KR960012664U - Automatic purging device for process gas supply line - Google Patents

Automatic purging device for process gas supply line

Info

Publication number
KR960012664U
KR960012664U KR2019940025095U KR19940025095U KR960012664U KR 960012664 U KR960012664 U KR 960012664U KR 2019940025095 U KR2019940025095 U KR 2019940025095U KR 19940025095 U KR19940025095 U KR 19940025095U KR 960012664 U KR960012664 U KR 960012664U
Authority
KR
South Korea
Prior art keywords
supply line
gas supply
process gas
purging device
automatic purging
Prior art date
Application number
KR2019940025095U
Other languages
Korean (ko)
Other versions
KR200168402Y1 (en
Inventor
성원호
김경태
마경수
이차행
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940025095U priority Critical patent/KR200168402Y1/en
Publication of KR960012664U publication Critical patent/KR960012664U/en
Application granted granted Critical
Publication of KR200168402Y1 publication Critical patent/KR200168402Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4272—Special valve constructions adapted to filters or filter elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019940025095U 1994-09-28 1994-09-28 Automatic purging apparatus for pipe line KR200168402Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940025095U KR200168402Y1 (en) 1994-09-28 1994-09-28 Automatic purging apparatus for pipe line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940025095U KR200168402Y1 (en) 1994-09-28 1994-09-28 Automatic purging apparatus for pipe line

Publications (2)

Publication Number Publication Date
KR960012664U true KR960012664U (en) 1996-04-17
KR200168402Y1 KR200168402Y1 (en) 2000-02-01

Family

ID=19394188

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940025095U KR200168402Y1 (en) 1994-09-28 1994-09-28 Automatic purging apparatus for pipe line

Country Status (1)

Country Link
KR (1) KR200168402Y1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100313601B1 (en) * 1998-12-19 2002-03-21 김영환 Process gas supply device for semiconductor manufacturing
KR20210156216A (en) * 2020-06-17 2021-12-24 도쿄엘렉트론가부시키가이샤 Substrate processing apparatus and method of purging gas supply pipes

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4124838B2 (en) * 1996-04-26 2008-07-23 株式会社神戸製鋼所 Pressure gas supply device
KR200446431Y1 (en) 2007-11-14 2009-10-28 현대제철 주식회사 Apparatus of preventing dew condensation of local panel in rolling facilities

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100313601B1 (en) * 1998-12-19 2002-03-21 김영환 Process gas supply device for semiconductor manufacturing
KR20210156216A (en) * 2020-06-17 2021-12-24 도쿄엘렉트론가부시키가이샤 Substrate processing apparatus and method of purging gas supply pipes

Also Published As

Publication number Publication date
KR200168402Y1 (en) 2000-02-01

Similar Documents

Publication Publication Date Title
DE69826171D1 (en) Process gas supply device
DK0871838T3 (en) Holds for a wick
GB2289326B (en) Device for carrying out a combustion process
NO963643D0 (en) Automatic clamping device
SG83675A1 (en) Apparatus for supporting pipes
DE69720864D1 (en) Device for pipe welding inspection
DE69911217D1 (en) MOVABLE DEVICE FOR AUTOMATIC TUBE WELDING
DE69532054D1 (en) Hose for gas transportation
DE59305051D1 (en) Device for changing the wrap
EP0718058A4 (en) Replacing device for immersion nozzles
DE69634199D1 (en) AUTOMATIC DEVICE FOR MELT CONNECTION
NO962794D0 (en) Electro-fishing apparatus
EP0704237A3 (en) Device for introducing gas
KR960012664U (en) Automatic purging device for process gas supply line
DE59603548D1 (en) Holding device for pipes
ATA235994A (en) SHUT-OFF DEVICE FOR A GAS SUPPLY PIPE
KR960025294U (en) Gas supply device for diffusion process
KR970047029U (en) Automatic can supply device for batteries
KR960017585U (en) Repairing device for furnace exit
IL117543A0 (en) Apparatus for automatically stopping flow into gas cylinders
KR970010325U (en) Oxygen Supply Device for Combustion
KR980004022U (en) Gas pipe holder
KR970008329U (en) Hose welding device for oxygen acetylene welding machine
KR960008965U (en) DEVICE FOR AUTOMATICALLY RECOGNZING OPERATION OF HEAT-PROOF
GB2302155B (en) Apparatus for in-pipe use

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20081027

Year of fee payment: 10

EXPY Expiration of term