제1항에 있어서, 상기 VTR 헤드드럼지지대는 상하부지지틀과 다수의 헤드지지봉으로 구성되어 있으며, 상하부지지틀과 헤드지지봉은 각각 자전하도록 된 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치.The method of claim 1, wherein the VTR head drum support is composed of a top and bottom support frame and a plurality of head support rods, the top and bottom support frame and the head support rods are coated with diamond-like carbon on the VTR head drum, characterized in that each rotating Device for. 제1항에 있어서, Ar 케소드는 탱크 측면에 설치되고, Ti 케소드는 서로 대향하게 설치되고, SiO 케소드는 탱크 천정 중앙에 설치되고, 카본 케소드는 측면 상부와 대각선을 이루는 하부에 각각 하나씩 설치되는 것을 특징으로 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치.The method according to claim 1, wherein the Ar cathode is installed on the side of the tank, the Ti cathode is disposed opposite to each other, the SiO cathode is installed at the center of the tank ceiling, and the carbon cathode is located at the lower side diagonally with the top of the side. Apparatus for coating diamond-like carbon on the VTR head drum, characterized in that installed one by one. 제1항에 있어서, 상기 Ar, SiO, Ti, DLC 케소드를 사용하여 물리증착(PVD)ARC방법으로 코팅하는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치.The apparatus of claim 1, wherein the Ar, SiO, Ti, DLC cathode is coated by physical vapor deposition (PVD) ARC method. 제1항에 있어서, 상기 진공탱크는 하부에 장착된 진공펌프에 의해 진공화 되는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치.2. The apparatus of claim 1, wherein the vacuum tank is evacuated by a vacuum pump mounted on the bottom thereof. 제3항에 있어서, 상기 SiO케소드는 측면에 구멍이 다수 뚫린 Mo으로 제조된 관상인 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본을 코팅하기 위한 장치.4. The apparatus of claim 3, wherein the SiO cathode is tubular made of Mo having a large number of holes in the side surface. Al 헤드드럼을 진공탱크에 넣고 진공도를 1.5×10-4~1.5×10-6Torr로 조정하는 제1단계와, Ar 케소드에서 Ar+이온을 발생시켜 드럼표면을 세정하는 제2단계와, Ti 케소드에서 Ti을 증발시켜 제2단계에서 세정된 드럼표면에 Ti박막층을 형성하는 제3단계와, SiO 케소드에서 SiO를 증발시켜 제3단계에서 형성된 Ti 박막층에 SiO 박막층을 형성하는 제4단계와, Ti 케소드에서 Ti을 증발시켜 제4단계에서 형성된 SiO 박막층 위에 Ti 박막층을 형성하는 제5단계와 카본 케소드에서 카본을 증발시켜 제5단계에서 형성된 Ti 박막층 위에 다이아몬드상 카본(DLC)박막을 형성하는 제6단계로 구성되는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본(DLC) 코팅하는 방법.A first step of placing the Al head drum in a vacuum tank and adjusting the degree of vacuum to 1.5 × 10 -4 to 1.5 × 10 -6 Torr, a second step of generating Ar + ions from the Ar cathode to clean the drum surface, A third step of forming a Ti thin film layer on the surface of the drum cleaned in the second step by evaporating Ti from the Ti cathode; and a fourth step of forming a SiO thin film layer in the Ti thin film layer formed in the third step by evaporating SiO from the SiO cathode Diamond phase carbon (DLC) on the Ti thin film layer formed in the fifth step by forming a Ti thin film layer on the SiO thin film layer formed in the fourth step by evaporating Ti from the Ti cathode and the carbon cathode Method of coating a diamond-like carbon (DLC) to the VTR head drum, characterized in that the sixth step of forming a thin film. 제7항에 있어서, 상기 제3단계와 제4단계 사이에 그리고 제4단계와 제5단계 사이에 1∼5분간의 휴지시간을 갖는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본(DLC) 코팅하는 방법.8. The diamond-like carbon (DLC) coating of the VTR head drum according to claim 7, wherein the VTR head drum has a downtime of 1 to 5 minutes between the third and fourth steps and between the fourth and fifth steps. How to. 제7항에 있어서, 상기 제2단계의 Ti 박막층을 2∼20분간 증발시켜서 50Å∼3㎛의 두께로 형성하는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본(DLC) 코팅하는 방법.The method of claim 7, wherein the Ti thin film layer of the second step is evaporated for 2 to 20 minutes to form a thickness of 50 ~ 3㎛ diamond diamond carbon (DLC) coating method. 제7항에 있어서, 상기 제3단계의 SiO 박막층을 1~30분간 증발시켜서 200Å-2㎛의 두께로 형성하는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본(DLC) 코팅하는 방법.8. The method of claim 7, wherein the third thin SiO film layer is evaporated for 1 to 30 minutes to form a thickness of 200 Å-2 占 퐉. 제7항에 있어서, 상기 제4단계의 Ti 박막층을 1~30분간 증발시켜서 50Å-3㎛의 두께로 형성하는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본(DLC) 코팅하는 방법.[8] The method of claim 7, wherein the Ti thin film layer of the fourth step is evaporated for 1 to 30 minutes to form a thickness of 50 μm-3 μm. 제7항에 있어서, 상기 제5단계의 DLC 박막층을 10∼120분간 증발시켜서 50Å~3㎛의 두께로 형성하는 것을 특징으로 하는 VTR 헤드드럼에 다이아몬드상 카본(DLC) 코팅하는 방법.[8] The method of claim 7, wherein the DLC thin film layer of the fifth step is evaporated for 10 to 120 minutes to form a thickness of 50 μm to 3 μm. 제7항에 있어서, 사기 SiO 코팅층 두께를 조절하여 색상을 변화시키는 것을 특징으로 하는 VTR 헤드드럼에 다이나몬드상 카본(DLC) 코팅하는 방법.8. The method of claim 7, wherein the color of the frying SiO coating layer is adjusted to change color. Al 기재에 Ti, SiO, Ti, 다이아몬드상 카본(DLC)가 순차적으로 코팅되어 있는 것을 특징으로 하는 VTR 헤드드럼.A VTR head drum characterized by sequentially coating Ti, SiO, Ti, and diamond-like carbon (DLC) on an Al substrate. 제14항에 있어서, 상기 Ti 코팅층은 50Å∼3㎛, SiO 코팅층은 200Å∼2㎛, 다이몬드상 카본(DLC) 코팅층은 50Å~3㎛인 것을 특징으로 하는 VTR Al 헤드드럼.15. The VTR Al head drum according to claim 14, wherein the Ti coating layer is 50 m 3 to 3 m, the SiO coating layer is 200 m 2 to 2 m, and the diamond-like carbon (DLC) coating layer is 50 m 3 to 3 m. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940025441A 1994-10-05 1994-10-05 Method of coating diamond like carbon to vtr headdrum and the coated vtr head drum KR0139395B1 (en)

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KR1019940025441A KR0139395B1 (en) 1994-10-05 1994-10-05 Method of coating diamond like carbon to vtr headdrum and the coated vtr head drum

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KR1019940025441A KR0139395B1 (en) 1994-10-05 1994-10-05 Method of coating diamond like carbon to vtr headdrum and the coated vtr head drum

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KR960015398A true KR960015398A (en) 1996-05-22
KR0139395B1 KR0139395B1 (en) 1998-07-15

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