KR960003066U - 가스흐름 제어 장치 - Google Patents

가스흐름 제어 장치

Info

Publication number
KR960003066U
KR960003066U KR2019940013279U KR19940013279U KR960003066U KR 960003066 U KR960003066 U KR 960003066U KR 2019940013279 U KR2019940013279 U KR 2019940013279U KR 19940013279 U KR19940013279 U KR 19940013279U KR 960003066 U KR960003066 U KR 960003066U
Authority
KR
South Korea
Prior art keywords
control device
gas flow
flow control
gas
flow
Prior art date
Application number
KR2019940013279U
Other languages
English (en)
Other versions
KR200194075Y1 (ko
Inventor
박현문
박찬호
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940013279U priority Critical patent/KR200194075Y1/ko
Publication of KR960003066U publication Critical patent/KR960003066U/ko
Application granted granted Critical
Publication of KR200194075Y1 publication Critical patent/KR200194075Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019940013279U 1994-06-08 1994-06-08 가스흐름 제어 장치 KR200194075Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013279U KR200194075Y1 (ko) 1994-06-08 1994-06-08 가스흐름 제어 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013279U KR200194075Y1 (ko) 1994-06-08 1994-06-08 가스흐름 제어 장치

Publications (2)

Publication Number Publication Date
KR960003066U true KR960003066U (ko) 1996-01-22
KR200194075Y1 KR200194075Y1 (ko) 2000-09-01

Family

ID=19385194

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013279U KR200194075Y1 (ko) 1994-06-08 1994-06-08 가스흐름 제어 장치

Country Status (1)

Country Link
KR (1) KR200194075Y1 (ko)

Also Published As

Publication number Publication date
KR200194075Y1 (ko) 2000-09-01

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Legal Events

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