KR950031471U - Thermostat valve - Google Patents

Thermostat valve

Info

Publication number
KR950031471U
KR950031471U KR2019940006934U KR19940006934U KR950031471U KR 950031471 U KR950031471 U KR 950031471U KR 2019940006934 U KR2019940006934 U KR 2019940006934U KR 19940006934 U KR19940006934 U KR 19940006934U KR 950031471 U KR950031471 U KR 950031471U
Authority
KR
South Korea
Prior art keywords
thermostat valve
thermostat
valve
Prior art date
Application number
KR2019940006934U
Other languages
Korean (ko)
Other versions
KR970003596Y1 (en
Inventor
서부길
김학묵
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940006934U priority Critical patent/KR970003596Y1/en
Publication of KR950031471U publication Critical patent/KR950031471U/en
Application granted granted Critical
Publication of KR970003596Y1 publication Critical patent/KR970003596Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
KR2019940006934U 1994-04-01 1994-04-01 Valve of pyrostat KR970003596Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940006934U KR970003596Y1 (en) 1994-04-01 1994-04-01 Valve of pyrostat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940006934U KR970003596Y1 (en) 1994-04-01 1994-04-01 Valve of pyrostat

Publications (2)

Publication Number Publication Date
KR950031471U true KR950031471U (en) 1995-11-22
KR970003596Y1 KR970003596Y1 (en) 1997-04-18

Family

ID=19380336

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940006934U KR970003596Y1 (en) 1994-04-01 1994-04-01 Valve of pyrostat

Country Status (1)

Country Link
KR (1) KR970003596Y1 (en)

Also Published As

Publication number Publication date
KR970003596Y1 (en) 1997-04-18

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20080619

Year of fee payment: 12

EXPY Expiration of term