KR960012667U - Gas line connection device - Google Patents

Gas line connection device

Info

Publication number
KR960012667U
KR960012667U KR2019940024784U KR19940024784U KR960012667U KR 960012667 U KR960012667 U KR 960012667U KR 2019940024784 U KR2019940024784 U KR 2019940024784U KR 19940024784 U KR19940024784 U KR 19940024784U KR 960012667 U KR960012667 U KR 960012667U
Authority
KR
South Korea
Prior art keywords
connection device
gas line
line connection
gas
line
Prior art date
Application number
KR2019940024784U
Other languages
Korean (ko)
Other versions
KR200190786Y1 (en
Inventor
김기성
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940024784U priority Critical patent/KR200190786Y1/en
Publication of KR960012667U publication Critical patent/KR960012667U/en
Application granted granted Critical
Publication of KR200190786Y1 publication Critical patent/KR200190786Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
KR2019940024784U 1994-09-26 1994-09-26 Gas line connection apparatus KR200190786Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940024784U KR200190786Y1 (en) 1994-09-26 1994-09-26 Gas line connection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940024784U KR200190786Y1 (en) 1994-09-26 1994-09-26 Gas line connection apparatus

Publications (2)

Publication Number Publication Date
KR960012667U true KR960012667U (en) 1996-04-17
KR200190786Y1 KR200190786Y1 (en) 2000-09-01

Family

ID=19393955

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940024784U KR200190786Y1 (en) 1994-09-26 1994-09-26 Gas line connection apparatus

Country Status (1)

Country Link
KR (1) KR200190786Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100478831B1 (en) * 2002-11-22 2005-03-25 주식회사 수림 Gas connection device for a semiconductor processing

Also Published As

Publication number Publication date
KR200190786Y1 (en) 2000-09-01

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20080425

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee