KR950031467U - 이온 주입 조절장치 - Google Patents

이온 주입 조절장치

Info

Publication number
KR950031467U
KR950031467U KR2019940007258U KR19940007258U KR950031467U KR 950031467 U KR950031467 U KR 950031467U KR 2019940007258 U KR2019940007258 U KR 2019940007258U KR 19940007258 U KR19940007258 U KR 19940007258U KR 950031467 U KR950031467 U KR 950031467U
Authority
KR
South Korea
Prior art keywords
regulator
ion implantation
implantation
ion
implantation regulator
Prior art date
Application number
KR2019940007258U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940007258U priority Critical patent/KR950031467U/ko
Publication of KR950031467U publication Critical patent/KR950031467U/ko

Links

KR2019940007258U 1994-04-07 1994-04-07 이온 주입 조절장치 KR950031467U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940007258U KR950031467U (ko) 1994-04-07 1994-04-07 이온 주입 조절장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940007258U KR950031467U (ko) 1994-04-07 1994-04-07 이온 주입 조절장치

Publications (1)

Publication Number Publication Date
KR950031467U true KR950031467U (ko) 1995-11-22

Family

ID=60862582

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940007258U KR950031467U (ko) 1994-04-07 1994-04-07 이온 주입 조절장치

Country Status (1)

Country Link
KR (1) KR950031467U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination