KR960009284Y1 - Structure of a spin dryer - Google Patents
Structure of a spin dryer Download PDFInfo
- Publication number
- KR960009284Y1 KR960009284Y1 KR2019900020081U KR900020081U KR960009284Y1 KR 960009284 Y1 KR960009284 Y1 KR 960009284Y1 KR 2019900020081 U KR2019900020081 U KR 2019900020081U KR 900020081 U KR900020081 U KR 900020081U KR 960009284 Y1 KR960009284 Y1 KR 960009284Y1
- Authority
- KR
- South Korea
- Prior art keywords
- cradle
- spin dryer
- present
- teflon
- perspective
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
Abstract
내용 없음.No content.
Description
제1도는 종래의 5스핀드라이어에서 4용으로 변경할 경우에 사용되는 크레이들과 로타의 사시도.1 is a perspective view of a cradle and a rota used when changing from a conventional five-spin dryer to four.
제2도는 크레이들에 삽입되는 테프론 캐리어의 사시도.2 is a perspective view of a teflon carrier inserted into a cradle.
제3도는 종래 크레이들의 사시도.3 is a perspective view of a conventional cradle.
제4도는 본 고안의 구성에 의한 크레이들의 사시도.Figure 4 is a perspective view of the cradle according to the configuration of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
4,5,6 : 축 7,7' : 크레이들4,5,6 Axis 7,7 ': Cradle
8 : 테프론 캐리어8: teflon carrier
본 고안은 스핀드라이어(Spin Dryer)에 관한 것으로, 특히 일본 유키(Yuki)에서 제작한 모델FA-7SRT을 4공용으로 사용가능토록한 스핀드라이어의 크레이들 구조에 관한 것이다.The present invention relates to a spin dryer, and more particularly, to a cradle structure of a spin dryer in which a model FA-7SRT manufactured by Yuki, Japan, can be used for four uses.
종래에는 5용을 4용으로 사용하기 위해서는 제1도에 도시한 바와같은 크레이들(1) 2개와 로타(2) 1개를 수입하여 조립하여야 4용으로 변환이 가능하다.Conventionally, in order to use five dragons for four, two cradles (1) and one rota (2) as shown in FIG.
이와같은 조립은 제3도에 도시한 크레이들(7)에 제2도에 도시한 테프론 캐리어(8)를 담아 스핀드라이어에 장착하여 웨이퍼를 건조시킨다.In this assembly, the cradle 7 shown in FIG. 3 is loaded with the teflon carrier 8 shown in FIG. 2 and mounted in a spin dryer to dry the wafer.
그러나 이와같은 부품의 조립 방식은 각 부품의 비용이 즉 크레이들(1)과 로타(2)의 비용이 비싸고 설치가 불편하므로 바람직하지 못하다는 단점이 있다. 본 고안은 이를 해결토록 안출된 것으로 이하 상술한다.However, the assembly method of such components is disadvantageous because the cost of each component, that is, the cost of the cradle (1) and the rota (2) is expensive and inconvenient to install. The present invention has been devised to solve this problem.
본 고안은 제5용 크레이들을 수정하여 4용으로 공용하여 사용하도록 함에 있어 제3도의 크레이들(7')에 3쌍의 축(4,5,6)를 가로지르게 용접하여 4용 테프론 캐리어에 맞게 개조함으로서 정밀 기계인 스핀드라이를 새로 도입하거나 크레이들 및 로타를 도입하지 않고도 5용 스핀드라이어를 4용으로 쉽게 사용가능하다.In the present invention, the fifth cradle is modified to be shared and used for four, so that three pairs of shafts 4, 5, and 6 are traversely welded to the cradle 7 'of FIG. By adapting it, the spin dryer for five can be easily used for four without introducing new precision machines such as spin dry or cradle and rotor.
여기에서 축 4, 와 축5는 테프론 캐리어가 좌우로 움직이지 못하게 잡아주는 역할을 하고 축 6은 테프론 캐리어가 깊이 들어가지 않도록 밑을 받쳐주는 역할을 한다.Here, axes 4 and 5 serve to hold the Teflon carriers from side to side, and axis 6 supports the base to prevent the teflon carriers from going deep.
그리고 축은 진동에 의하여 줄어지거나 빠지지 않도록 볼트에 의한 조립을 하지않고 용접을 하여 견고히 부착을 하고 먼직 발생하지 않도록 하기위해 부식이 되지 않는 STS316 재질을 사용한다.The shaft uses STS316 material that is not corroded so that it can be firmly attached by welding without being assembled by bolts so as not to be reduced or dropped by vibration.
이와같이 본 고안에 의하면 별도의 부품수입이 필요없이 큰 비용이 들지 않고 5용 크레이들을 용이하게 4용 크레이들로 변경사용 가능할수 있는 장점이 있다.As such, according to the present invention, there is an advantage in that the cradle for 5 can be easily changed to the cradle for 4 without requiring a large part without additional imports.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019900020081U KR960009284Y1 (en) | 1990-12-17 | 1990-12-17 | Structure of a spin dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019900020081U KR960009284Y1 (en) | 1990-12-17 | 1990-12-17 | Structure of a spin dryer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR920013700U KR920013700U (en) | 1992-07-27 |
| KR960009284Y1 true KR960009284Y1 (en) | 1996-10-16 |
Family
ID=19307170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019900020081U KR960009284Y1 (en) | 1990-12-17 | 1990-12-17 | Structure of a spin dryer |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR960009284Y1 (en) |
-
1990
- 1990-12-17 KR KR2019900020081U patent/KR960009284Y1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR920013700U (en) | 1992-07-27 |
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| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20040920 Year of fee payment: 9 |
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| LAPS | Lapse due to unpaid annual fee |