KR960010060B1 - Contact forming method of semiconductor device - Google Patents
Contact forming method of semiconductor device Download PDFInfo
- Publication number
- KR960010060B1 KR960010060B1 KR92027305A KR920027305A KR960010060B1 KR 960010060 B1 KR960010060 B1 KR 960010060B1 KR 92027305 A KR92027305 A KR 92027305A KR 920027305 A KR920027305 A KR 920027305A KR 960010060 B1 KR960010060 B1 KR 960010060B1
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- forming method
- contact forming
- metal
- junction layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92027305A KR960010060B1 (en) | 1992-12-31 | 1992-12-31 | Contact forming method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR92027305A KR960010060B1 (en) | 1992-12-31 | 1992-12-31 | Contact forming method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940016505A KR940016505A (ko) | 1994-07-23 |
KR960010060B1 true KR960010060B1 (en) | 1996-07-25 |
Family
ID=19348454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR92027305A KR960010060B1 (en) | 1992-12-31 | 1992-12-31 | Contact forming method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960010060B1 (ko) |
-
1992
- 1992-12-31 KR KR92027305A patent/KR960010060B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR940016505A (ko) | 1994-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
G160 | Decision to publish patent application | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20080619 Year of fee payment: 13 |
|
LAPS | Lapse due to unpaid annual fee |