KR960006301U - 스텝퍼장비의 프리즘 레벨 감지장치 - Google Patents

스텝퍼장비의 프리즘 레벨 감지장치

Info

Publication number
KR960006301U
KR960006301U KR2019940018722U KR19940018722U KR960006301U KR 960006301 U KR960006301 U KR 960006301U KR 2019940018722 U KR2019940018722 U KR 2019940018722U KR 19940018722 U KR19940018722 U KR 19940018722U KR 960006301 U KR960006301 U KR 960006301U
Authority
KR
South Korea
Prior art keywords
sensing device
level sensing
stepper equipment
prism level
equipment prism
Prior art date
Application number
KR2019940018722U
Other languages
English (en)
Other versions
KR0125860Y1 (ko
Inventor
김진옥
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940018722U priority Critical patent/KR0125860Y1/ko
Publication of KR960006301U publication Critical patent/KR960006301U/ko
Application granted granted Critical
Publication of KR0125860Y1 publication Critical patent/KR0125860Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019940018722U 1994-07-26 1994-07-26 스텝퍼장비의 프리즘 레벨 감지장치 KR0125860Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940018722U KR0125860Y1 (ko) 1994-07-26 1994-07-26 스텝퍼장비의 프리즘 레벨 감지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940018722U KR0125860Y1 (ko) 1994-07-26 1994-07-26 스텝퍼장비의 프리즘 레벨 감지장치

Publications (2)

Publication Number Publication Date
KR960006301U true KR960006301U (ko) 1996-02-17
KR0125860Y1 KR0125860Y1 (ko) 1998-11-02

Family

ID=19389393

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940018722U KR0125860Y1 (ko) 1994-07-26 1994-07-26 스텝퍼장비의 프리즘 레벨 감지장치

Country Status (1)

Country Link
KR (1) KR0125860Y1 (ko)

Also Published As

Publication number Publication date
KR0125860Y1 (ko) 1998-11-02

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