KR950015521U - 필터 오염제거수단을 구비한 노광대 - Google Patents
필터 오염제거수단을 구비한 노광대Info
- Publication number
- KR950015521U KR950015521U KR2019930025745U KR930025745U KR950015521U KR 950015521 U KR950015521 U KR 950015521U KR 2019930025745 U KR2019930025745 U KR 2019930025745U KR 930025745 U KR930025745 U KR 930025745U KR 950015521 U KR950015521 U KR 950015521U
- Authority
- KR
- South Korea
- Prior art keywords
- exposure table
- decontamination means
- filter decontamination
- filter
- exposure
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930025745U KR950015521U (ko) | 1993-11-30 | 1993-11-30 | 필터 오염제거수단을 구비한 노광대 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930025745U KR950015521U (ko) | 1993-11-30 | 1993-11-30 | 필터 오염제거수단을 구비한 노광대 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950015521U true KR950015521U (ko) | 1995-06-19 |
Family
ID=60820804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930025745U KR950015521U (ko) | 1993-11-30 | 1993-11-30 | 필터 오염제거수단을 구비한 노광대 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950015521U (ko) |
-
1993
- 1993-11-30 KR KR2019930025745U patent/KR950015521U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |