KR960006360U - Chuck-carrier detection sensor - Google Patents

Chuck-carrier detection sensor

Info

Publication number
KR960006360U
KR960006360U KR2019940017305U KR19940017305U KR960006360U KR 960006360 U KR960006360 U KR 960006360U KR 2019940017305 U KR2019940017305 U KR 2019940017305U KR 19940017305 U KR19940017305 U KR 19940017305U KR 960006360 U KR960006360 U KR 960006360U
Authority
KR
South Korea
Prior art keywords
chuck
detection sensor
carrier detection
carrier
sensor
Prior art date
Application number
KR2019940017305U
Other languages
Korean (ko)
Other versions
KR200161812Y1 (en
Inventor
오영수
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940017305U priority Critical patent/KR200161812Y1/en
Publication of KR960006360U publication Critical patent/KR960006360U/en
Application granted granted Critical
Publication of KR200161812Y1 publication Critical patent/KR200161812Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
KR2019940017305U 1994-07-13 1994-07-13 Chuck carrier sensor KR200161812Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940017305U KR200161812Y1 (en) 1994-07-13 1994-07-13 Chuck carrier sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940017305U KR200161812Y1 (en) 1994-07-13 1994-07-13 Chuck carrier sensor

Publications (2)

Publication Number Publication Date
KR960006360U true KR960006360U (en) 1996-02-17
KR200161812Y1 KR200161812Y1 (en) 1999-12-01

Family

ID=19388249

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940017305U KR200161812Y1 (en) 1994-07-13 1994-07-13 Chuck carrier sensor

Country Status (1)

Country Link
KR (1) KR200161812Y1 (en)

Also Published As

Publication number Publication date
KR200161812Y1 (en) 1999-12-01

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
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Payment date: 20080820

Year of fee payment: 10

EXPY Expiration of term