KR960009272U - 석영튜브 - Google Patents
석영튜브Info
- Publication number
- KR960009272U KR960009272U KR2019940019907U KR19940019907U KR960009272U KR 960009272 U KR960009272 U KR 960009272U KR 2019940019907 U KR2019940019907 U KR 2019940019907U KR 19940019907 U KR19940019907 U KR 19940019907U KR 960009272 U KR960009272 U KR 960009272U
- Authority
- KR
- South Korea
- Prior art keywords
- quartz tube
- quartz
- tube
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940019907U KR0124715Y1 (ko) | 1994-08-06 | 1994-08-06 | 석영튜브 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940019907U KR0124715Y1 (ko) | 1994-08-06 | 1994-08-06 | 석영튜브 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR960009272U true KR960009272U (ko) | 1996-03-16 |
| KR0124715Y1 KR0124715Y1 (ko) | 1999-02-18 |
Family
ID=19390265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019940019907U KR0124715Y1 (ko) | 1994-08-06 | 1994-08-06 | 석영튜브 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0124715Y1 (ko) |
-
1994
- 1994-08-06 KR KR2019940019907U patent/KR0124715Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR0124715Y1 (ko) | 1999-02-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20090526 Year of fee payment: 12 |
|
| EXPY | Expiration of term |