KR950015506U - 스퍼터링 장치용 전원 공급 구조 - Google Patents

스퍼터링 장치용 전원 공급 구조

Info

Publication number
KR950015506U
KR950015506U KR2019930025732U KR930025732U KR950015506U KR 950015506 U KR950015506 U KR 950015506U KR 2019930025732 U KR2019930025732 U KR 2019930025732U KR 930025732 U KR930025732 U KR 930025732U KR 950015506 U KR950015506 U KR 950015506U
Authority
KR
South Korea
Prior art keywords
power supply
supply structure
sputtering device
sputtering
power
Prior art date
Application number
KR2019930025732U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930025732U priority Critical patent/KR950015506U/ko
Publication of KR950015506U publication Critical patent/KR950015506U/ko

Links

KR2019930025732U 1993-11-30 1993-11-30 스퍼터링 장치용 전원 공급 구조 KR950015506U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930025732U KR950015506U (ko) 1993-11-30 1993-11-30 스퍼터링 장치용 전원 공급 구조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930025732U KR950015506U (ko) 1993-11-30 1993-11-30 스퍼터링 장치용 전원 공급 구조

Publications (1)

Publication Number Publication Date
KR950015506U true KR950015506U (ko) 1995-06-19

Family

ID=60669906

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930025732U KR950015506U (ko) 1993-11-30 1993-11-30 스퍼터링 장치용 전원 공급 구조

Country Status (1)

Country Link
KR (1) KR950015506U (ko)

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Legal Events

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