KR950015521U - 필터 오염제거수단을 구비한 노광대 - Google Patents

필터 오염제거수단을 구비한 노광대

Info

Publication number
KR950015521U
KR950015521U KR2019930025745U KR930025745U KR950015521U KR 950015521 U KR950015521 U KR 950015521U KR 2019930025745 U KR2019930025745 U KR 2019930025745U KR 930025745 U KR930025745 U KR 930025745U KR 950015521 U KR950015521 U KR 950015521U
Authority
KR
South Korea
Prior art keywords
exposure table
decontamination means
filter decontamination
filter
exposure
Prior art date
Application number
KR2019930025745U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930025745U priority Critical patent/KR950015521U/ko
Publication of KR950015521U publication Critical patent/KR950015521U/ko

Links

KR2019930025745U 1993-11-30 1993-11-30 필터 오염제거수단을 구비한 노광대 KR950015521U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930025745U KR950015521U (ko) 1993-11-30 1993-11-30 필터 오염제거수단을 구비한 노광대

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930025745U KR950015521U (ko) 1993-11-30 1993-11-30 필터 오염제거수단을 구비한 노광대

Publications (1)

Publication Number Publication Date
KR950015521U true KR950015521U (ko) 1995-06-19

Family

ID=60820804

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930025745U KR950015521U (ko) 1993-11-30 1993-11-30 필터 오염제거수단을 구비한 노광대

Country Status (1)

Country Link
KR (1) KR950015521U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination