KR950025920U - Substrate rotation device - Google Patents

Substrate rotation device

Info

Publication number
KR950025920U
KR950025920U KR2019940003905U KR19940003905U KR950025920U KR 950025920 U KR950025920 U KR 950025920U KR 2019940003905 U KR2019940003905 U KR 2019940003905U KR 19940003905 U KR19940003905 U KR 19940003905U KR 950025920 U KR950025920 U KR 950025920U
Authority
KR
South Korea
Prior art keywords
rotation device
substrate rotation
substrate
rotation
Prior art date
Application number
KR2019940003905U
Other languages
Korean (ko)
Other versions
KR200160918Y1 (en
Inventor
김정욱
김태경
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019940003905U priority Critical patent/KR200160918Y1/en
Publication of KR950025920U publication Critical patent/KR950025920U/en
Application granted granted Critical
Publication of KR200160918Y1 publication Critical patent/KR200160918Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
KR2019940003905U 1994-02-28 1994-02-28 Substrate rotation unit KR200160918Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940003905U KR200160918Y1 (en) 1994-02-28 1994-02-28 Substrate rotation unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940003905U KR200160918Y1 (en) 1994-02-28 1994-02-28 Substrate rotation unit

Publications (2)

Publication Number Publication Date
KR950025920U true KR950025920U (en) 1995-09-18
KR200160918Y1 KR200160918Y1 (en) 1999-11-15

Family

ID=19378142

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940003905U KR200160918Y1 (en) 1994-02-28 1994-02-28 Substrate rotation unit

Country Status (1)

Country Link
KR (1) KR200160918Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000021158A (en) * 1998-09-26 2000-04-15 윤종용 Apparatus for manufacturing semiconductor

Also Published As

Publication number Publication date
KR200160918Y1 (en) 1999-11-15

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
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Payment date: 20080729

Year of fee payment: 10

EXPY Expiration of term