KR960004616Y1 - Wafer transfer device - Google Patents
Wafer transfer device Download PDFInfo
- Publication number
- KR960004616Y1 KR960004616Y1 KR92009916U KR920009916U KR960004616Y1 KR 960004616 Y1 KR960004616 Y1 KR 960004616Y1 KR 92009916 U KR92009916 U KR 92009916U KR 920009916 U KR920009916 U KR 920009916U KR 960004616 Y1 KR960004616 Y1 KR 960004616Y1
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- cassette body
- handler
- guard
- present
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
내용없음.None.
Description
제1a, b, c도는 본 고안에 의한 웨이퍼 운반장치의 일실시예구성을 나타낸 정면도, 평면도, 측면도.1a, b, c is a front view, a plan view, a side view showing an embodiment configuration of a wafer transport apparatus according to the present invention.
제2a, b, c도는 본 고안에 의한 웨이퍼 운반장치의 다른 일실시예구성을 나타낸 정면도, 평면도, 측면도.Figure 2a, b, c is a front view, a plan view, a side view showing another embodiment configuration of the wafer transport apparatus according to the present invention.
제3a, b도는 본 고안의 요부인 회전 및 고정 자물쇠의 사용상태를 나타낸 측면도.3a, b is a side view showing the state of use of the rotating and fixed lock which is the main part of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 카세트몸체 2 : 회전 및 고정 자물쇠1: Cassette body 2: Rotating and fixed lock
3 : 막대형 보호대 4 : 핸들러 삽입부3 bar protector 4 handler insert
5 : 핸들러 고정부 6 : 웨이퍼5: handler fixing part 6: wafer
7 : 웨이퍼 슬롯 8 : 지지대7: wafer slot 8: support
9 : 판형 보호대 10 : 고정편9: plate protector 10: fixing piece
10a : 암나사홈 11 : 나사못10a: female thread groove 11: screw
본 고안은 반도체 제조공정중 감광막 도포후 후속공정을 위한 하드베이크를 수행하기 위한 웨이퍼 운반장치에 관한 것으로, 특히 웨이퍼가 수평베이크 공정으로 이루어지도록 하되, 웨이퍼를 안정하게 고정시켜 이동하기 위한 웨이퍼 운반장치에 관한 것이다.The present invention relates to a wafer transport apparatus for performing a hard bake for a subsequent process after application of a photoresist film during a semiconductor manufacturing process, and in particular, a wafer transport apparatus for stably fixing a wafer to move the wafer in a horizontal bake process. It is about.
종래의 배취형 타입 오븐(Batch type oven)에서 사용되는 운반장치는 그의 구조가 웨이퍼가 수직상태로 놓여지게 되어 있어 베이크(bake)공정시 온도 상승에 의해 감광막이 흘러 내리게 된다.The conveying apparatus used in the conventional batch type oven has a structure in which the wafer is placed in a vertical state so that the photoresist film flows down due to the temperature rise during the bake process.
이에 따라, 홀(hole)의 찌그러짐, 선의 뒤틀림등의 패턴 이상을 초래하게 되어 소자의 신뢰성 확보에 어려운 문제점을 야기시키고 있다.As a result, a pattern abnormality such as hole distortion and line distortion is caused, which causes a problem in securing reliability of the device.
따라서, 본 고안은 상기의 제반 문제점을 해결하기 위하여 안출된 것으로서, 간단한 구조변경으로 웨이퍼가 수평으로 놓여지도록 하여 수평 베이크 공정을 수행하고, 핸들러에 상기 웨이퍼가 안정하게 고정된 상태에서 이동되도록 하는 웨이퍼 운반장치를 제공함에 그 목적이 있다.Therefore, the present invention has been devised to solve the above problems, and the wafer is placed horizontally with a simple structural change to perform a horizontal bake process, and the wafer is moved in a stable state fixed to the handler. The object is to provide a conveying device.
상기 목적을 달성하기 위하여 본 고안은, 웨이퍼 운반장치에 있이서, 웨이퍼를 넣을 수 있도록 그 일측에 개구부가 형성된 박스형상의 카세트몸체; 상기 카세트몸체에 웨이퍼가 수평방향으로 수납되어 안정하게 지지되도록 상기 카세트몸체 내벽에 상하 소정간격으로 수평되게 구비되는 다수의 웨이퍼 슬롯; 상기 카세트몸체를 이동시키는 장비인 핸들러를 장착할 수 있도록 상기 카세트몸체에 하부와 상부일측에 소정크기의 홈으로 형성된 핸들러 삽입부 및 핸들러 고정부(5); 상기 카세트몸체의 이동 및 상기 웨이퍼의 수평 베이크시 상기 웨이퍼가 미끄러져 쏟아지지 않도록 상기 카세트몸체의 개구부를 막는 보호대; 및 상기 보호대에 직각으로 설치된 일체형상을 가지며 상기 카세트몸체의 상부에 구비된 회전 및 고정자물쇠에 연결되는 지지대를 포함하는 것을 특징으로 한다.In order to achieve the above object, the present invention, in the wafer transport apparatus, a box-shaped cassette body formed with an opening at one side thereof to accommodate the wafer; A plurality of wafer slots provided horizontally at predetermined intervals on the inner wall of the cassette body so that the wafer is accommodated in the cassette body in a horizontal direction and stably supported; A handler insertion part and a handler fixing part 5 formed in grooves having a predetermined size on the lower side and the upper side of the cassette body so as to mount a handler which is the equipment for moving the cassette body; A guard blocking the opening of the cassette body so that the wafer does not slip and fall during the movement of the cassette body and the horizontal baking of the wafer; And a support having an integral shape installed at right angles to the guard and connected to the rotation and stator lock provided on the cassette body.
이하, 첨부된 도면을 참조하여 본 고안의 실시예를 상세히 설명하면 다음과 같다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
제1a도, 2b도, 2c도는 본 고안에 의한 웨이퍼 운반장치의 일실시예구성을 나타낸 정면도, 평면도, 측면도이고, 제2a도, 2b도, 2c도는 본 고안에 의한 웨이퍼 운반장치의 다른 일실시예구성을 나타낸 정면도, 평면도, 측면도이고, 제3a도, 3b도는 본 고안의 요부인 회전 및 고정 자물쇠의 사용상태를 나타낸 측간면도이며, 도면에서 1은 카세트몸체, 2는 회전 및 고정 자물쇠, 3은 막대형 보호대, 4는 핸들러 삽입부, 5는 핸들러 고정부, 6은 웨이퍼, 7은 웨이퍼 슬롯, 8은 지지대, 9는 판형 보호대, 10은 고정편, 10a는 암나사홈, 11은 나사못을 각각 나타낸다.1A, 2B, and 2C are front, plan, and side views showing an embodiment of a wafer transport apparatus according to the present invention, and FIGS. 2A, 2B, and 2C show another work of the wafer transport apparatus according to the present invention. Embodiment configuration is a front view, a plan view, a side view, and 3a, 3b is a side view showing the state of use of the rotation and fixed lock which is the main part of the present invention, in the drawings 1 is the cassette body, 2 is the rotation and fixed lock , 3 is rod guard, 4 is handler insert, 5 is handler holder, 6 is wafer, 7 is wafer slot, 8 is support, 9 is plate guard, 10 is fixation, 10a is female thread groove, 11 is screw Respectively.
먼저, 제1도를 참조하여 본 고안의 일실시예의 구성 및 작용 효과를 자세히 살펴보면 다음과 같다.First, referring to FIG. 1, the configuration and operation effects of an embodiment of the present invention are described in detail.
도면에 도시한 바와 같이, 본 고안의 일실시예에서는 웨이퍼(6)를 수납할 수 있도록 그 일측에 개구부가 형성된 박스형상의 카세트몸체(1)와, 상기 카세트몸체(1)에 웨이퍼(6)가 수명방향으로 수납되어 안정하게 지지되도록 상기 카세트몸체(1) 내벽에 상하 소정간격으로 수평되게 구비되는 다수의 웨이퍼 슬롯(7)과, 상기 카세트 몸체(1)를 이동시키는 장비인 핸들러(도면에 도시하지 않음)를 장착할 수 있도록 상기 몸체(1)에 하부에 소정 크기의 홈으로 형성된 핸들러 삽입부(4) 및 상기 카세트몸체(1)의 상단부에 소정크기의 홈으로 형성된 핸들러고정부(5)와, 상기 카세트몸체(1)의 이동 또는 상기 웨이퍼(6)의 수평 베이크시, 상기 웨이퍼(6)가 미끄러져 쏟아지지 않도록 상기 몸체(1)의 개구부를 막는 막대형 보호대(3)와, 상기 막대형 보호대(3)와 일체로 형성되며 상기 몸체(1)의 상부에 설치된 회전 및 고정 자물쇠(2)에 연결되어지는 지지대(8)로 구성된다.As shown in the figure, in one embodiment of the present invention, a box-shaped cassette body 1 having an opening formed at one side thereof to accommodate the wafer 6, and the wafer 6 on the cassette body 1. And a plurality of wafer slots 7 provided horizontally at predetermined intervals up and down on the inner wall of the cassette body 1 so as to be stably supported in the life direction, and a handler which is a device for moving the cassette body 1 (in the drawing). A handler inserting portion 4 formed at a lower portion of the body 1 into a groove having a predetermined size and a handler fixing portion 5 having a predetermined size groove at an upper end of the cassette body 1 so that the body 1 can be mounted. And a rod-shaped guard (3) for blocking the opening of the body (1) so that the wafer (6) does not slip and fall during the movement of the cassette body (1) or the horizontal baking of the wafer (6), Integrally formed with the rod-shaped guard (3) Said consists of a support (8) which is connected to the rotating and fixing the lock (2) installed at an upper side of the body (1).
상기 구성에 있어서 몸체(1)의 웨이퍼 슬롯(7)에 삽입되어 있는 상기 웨이퍼(6)를 수평으로 베이크할 때, 이 웨이퍼(6)가 미끄러져 쏟아질 수 있으므로 이를 방지하기 위해 막대형 보호대(3)를 설치한 것이다.In the above configuration, when the wafer 6 inserted into the wafer slot 7 of the body 1 is horizontally baked, the wafer 6 may slip and fall, and thus, a rod-shaped guard ( 3) is installed.
또한, 상기 웨이퍼(6)출입에 지장이 없도록 하기 위하여 상기 막대형 보호대(3)와 일체로 형성되어진 지지대(8)를 상기 회전 및 고정 자물쇠(2)에 연결시켜 상기 막대형 보호대(3)가 상기 웨이퍼(6) 출입시, 회전되어 상기 웨이퍼(6) 출입공간을 충분히 확보할 수 있도록 한 것이다.In addition, in order to prevent the wafer 6 from entering and exiting, the rod guards 3 formed integrally with the rod guards 3 are connected to the rotary and fixed locks 2 so that the rod guards 3 are secured. When the wafer 6 enters and exits, the wafer 6 is rotated to sufficiently secure an access space of the wafer 6.
여기서, 제3도에 도시한 바와 같이 상기 회전 및 고정자물쇠(2)는 상기 카세트몸체(1)의 상면에 돌출되게 장착되되, 그 중앙부에 암나사홈(10a)이 형성된 고정편(10)과, 상기 지지대(8)를 관통하여 고정편(10)의 암나사홈(10a)에 체결되어 풀고 조임력에 따라 상기 보호대(3)의 회전축 및 고정기능을 수행하는 나사못(11)으로 구성된다.Here, as shown in FIG. 3, the rotating and stator lock 2 is mounted to protrude on the upper surface of the cassette body 1, and a fixing piece 10 having a female thread groove 10a formed at the center thereof; It consists of a screw (11) through the support (8) is fastened to the female screw groove (10a) of the fixing piece 10 to perform the rotation axis and fixing function of the guard (3) according to the tightening force.
또한, 제3a도는 회전 및 고정 자물쇠(2)의 고정된 상태를 도시한 것이고, 제3b도는 회전 상태를 도시한 것이다.3A shows the fixed state of the rotary and fixed lock 2, and FIG. 3B shows the rotated state.
본 실시예에서, 상기 회전 및 고정 자물쇠역할을 상기 나사못(11)에 의해 보호대(3)가 고정 및 회전되도록한 구조를 보여주고 있으며, 상기 구성과 같은 회전 및 고정 자물쇠는 당해분야에서 통상의 지식을 가진자이면 누구나 간단히 실시할 수 있는 주지의 기술에 해당함으로 이 밖의 실시예에 대한 언급은 피하기로 한다.In this embodiment, the rotation and the fixed lock role is shown a structure in which the guard 3 is fixed and rotated by the screw 11, the rotation and fixed lock as the configuration is known in the art Since it corresponds to a well-known technology that can be easily carried out by anyone having a reference to other embodiments will be avoided.
본 고안의 다른 실시예를 제2도를 참조하여 구성 및 작용효과를 살펴보면, 상기 전술한 일실시예와 동일하나 다만, 막대형 보호대(3)를 원호를 갖는 판형 보호대(9)로 형성한 것으로, 상기 웨이퍼(6)를 더욱 안전하게 유지하도록 한 것이다.Looking at the configuration and effect of another embodiment of the present invention with reference to Figure 2, the same as the above-described one embodiment, except that the bar-shaped guard (3) is formed as a plate-shaped guard (9) having an arc In order to keep the wafer 6 more secure.
따라서, 상기와 같이 구성되어 작용하는 본 고안은 웨이퍼가 수평으로 놓여진 상태에서 안정된 베이크를 보장하므로써 감광막 유출을 막아 웨이퍼의 생산성을 높일수 있는 효과가 있다.Therefore, the present invention configured and acting as described above has the effect of preventing the photosensitive film leakage by increasing the productivity of the wafer by ensuring a stable bake in a state where the wafer is placed horizontally.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92009916U KR960004616Y1 (en) | 1992-06-05 | 1992-06-05 | Wafer transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR92009916U KR960004616Y1 (en) | 1992-06-05 | 1992-06-05 | Wafer transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940001988U KR940001988U (en) | 1994-01-03 |
| KR960004616Y1 true KR960004616Y1 (en) | 1996-06-03 |
Family
ID=19334361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR92009916U KR960004616Y1 (en) | 1992-06-05 | 1992-06-05 | Wafer transfer device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR960004616Y1 (en) |
-
1992
- 1992-06-05 KR KR92009916U patent/KR960004616Y1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR940001988U (en) | 1994-01-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6168669B1 (en) | Substrate holding apparatus and substrate process system | |
| KR960004616Y1 (en) | Wafer transfer device | |
| US5268067A (en) | Wafer clamping method | |
| JP2967895B2 (en) | Semiconductor wafer holding device | |
| JPH10137063A (en) | Mechanism for limiting drawing-out of electric device | |
| KR100783282B1 (en) | Orientation Aligning Unit In The Aligning Chamber | |
| KR200239049Y1 (en) | Wafer Boat | |
| KR0161629B1 (en) | Wafer fixing apparatus | |
| SU788227A1 (en) | Device for transporting semiconductor plates | |
| KR19990027864A (en) | Orient Detector Assembly | |
| KR19980030958A (en) | Finger of Semiconductor Wafer Handler | |
| KR19990001016U (en) | Boat of semiconductor ashing device | |
| KR200152648Y1 (en) | Semiconductor device tray | |
| KR0115437Y1 (en) | Clamp system for wafer cassette | |
| KR200198272Y1 (en) | Carrier Guide | |
| KR900002874Y1 (en) | Cassette side loading system of video cassette recorder | |
| KR200211055Y1 (en) | Carrier Elevator of Semiconductor Equipment | |
| KR0174991B1 (en) | Pre-alignment device of semiconductor photoresist coating equipment | |
| KR100282127B1 (en) | Transfer arm paddles in semiconductor manufacturing facilities | |
| KR200233842Y1 (en) | Wafer carrier | |
| JP2528108Y2 (en) | Wafer holding holder | |
| KR200161483Y1 (en) | Wafer transfer apparatus | |
| KR200224252Y1 (en) | Wafer cooling device for susceptor for semiconductor manufacturing process | |
| KR19980015192U (en) | Wafer Feeder Blade | |
| KR20030030632A (en) | Aligning device for a wafer carrying apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20060522 Year of fee payment: 11 |
|
| EXPY | Expiration of term |