KR960005822A - Gas Flow Controller (MFC) Cleaning System - Google Patents
Gas Flow Controller (MFC) Cleaning System Download PDFInfo
- Publication number
- KR960005822A KR960005822A KR1019940017025A KR19940017025A KR960005822A KR 960005822 A KR960005822 A KR 960005822A KR 1019940017025 A KR1019940017025 A KR 1019940017025A KR 19940017025 A KR19940017025 A KR 19940017025A KR 960005822 A KR960005822 A KR 960005822A
- Authority
- KR
- South Korea
- Prior art keywords
- mfc
- gas
- gas flow
- power supply
- cleaning system
- Prior art date
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
본 발명은 전원공급수단과 퍼지시간 조절수단을 구비하는 전원부(100);MFC 전단에 연결되며 질소(N2) 가스를 유입하는 주 가스관(21)과, MFC 후단에 연결되어 MFC를 세정한 가스를 배출하는 배출관(22)과, 상기 주 가스관(21)의 소정 위치에 형성되어 질소 가스흐름을 조절하는 주 밸브(24)를 구비하는 세정부(200)를 포함하여 구성되는 것을 특징으로 하는 가스흐름조절기(MFC) 세정 시스템에 관한 것으로,MFC를 오버홀에 의한 세정이 아닌 질소 퍼지를 사용하며 실시함으로, 세정 시간 및 비용을 절감할 수 있으며, 장비의 가동을 저하및 MFC 오염에 따른 소자 제조 수율의 절감을 방지하는 효과가 있다.The present invention includes a power supply unit 100 having a power supply means and a purge time adjusting means; a main gas pipe 21 connected to the MFC front end and introducing nitrogen (N 2 ) gas, and a gas connected to the rear end of the MFC to clean the MFC. Gas is characterized in that it comprises a cleaning unit 200 having a discharge pipe 22 for discharging the discharge valve 22, and the main valve 24 is formed at a predetermined position of the main gas pipe 21 to regulate the nitrogen gas flow A flow regulator (MFC) cleaning system, which is performed by using nitrogen purge instead of overhauling, which can reduce cleaning time and cost, reduce equipment operation, and yield device yield due to MFC contamination. It is effective to prevent the reduction.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명에 따른 MFC 세정 시스템 구성도이다.1 is a schematic diagram of an MFC cleaning system according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940017025A KR960005822A (en) | 1994-07-14 | 1994-07-14 | Gas Flow Controller (MFC) Cleaning System |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940017025A KR960005822A (en) | 1994-07-14 | 1994-07-14 | Gas Flow Controller (MFC) Cleaning System |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960005822A true KR960005822A (en) | 1996-02-23 |
Family
ID=66689068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940017025A KR960005822A (en) | 1994-07-14 | 1994-07-14 | Gas Flow Controller (MFC) Cleaning System |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960005822A (en) |
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1994
- 1994-07-14 KR KR1019940017025A patent/KR960005822A/en active Search and Examination
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
AMND | Amendment | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
J201 | Request for trial against refusal decision | ||
AMND | Amendment | ||
B601 | Maintenance of original decision after re-examination before a trial | ||
J301 | Trial decision |
Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20011124 Effective date: 20030327 |