KR950022913A - Method for manufacturing optical path adjusting device of projection image display device - Google Patents

Method for manufacturing optical path adjusting device of projection image display device Download PDF

Info

Publication number
KR950022913A
KR950022913A KR1019930027985A KR930027985A KR950022913A KR 950022913 A KR950022913 A KR 950022913A KR 1019930027985 A KR1019930027985 A KR 1019930027985A KR 930027985 A KR930027985 A KR 930027985A KR 950022913 A KR950022913 A KR 950022913A
Authority
KR
South Korea
Prior art keywords
optical path
mirror
image display
display device
path control
Prior art date
Application number
KR1019930027985A
Other languages
Korean (ko)
Other versions
KR970008389B1 (en
Inventor
민용기
Original Assignee
배순훈
대우전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 배순훈, 대우전자 주식회사 filed Critical 배순훈
Priority to KR93027985A priority Critical patent/KR970008389B1/en
Priority to US08/322,812 priority patent/US5552923A/en
Priority to JP6253728A priority patent/JPH07159709A/en
Priority to CN94117144.2A priority patent/CN1058575C/en
Publication of KR950022913A publication Critical patent/KR950022913A/en
Application granted granted Critical
Publication of KR970008389B1 publication Critical patent/KR970008389B1/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

본 발명의 투사형 화상 표시 장치의 광로 조절 장치의 신뢰성을 향상하기에 적합한 투사형 화상 표시 장치의 광로 조절 장치 제조 방법에 관한 것으로, 종래에는 감광막 제거 공정시 또는 장시간 사용시, 에폭시가 약화되어 광로 조절 장치의 신뢰성이 저하하며 에폭시의 새로 방향 부분의 폭이 얇기 때문에 거울을 지탱하기에는 부적절하였으나, 본 발명에서는 티타늄(23)위에 거울(24)을 형성하여 티타늄(23)이 거울(24)을 지탱하도록 하므로써 그 거울(24)의 부착력이 좋아지며 장시간 구동에도 안정된 동작이 이루어지며, 평탄도면에서도 에폭시 경우보다 유리하므로 상기 결점을 개선시킬 수 있는 것이다.The present invention relates to a method for manufacturing an optical path control device of a projection type image display device suitable for improving the reliability of the optical path control device of the projection type image display device of the present invention. Reliability is deteriorated and the width of the newly-oriented part of the epoxy is inadequate to support the mirror, but in the present invention by forming a mirror 24 on the titanium (23) by allowing the titanium 23 to support the mirror (24) The adhesion of the mirror 24 is improved and a stable operation is achieved even for a long time driving, it is possible to improve the above defects because it is advantageous than the epoxy even in the flatness.

Description

투사형 화상표시장치의 광로조절장치 제조방법Manufacturing method of optical path control device of projection image display device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명 투사형 화상표시장치의 광로조절장치 제조의 일 실시예를 나타낸 공정 단면도.2 is a process cross-sectional view showing an embodiment of manufacturing the optical path control apparatus of the present invention projection type image display apparatus.

Claims (16)

구동기관(1) 표면에 신호전극(2)을 선택적으로 형성하고 그 신호전극(2)위에 일정간격마다 접착제(20)가 채워져 있는 세라믹 웨이퍼(21)를 형성하고 표면을 폴리싱하는 단계와; 상기 세라믹 웨이퍼(21) 표면의 중앙에 바이어스 전극(22)을 선택적으로 형성하고 그 바이어스 전극(22)과 접착제(20) 영역의 표면에 티타늄(23)을 선택적으로 형성하는 단계와; 상기 바이어스 전극(22)의 중앙영역을 제외한 표면에 거울(24)을 선택적으로 형성하고 접착제(20) 영역을 제외한 드러난 상기 티타늄(23)을 제거하는 단계로된 투사형 화상표시장치의 광로조절장치 제조방법.Selectively forming a signal electrode (2) on the surface of the drive engine (1), forming a ceramic wafer (21) filled with an adhesive (20) at predetermined intervals on the signal electrode (2), and polishing the surface; Selectively forming a bias electrode (22) in the center of the ceramic wafer (21) surface and selectively forming titanium (23) on the surface of the bias electrode (22) and the adhesive (20) region; Manufacture of the optical path control apparatus of the projection type image display device by selectively forming a mirror 24 on the surface of the bias electrode 22 except for the center region and removing the titanium 23 except the adhesive 20 region. Way. 제1항에 있어서, 상기 거울(24)을 형성하기 전에 형성할 거울 영역에 나이트라이드를 선택적으로 형성한후 거울(24)을 형성하는 투사형 화상표시장치의 광로조절장치 제조방법.2. A method according to claim 1, wherein nitride is selectively formed in the mirror area to be formed before forming the mirror (24) and then the mirror (24) is formed. 제1항 또는 제2항에 있어서, 상기 신호전극(2)으로 금속을 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.3. A method according to claim 1 or 2, wherein a metal is used as said signal electrode (2). 제3항에 있어서, 상기 금속으로 알루미늄, 구리, 니켈중 적어도 하나를 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.4. The method of claim 3, wherein at least one of aluminum, copper, and nickel is used as the metal. 제1항 또는 제2항에 있어서, 상기 접착제(20)로 에폭시를 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.The method of manufacturing an optical path control apparatus according to claim 1 or 2, wherein an epoxy is used as the adhesive (20). 제1항 또는 제2항에 있어서, 상기 접착제(20)의 두께 5㎛가 되도록 하는 투사형 화상표시장치의 광로조절장치 제조방법.A method of manufacturing an optical path control apparatus for a projection image display device according to claim 1 or 2, wherein the adhesive (20) has a thickness of 5 m. 제1항 또는 제2항에 있어서, 상기 세라믹 웨이퍼(21)로 전왜세라믹 또는 압전 세라믹을 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.The method of manufacturing an optical path control apparatus for a projection image display device according to claim 1 or 2, wherein an electrostrictive ceramic or piezoelectric ceramic is used as the ceramic wafer (21). 제1항 또는 제2항에 있어서, 상기 세라믹 웨이퍼(21)의 두께를 100㎛가 되도록 하는 투사형 화상표시장치의 광로조절장치 제조방법.A method of manufacturing an optical path control apparatus for a projection image display device according to claim 1 or 2, wherein the thickness of the ceramic wafer (21) is 100 mu m. 제1항 또는 제2항에 있어서, 상기 티타늄(23)의 두께를 1㎛가 되도록 하는 투사형 화상표시장치의 광로조절장치 제조방법.A method of manufacturing an optical path control apparatus for a projection image display device according to claim 1 or 2, wherein the titanium (23) has a thickness of 1 µm. 제1항 또는 제2항에 있어서, 상기 바이어스 전극(22)으로 금속을 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.A method according to claim 1 or 2, wherein a metal is used as the bias electrode (22). 제10항에 있어서, 상기 금속으로 크롬을 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.The method of manufacturing an optical path control apparatus according to claim 10, wherein chromium is used as the metal. 제1항 또는 제2항에 있어서, 상기 거울(24)로 금속을 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.A method according to claim 1 or 2, wherein a metal is used as the mirror (24). 제12항에 있어서, 상기 금속으로 알루미늄을 사용하는 투사형 화상표시장치의 광로조절장치 제조방법.13. The method of claim 12, wherein aluminum is used as the metal. 제1항 또는 제2항에 있어서, 상기 거울(24)의 폭이 90㎛가 되도록 하는 투사형 화상표시장치의 광로조절장치 제조방법.A method according to claim 1 or 2, wherein the mirror (24) has a width of 90 mu m. 제1항 또는 제2항에 있어서, 상기 접착제(20) 영역의 티타늄(23)과 바이어스 전극(22)의 사이견격이 2㎛-3㎛가 되도록 하는 투사형 화상표시장치의 광로조절장치 제조방법.A method according to claim 1 or 2, wherein the distance between the titanium (23) and the bias electrode (22) in the area of the adhesive (20) is 2 µm-3 µm. 제1항 또는 제2항에 있어서, 상기 신호전극(2)을 2차원 매트릭스 형태가 되도록 하는 투사형 화상표시장치의 광로조절장치 제조방법.A method according to claim 1 or 2, wherein the signal electrode (2) is in the form of a two-dimensional matrix. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR93027985A 1993-10-20 1993-12-16 Manufacturing method of optical path regulating apparatus KR970008389B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR93027985A KR970008389B1 (en) 1993-12-16 1993-12-16 Manufacturing method of optical path regulating apparatus
US08/322,812 US5552923A (en) 1993-10-20 1994-10-13 Array of electrodisplacive actuated mirrors and method for the manufacture thereof
JP6253728A JPH07159709A (en) 1993-10-20 1994-10-19 Electro-displacing actuated mirror array and manufacture thereof
CN94117144.2A CN1058575C (en) 1993-10-20 1994-10-20 Array of electrodisplacive actuated mirrors and method for the manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93027985A KR970008389B1 (en) 1993-12-16 1993-12-16 Manufacturing method of optical path regulating apparatus

Publications (2)

Publication Number Publication Date
KR950022913A true KR950022913A (en) 1995-07-28
KR970008389B1 KR970008389B1 (en) 1997-05-23

Family

ID=19371212

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93027985A KR970008389B1 (en) 1993-10-20 1993-12-16 Manufacturing method of optical path regulating apparatus

Country Status (1)

Country Link
KR (1) KR970008389B1 (en)

Also Published As

Publication number Publication date
KR970008389B1 (en) 1997-05-23

Similar Documents

Publication Publication Date Title
KR950010596A (en) Method for manufacturing optical path adjusting device of projection image display device
GB2302956A (en) Fabricating a liquid crystal device
JP3961182B2 (en) Anodic bonding method
KR950016311A (en) Light path adjuster structure of the projection image display device
KR950022913A (en) Method for manufacturing optical path adjusting device of projection image display device
KR950013236A (en) Method for manufacturing optical path adjusting device of projection image display device
KR950022927A (en) Manufacturing method of light path adjusting device of projection image display device
JP2001264672A (en) Optical polarizing element and method for manufacturing optical polarizing element
KR0159416B1 (en) Optical projection system
KR950022928A (en) Manufacturing method of optical path control device
KR950022918A (en) Manufacturing method of optical path control device
KR0177252B1 (en) Method for preventing the spread of the crack
KR950016295A (en) Optical path control device structure of projection image display device
JPH04253012A (en) Method for mounting synthetic resin lens
KR950016304A (en) Method for manufacturing optical path adjusting device of projection image display device
KR950016312A (en) Method for manufacturing optical path adjusting device of projection image display device
KR950016293A (en) Manufacturing method of optical path control device of projection image display device
KR950007488A (en) Manufacturing method of optical path control device
KR950022929A (en) Manufacturing method of light path adjusting device of projection image display device
KR950033612A (en) Manufacturing method of optical path control device
KR960036629A (en) Optical path control device and manufacturing method
JPH04354668A (en) Aspherical surface machining method
JPH11239036A (en) Piezo-electric resonator
KR950016298A (en) Structure of optical path adjusting device of projection image display device and manufacturing method thereof
KR950016314A (en) Light path adjuster structure of the projection image display device

Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20020429

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee