KR960003073U - 세라믹 절연체의 오염방지장치 - Google Patents

세라믹 절연체의 오염방지장치

Info

Publication number
KR960003073U
KR960003073U KR2019940013936U KR19940013936U KR960003073U KR 960003073 U KR960003073 U KR 960003073U KR 2019940013936 U KR2019940013936 U KR 2019940013936U KR 19940013936 U KR19940013936 U KR 19940013936U KR 960003073 U KR960003073 U KR 960003073U
Authority
KR
South Korea
Prior art keywords
ceramic insulator
pollution device
pollution
insulator
ceramic
Prior art date
Application number
KR2019940013936U
Other languages
English (en)
Other versions
KR0117111Y1 (ko
Inventor
김현섭
Original Assignee
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체 주식회사 filed Critical 엘지반도체 주식회사
Priority to KR2019940013936U priority Critical patent/KR0117111Y1/ko
Publication of KR960003073U publication Critical patent/KR960003073U/ko
Application granted granted Critical
Publication of KR0117111Y1 publication Critical patent/KR0117111Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
KR2019940013936U 1994-06-15 1994-06-15 세라믹 절연체의 오염방지장치 KR0117111Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013936U KR0117111Y1 (ko) 1994-06-15 1994-06-15 세라믹 절연체의 오염방지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013936U KR0117111Y1 (ko) 1994-06-15 1994-06-15 세라믹 절연체의 오염방지장치

Publications (2)

Publication Number Publication Date
KR960003073U true KR960003073U (ko) 1996-01-22
KR0117111Y1 KR0117111Y1 (ko) 1998-04-22

Family

ID=19385665

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013936U KR0117111Y1 (ko) 1994-06-15 1994-06-15 세라믹 절연체의 오염방지장치

Country Status (1)

Country Link
KR (1) KR0117111Y1 (ko)

Also Published As

Publication number Publication date
KR0117111Y1 (ko) 1998-04-22

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