KR960011993U - 현상용액 분사장치 - Google Patents
현상용액 분사장치Info
- Publication number
- KR960011993U KR960011993U KR2019940025818U KR19940025818U KR960011993U KR 960011993 U KR960011993 U KR 960011993U KR 2019940025818 U KR2019940025818 U KR 2019940025818U KR 19940025818 U KR19940025818 U KR 19940025818U KR 960011993 U KR960011993 U KR 960011993U
- Authority
- KR
- South Korea
- Prior art keywords
- injection device
- developer solution
- solution injection
- developer
- solution
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940025818U KR0120383Y1 (ko) | 1994-09-30 | 1994-09-30 | 현상용액 분사장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940025818U KR0120383Y1 (ko) | 1994-09-30 | 1994-09-30 | 현상용액 분사장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960011993U true KR960011993U (ko) | 1996-04-17 |
KR0120383Y1 KR0120383Y1 (ko) | 1998-07-15 |
Family
ID=19394734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940025818U KR0120383Y1 (ko) | 1994-09-30 | 1994-09-30 | 현상용액 분사장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0120383Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100512093B1 (ko) * | 1998-04-30 | 2005-11-01 | 삼성전자주식회사 | 반도체 식각장치용 나이프형 샤워장치 |
-
1994
- 1994-09-30 KR KR2019940025818U patent/KR0120383Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0120383Y1 (ko) | 1998-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
LAPS | Lapse due to unpaid annual fee |