KR960005822A - Gas Flow Controller (MFC) Cleaning System - Google Patents

Gas Flow Controller (MFC) Cleaning System Download PDF

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Publication number
KR960005822A
KR960005822A KR1019940017025A KR19940017025A KR960005822A KR 960005822 A KR960005822 A KR 960005822A KR 1019940017025 A KR1019940017025 A KR 1019940017025A KR 19940017025 A KR19940017025 A KR 19940017025A KR 960005822 A KR960005822 A KR 960005822A
Authority
KR
South Korea
Prior art keywords
mfc
gas
gas flow
power supply
cleaning system
Prior art date
Application number
KR1019940017025A
Other languages
Korean (ko)
Inventor
오왕선
송미향
Original Assignee
김주용
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019940017025A priority Critical patent/KR960005822A/en
Publication of KR960005822A publication Critical patent/KR960005822A/en

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Abstract

본 발명은 전원공급수단과 퍼지시간 조절수단을 구비하는 전원부(100);MFC 전단에 연결되며 질소(N2) 가스를 유입하는 주 가스관(21)과, MFC 후단에 연결되어 MFC를 세정한 가스를 배출하는 배출관(22)과, 상기 주 가스관(21)의 소정 위치에 형성되어 질소 가스흐름을 조절하는 주 밸브(24)를 구비하는 세정부(200)를 포함하여 구성되는 것을 특징으로 하는 가스흐름조절기(MFC) 세정 시스템에 관한 것으로,MFC를 오버홀에 의한 세정이 아닌 질소 퍼지를 사용하며 실시함으로, 세정 시간 및 비용을 절감할 수 있으며, 장비의 가동을 저하및 MFC 오염에 따른 소자 제조 수율의 절감을 방지하는 효과가 있다.The present invention includes a power supply unit 100 having a power supply means and a purge time adjusting means; a main gas pipe 21 connected to the MFC front end and introducing nitrogen (N 2 ) gas, and a gas connected to the rear end of the MFC to clean the MFC. Gas is characterized in that it comprises a cleaning unit 200 having a discharge pipe 22 for discharging the discharge valve 22, and the main valve 24 is formed at a predetermined position of the main gas pipe 21 to regulate the nitrogen gas flow A flow regulator (MFC) cleaning system, which is performed by using nitrogen purge instead of overhauling, which can reduce cleaning time and cost, reduce equipment operation, and yield device yield due to MFC contamination. It is effective to prevent the reduction.

Description

가스흐름조절기(MFC) 세정 시스템Gas Flow Controller (MFC) Cleaning System

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명에 따른 MFC 세정 시스템 구성도이다.1 is a schematic diagram of an MFC cleaning system according to the present invention.

Claims (2)

전원공급수단과 퍼지시간 조절수단을 구비하는 전원부(100);MFC 전단에 연결되며 질소(N2) 가스를 유입하는 주 가스관(21)과, MFC 후단에 연결되어 MFC를 세정한 가스를 배출하는 배출관(22)과, 상기 주 가스관(21)의 소정 위치에 형성되어 질소 가스흐름을 조절하는 주 밸브(24)를 구비하는 세정부(200)를 포함하여 구성되는 것을 특징으로 하는 가스흐름조절기(MFC) 세정 시스템.A power supply unit 100 having a power supply means and a purge time adjusting means; a main gas pipe 21 connected to the MFC front end and introducing nitrogen (N 2 ) gas and a rear end of the MFC to discharge the gas cleaned by the MFC A gas flow regulator comprising a cleaning unit 200 having a discharge pipe 22 and a main valve 24 formed at a predetermined position of the main gas pipe 21 to control nitrogen gas flow ( MFC) cleaning system. 제1항에 있어서, 상기 주 밸브(24)에 연결되며, 상기 전원부(100)로 부터 전원을 인가 받아 개 ㆍ 폐되는 솔레노이드 밸브(25)가 형성되어 있으며, 공기가 유입되어 흐르는 제2가스관(26)을 더 포함하여 구성되는 것을 특징으로 하는 가스흐름조절기(MFC) 세정 시스템.According to claim 1, The solenoid valve 25 is connected to the main valve 24, the power is supplied from the power supply unit 100 is opened and closed is formed, the air flows through the second gas pipe ( 26) A gas flow regulator (MFC) cleaning system, characterized in that it further comprises. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940017025A 1994-07-14 1994-07-14 Gas Flow Controller (MFC) Cleaning System KR960005822A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940017025A KR960005822A (en) 1994-07-14 1994-07-14 Gas Flow Controller (MFC) Cleaning System

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940017025A KR960005822A (en) 1994-07-14 1994-07-14 Gas Flow Controller (MFC) Cleaning System

Publications (1)

Publication Number Publication Date
KR960005822A true KR960005822A (en) 1996-02-23

Family

ID=66689068

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940017025A KR960005822A (en) 1994-07-14 1994-07-14 Gas Flow Controller (MFC) Cleaning System

Country Status (1)

Country Link
KR (1) KR960005822A (en)

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Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20011124

Effective date: 20030327