KR950017791A - Method for preparing spin-on-glass coating liquid - Google Patents

Method for preparing spin-on-glass coating liquid Download PDF

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Publication number
KR950017791A
KR950017791A KR1019930027461A KR930027461A KR950017791A KR 950017791 A KR950017791 A KR 950017791A KR 1019930027461 A KR1019930027461 A KR 1019930027461A KR 930027461 A KR930027461 A KR 930027461A KR 950017791 A KR950017791 A KR 950017791A
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South Korea
Prior art keywords
coating liquid
acid
spin
glass coating
preparing
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KR1019930027461A
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Korean (ko)
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KR960006542B1 (en
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남동진
박정옥
여종기
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최근선
주식회사 엘지화학
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Publication of KR950017791A publication Critical patent/KR950017791A/en
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Publication of KR960006542B1 publication Critical patent/KR960006542B1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02Silicon compounds
    • C07F7/08Compounds having one or more C—Si linkages
    • C07F7/0834Compounds having one or more O-Si linkage
    • C07F7/0836Compounds with one or more Si-OH or Si-O-metal linkage

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

다음 일반식 (I)과 (II)로 표시되는 테트라알콕시실란과 트리알콕시실란을 2:8 ~ 8:2의 물비로 이소프로필알콘 또는 그 혼합 용매와 혼합한 혼합물에 물, 이소프로필알콜 그리고 산으로 이루어진 산용액을 상온에서 적하하여 가수분해시킨 후 반응시켜 얻어진 생성물을 혼합용매로 희석시킴을 특징으로 하는 스핀-온-글라스 도포액의 제조방법To a mixture of tetraalkoxysilanes and trialkoxysilanes represented by the following general formulas (I) and (II) with isopropyl alcohol or its mixed solvent in a water ratio of 2: 8 to 8: 2, water, isopropyl alcohol and acid A method for producing a spin-on-glass coating solution, characterized in that the acid solution consisting of the solution is added dropwise at room temperature and then hydrolyzed and diluted with a mixed solvent.

Si-(OR1)4...............................(I)Si- (OR 1 ) 4 ............................... (I)

R3-Si-(OR2)3............................(II)R 3 -Si- (OR 2 ) 3 ... (II)

상기 식들에서, R1및 R2는 동일하거나 상이하며, 각각은 C1내지 C6의 알킬기이고, R3는 수소원자나 C1내지 C6의 알킬기 또는 C6내지 C20의 알킬기이다.In the above formulas, R 1 and R 2 are the same or different and each is a C 1 to C 6 alkyl group, and R 3 is a hydrogen atom or a C 1 to C 6 alkyl group or a C 6 to C 20 alkyl group.

Description

스핀-온-글라스 도포액의 제조방법Method for preparing spin-on-glass coating liquid

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (9)

다음 일반식(I)과 (II)로 표시되는 테트라알콕시실란과 트리알콕시실란을 2 : 8∼8 : 2의 몰비로 이소프로필알클 또는 그 혼합용매와 혼합한 혼합물에 물, 이소프로필알콜 그리고 산으로 이루어진 산용액을 상온(20∼25℃)에서 적하하여 가수분해시킨 후 반응시켜 얻어진 생성물을 혼합용매로 희석시킴을 특징으토 하는 스핀-온-글라스 도포액의 제조방법To a mixture of tetraalkoxysilanes and trialkoxysilanes represented by the following general formulas (I) and (II) with isopropyl alcohol or its mixed solvent in a molar ratio of 2: 8 to 8: 2, water, isopropyl alcohol and acid A method of preparing a spin-on-glass coating solution characterized by diluting an acid solution consisting of a solution at room temperature (20-25 ° C.), hydrolyzing and diluting the resulting product with a mixed solvent. 상기 식들에서, R1및 R2는 동일하거나 상이하며, 각각은 C1내지 C6의 알킬기이고, R3는 수소원자나 C1내지 C6의 알킬기 또는 C6내지 C20의 아릴기이다·Wherein R 1 and R 2 are the same or different and each is a C 1 to C 6 alkyl group and R 3 is a hydrogen atom or a C 1 to C 6 alkyl group or a C 6 to C 20 aryl group 제 1 항에 있어서, 제조된 SOG 도포액의 pH가를 1 .5 내지 4.5임을 특징으로 하는 스핀-온-글라스도포액의 제조방법.The method of claim 1, wherein the pH of the prepared SOG coating liquid is 1.5 to 4.5. 제 1 항에 있어서, 혼합용매가 이소부틸알콜, 이소펜틸알콜, 메탄올, 에탄올, 프로잔올, 이소프로필알콜, 아세톤, 메틸에틸케톤 및 n-부탄올에서 단독 또는 두가지 이상의 혼합물로 사용함을 특징으로 하는스핀-온-글라스 도포액의 제조방법.The method of claim 1, wherein the mixed solvent is used in isobutyl alcohol, isopentyl alcohol, methanol, ethanol, prozanol, isopropyl alcohol, acetone, methyl ethyl ketone and n-butanol alone or as a mixture of two or more Method for preparing on-glass coating liquid. 제 1 항에 있어서, 산용액을 1∼10시간동안 적하항을 특징으로 하는 스핀-온-글라스 도포액의 제조방법.The method for producing a spin-on-glass coating solution according to claim 1, wherein the acid solution is added dropwise for 1 to 10 hours. 제 1 항에 있어서, 제조된 SOG 도포액의 고형분의 항량을 5∼25중량%임을 특징으로 하는 스핀-온-글라스 도포액의 제조방법.The method for producing a spin-on-glass coating liquid according to claim 1, wherein the solid content of the produced SOG coating liquid is 5 to 25% by weight. 제 1 항에 있어서, 산은 질산, 염산, 옥살산, 아세트산, 황산, 불산임을 특징으로 하는 스핀-온-글라스 도포액의 제조방법The method of claim 1, wherein the acid is nitric acid, hydrochloric acid, oxalic acid, acetic acid, sulfuric acid, hydrofluoric acid. 제 1 항에 있어서, 제조된 SOG 도포액에서 H2O/Si의 몰비가 1∼21임을 특징으로 하는 스핀-온-글라스 도포액의 제조방법.The method for preparing a spin-on-glass coating liquid according to claim 1, wherein the molar ratio of H 2 O / Si in the prepared SOG coating liquid is 1 to 21. 제 1 항에 있어서, 테트라알콕시실란이 테트라에틸오르소실러케이토(TEOS)임을 특징으로 하는 스핀-온-글라스 도포액의 제조방법.The method for producing a spin-on-glass coating liquid according to claim 1, wherein the tetraalkoxysilane is tetraethylorthosilicato (TEOS). 제 1 항에 있어서, 트리알콕시실란이 메틸트리에톡시실리케이트(MTES)임을 특징으로 하는 스핀-온-글라스 도포액의 제조방법.The method for preparing a spin-on-glass coating liquid according to claim 1, wherein the trialkoxysilane is methyltriethoxysilicate (MTES). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930027461A 1993-12-11 1993-12-11 Method of spin-on-glass coating liquid KR960006542B1 (en)

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KR950017791A true KR950017791A (en) 1995-07-20
KR960006542B1 KR960006542B1 (en) 1996-05-17

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345282B1 (en) * 2000-01-26 2002-07-25 테스텍 주식회사 A manufacturing method of contact luminescent elements having an improved luminescent brightness

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101367294B1 (en) * 2012-11-07 2014-02-28 (주)경동하이테크 Methods of preparing composition for incombustible ceramic binder resin and fiber reinforced ceramic using the composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345282B1 (en) * 2000-01-26 2002-07-25 테스텍 주식회사 A manufacturing method of contact luminescent elements having an improved luminescent brightness

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