KR960006358U - Disk Cooling System Using Process Cooling Water - Google Patents
Disk Cooling System Using Process Cooling WaterInfo
- Publication number
- KR960006358U KR960006358U KR2019940017277U KR19940017277U KR960006358U KR 960006358 U KR960006358 U KR 960006358U KR 2019940017277 U KR2019940017277 U KR 2019940017277U KR 19940017277 U KR19940017277 U KR 19940017277U KR 960006358 U KR960006358 U KR 960006358U
- Authority
- KR
- South Korea
- Prior art keywords
- disk
- cooling water
- cooling system
- cooling
- water
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940017277U KR960006358U (en) | 1994-07-12 | 1994-07-12 | Disk Cooling System Using Process Cooling Water |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940017277U KR960006358U (en) | 1994-07-12 | 1994-07-12 | Disk Cooling System Using Process Cooling Water |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960006358U true KR960006358U (en) | 1996-02-17 |
Family
ID=60665983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940017277U KR960006358U (en) | 1994-07-12 | 1994-07-12 | Disk Cooling System Using Process Cooling Water |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960006358U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100576813B1 (en) * | 1999-10-12 | 2006-05-10 | 삼성전자주식회사 | Device for removing particles of reticle for semiconductor lithography process |
-
1994
- 1994-07-12 KR KR2019940017277U patent/KR960006358U/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100576813B1 (en) * | 1999-10-12 | 2006-05-10 | 삼성전자주식회사 | Device for removing particles of reticle for semiconductor lithography process |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |